Method of making a semiconductor device using a dummy gate
A method of making a semiconductor device includes forming a fin mask layer on a semiconductor layer, forming a dummy gate over the fin mask layer, and forming source and drain regions on opposite sides of the dummy gate. The dummy gate is removed and the underlying fin mask layer is used to define a plurality of fins in the semiconductor layer. A gate is formed over the plurality of fins.
1. A semiconductor device, comprising:
a semiconductor layer having a first portion defining a fin having a first height, a second portion at a first end of the fin in a first lateral direction, and a third portion at a second end of the fin in the first lateral direction, each of the second portion and the third portion having a second height lower than the first height;
a gate overlying the fin;
a source region comprising a first epitaxially grown semiconductor on the second portion of the semiconductor layer;
a drain region comprising a second epitaxially grown semiconductor on the third portion of the semiconductor layer, the source region and the drain region being at opposite ends of the gate in the first lateral direction; and
in cross-sectional view, a first sidewall spacer on one side of the gate and a second sidewall spacer on the opposite side of the gate, the first and second sidewall spacers directly contacting opposite sides of the gate on sides nearest to the gate and directly contacting the source region and the drain region, respectively, on sides farthest from the gate, wherein:
the fin has a lower portion below the second height and an upper portion above the second height, wherein the upper portion extends in the first lateral direction between the source region and the drain region;
the fin has a width in a second lateral direction perpendicular to the first lateral direction; and
each of the second and third portions of the semiconductor layer has a width in the second lateral direction.
2. The semiconductor device of claim 1 , wherein the semiconductor layer has an opening on each side of the lower portion of the fin in the second lateral direction.
3. The semiconductor device of claim 1 , further comprising a fin mask layer on the fin with the gate overlying the fin and the fin mask layer.
4. The semiconductor device of claim 1 , wherein there is no fin mask layer on the fin underlying the gate.
5. The semiconductor device of claim 1 , wherein the gate includes a dielectric layer and a polysilicon layer on the dielectric layer.
6. The semiconductor device of claim 5 , wherein the dielectric layer is in direct contact with the fin.
7. The semiconductor device of claim 1 , further comprising:
an other semiconductor layer; and
a dielectric layer on the other semiconductor layer, the semiconductor layer being on the dielectric layer and spaced from the other semiconductor layer by the dielectric layer.
8. The semiconductor device of claim 1 , further comprising a dielectric layer on the source region and the drain region, the dielectric layer directly contacting the sidewall spacers.
9. The semiconductor device of claim 8 , wherein a top surface of the dielectric layer is coplanar with an upper surface of the gate.
10. The semiconductor device of claim 1 , wherein the fin does not extend laterally into the source and drain regions in the first lateral direction.
11. The semiconductor device of claim 1 , wherein the fin does not extend laterally beyond the footprint of the gate and sidewall spacers in the first lateral direction.
12. The semiconductor device of claim 1 , wherein:
the semiconductor layer comprises a first semiconductor material; and
the first and second epitaxially grown semiconductors structures-comprise a second semiconductor material different from the first semiconductor material.
13. The semiconductor device of claim 12 , wherein:
the first semiconductor material is Si; and
the second semiconductor material is SiGe.
14. A semiconductor device, comprising:
a fin;
an epitaxy source region on a first semiconductor and adjacent to a first end of the fin in a first lateral direction;
an epitaxy drain region on a second semiconductor and adjacent to a second end of the fin in the first lateral direction;
in cross-sectional view, a first sidewall spacer between the first end of the fin and the epitaxy source region and a second sidewall spacer between the second end of the fin and the epitaxy drain region in the first lateral direction; and
a gate overlaying the fin, wherein:
the first and second sidewall spacers directly contact opposite sides of the gate on sides nearest the gate and directly contact the source region and the drain region, respectively, on sides farthest from the gate;
the fin extends between the epitaxy source region and the epitaxy drain region in the first lateral direction;
the fin has a width in a second lateral direction perpendicular to the first lateral direction; and
each of the first and second semiconductors has a width in the second lateral direction.
15. A semiconductor device, comprising:
a semiconductor layer including (i) a fin and (ii) a first recess and a second recess on two opposite ends of the fin in a first lateral direction, the fin having a top surface that is different from a bottom surface of each of the first recess and the second recess of the semiconductor layer, the fin protruding higher than the bottom surface;
a gate overlying the top surface of the fin;
a source region of an epitaxy semiconductor material in the first recess of the semiconductor layer;
a drain region of the epitaxy semiconductor material in the second recess of the semiconductor layer; and
in cross-sectional view, a first sidewall spacer on one side of the gate and a second sidewall spacer on the opposite side of the gate, the first and second sidewall spacers directly contacting opposite sides of the gate on sides nearest to the gate and directly contacting the drain region and the source region, respectively, on sides farthest from the gate, wherein:
the fin extends in the first lateral direction between the source region and the drain region;
the fin has a width in a second lateral direction perpendicular to the first lateral direction; and
each of the first and second recesses has a corresponding width in the second lateral direction.