Die alignment method using magnetic force
A die alignment method includes vertically aligning a first die comprising first magnetic patterns and a second die comprising second magnetic patterns with each other using magnetic force between the first magnetic patterns and the second magnetic patterns. Each of the first magnetic patterns and the second magnetic patterns comprises a horizontally magnetically anisotropic material. The first magnetic patterns and the second magnetic patterns do not vertically overlap each other when the first die and the second die are vertically aligned with each other.
1 . A die alignment method comprising:
vertically aligning a first die comprising first magnetic patterns and a second die comprising second magnetic patterns with each other using magnetic force between the first magnetic patterns and the second magnetic patterns,
wherein each of the first magnetic patterns and the second magnetic patterns comprises a horizontally magnetically anisotropic material, and
wherein the first magnetic patterns and the second magnetic patterns do not vertically overlap each other when the first die and the second die are vertically aligned with each other.
2 . The die alignment method according to claim 1 , wherein the using the magnetic force between the first magnetic patterns and the second magnetic patterns comprises using repulsive force and attractive force.
3 . The die alignment method according to claim 1 , further comprising:
generating a magnetic field to magnetize the first magnetic patterns and the second magnetic patterns.
4 . The die alignment method according to claim 3 , wherein a direction of the magnetic field is parallel to an extension direction of the first die and the second die.
5 . The die alignment method according to claim 3 , wherein the first magnetic patterns and the second magnetic patterns are magnetized in in-plane directions thereof, respectively.
6 . The die alignment method according to claim 1 , wherein:
the first magnetic patterns comprise two upper patterns adjacent to each other; and
the second magnetic patterns comprise a lower pattern disposed in the second die to correspond to a region between the two adjacent upper patterns when the first die and the second die are vertically aligned with each other.
7 . The die alignment method according to claim 6 , wherein opposite side surfaces of the lower pattern are vertically aligned with facing side surfaces of the two upper patterns adjacent to each other, respectively.