Stacked integrated passive device
A device according to some embodiments includes a first IPD die including a first SiC substrate. The first IPD die has a first surface and a second surface on the first SiC substrate opposite the first surface and includes a first contact and at least one first metal portion on the respective surfaces of the first SiC substrate. The device further includes a second IPD die including a second SiC substrate. The second IPD die has a third surface and a fourth surface on the second SiC substrate opposite the third surface and includes a second contact and at least one second metal portion on the respective surfaces of the second SiC substrate. The device further includes an electrical interconnection structure between one of the first and second surfaces of the first IPD die and one of the third and fourth surfaces of the second IPD die.
1 . A device comprising:
a first integrated passive device (IPD) die comprising at least one passive component fabricated on a first silicon carbide (SiC) substrate, the first IPD die having a first surface on the first SiC substrate and a second surface on the first SiC substrate opposite the first surface and comprising a first contact on the first surface and at least one first metal portion on the second surface of the first SiC substrate;
a second IPD die comprising at least one passive component fabricated on a second SiC substrate, the second IPD die having a third surface on the second SiC substrate and a fourth surface on the second SiC substrate opposite the third surface and comprising a second contact on the third surface and at least one second metal portion on the fourth surface of the second SiC substrate; and
at least one electrical interconnection structure between one of the first and second surfaces of the first IPD die and one of the third and fourth surfaces of the second IPD die.
2 . The device of claim 1 , further comprising:
at least one mechanical support structure between one of the first and second surfaces of the first IPD die and one of the third and fourth surfaces of the second IPD die.
3 . The device of claim 1 , wherein the at least one electrical interconnection structure comprises at least one of (i) a metal material comprising copper (Cu), gold (Ag), or silver tin (AgSn); and (ii) a conductive epoxy.
4 . The device of claim 1 , wherein the first surface of the first IPD die faces the fourth surface of the second IPD die and the at least one electrical interconnection structure is connected to the first contact of the first IPD die and the at least one second metal portion on the fourth surface of the second IPD die.
5 . The device of claim 1 , wherein the first surface of the first IPD die faces the third surface of the second IPD die and the at least one electrical interconnection structure is connected to the first contact of the first IPD die and the second contact on the third surface of the second IPD die.
6 . The device of claim 1 , further comprising:
a first conductive via structure in the first SiC substrate, wherein the at least one first metal portion on the second surface of the first SiC substrate is electrically connected to the first contact on the first surface of the first IPD die by the first conductive via structure; and
a second conductive via structure in the second SiC substrate, wherein the at least one second metal portion on the fourth surface of the second SiC substrate is electrically connected to the second contact on the third surface of the second IPD die by the second conductive via structure.
7 . The device of claim 1 , wherein the at least one first metal portion on the second surface of the first SiC substrate is patterned to form at least one of a pad and a routing trace for the electrical connection of the first IDP die to the second IPD die.
8 . The device of claim 1 , wherein the at least one second metal portion on the fourth surface of the second SiC substrate is patterned to form at least one of a pad and a routing trace for the electrical connection of the first IDP die to the second IPD die.
9 . The device of claim 1 , further comprising:
a dielectric material between the first IDP die and the second IPD die.
10 . The device of claim 1 , wherein the first IPD die comprises a first metal-insulator-metal, MIM, capacitor on the first SiC substrate and the second IPD die comprises a second MIM capacitor on the second SiC substrate and the at least one electrical interconnection structure comprises (i) a first electrical interconnection structure between a first metal on the first surface of the first MIM capacitor to a second metal on the third surface of the second MIM capacitor and (ii) a second electrical interconnection structure between a second metal on the first surface of the first MIM capacitor to a first metal on the third surface of the second MIM capacitor.
11 . The device of claim 1 , wherein the first IPD die comprises a first metal-insulator-metal (MIM) capacitor on the first SiC substrate and the second IPD die comprises a second MIM capacitor on the second SiC substrate and the at least one electrical interconnection structure comprises (i) a first electrical interconnection structure between a first metal on the first surface of the first MIM capacitor to a first metal portion of the at least one second metal portion on the fourth surface of the second IPD die and (ii) a second electrical interconnection structure between a second metal on the first surface of the first MIM capacitor and a second metal portion of the at least one second metal portion on the fourth surface of the second IPD die.
12 . The device of claim 1 , wherein the first IPD die comprises a first spiral inductor and the second IPD die comprises a second spiral inductor and the at least one electrical interconnection structure comprises a first electrical interconnection structure and a second electrical interconnection structure between the first and second spiral inductors connected in parallel.
13 . The device of claim 1 , wherein the first IPD die comprises a first spiral inductor and the second IPD die comprises a second spiral inductor and the at least one electrical interconnection structure between the first and second spiral inductors connected in series.
14 . The device of claim 1 , wherein the first IPD die comprises a one to one coupler comprising a first metal trace on the first surface of the first IPD die and a second metal trace on the first surface of the second IPD die, and the at least one electrical interconnection structure is between one of the first and second surfaces of the first IPD die and one of the third and fourth surfaces of the second IPD die.
15 . The device of claim 1 , wherein the device comprises a resonant structure comprising the first IPD die comprising a metal-insulator-metal capacitor and the second IPD die comprising an inductor, and the at least one electrical interconnection structure is between one of the first and second surfaces of the first IPD die and one of the third and fourth surfaces of the second IPD die.
16 . An RF component package, comprising:
an encapsulated device comprising a plurality of IPD dies in a stacked structure, wherein the device comprises:
a first IDP die comprising at least one passive component fabricated on a first silicon carbide (SiC) substrate, the first IPD die having a first surface on the first SiC substrate and a second surface on the first SiC substrate opposite the first surface and comprising a first contact on the first surface and at least one first metal portion on the second surface of the first SiC substrate;
a second IDP die comprising at least one passive component fabricated on a second SiC substrate, the second IPD die having a third surface on the second SiC substrate and a fourth surface on the second SiC substrate opposite the third surface and comprising a second contact on the third surface and at least one second metal portion on the fourth surface of the second SiC substrate; and
at least one electrical interconnection structure between one of the first and second surfaces of the first IPD die and one of the third and fourth surfaces of the second IPD die.
17 . The RF component package of claim 16 , further comprising:
at least one mechanical support structure between one of the first and second surfaces of the first IPD die and one of the third and fourth surfaces of the second IPD die.
18 . The RF component package of claim 16 , wherein the at least one electrical interconnection structure comprises at least one of (i) a metal material comprising copper (Cu), gold (Ag), or silver tin (AgSn); and (ii) a conductive epoxy.
19 . The RF component package of claim 16 , wherein the first surface of the first IPD die faces the fourth surface of the second IPD die and the at least one electrical interconnection structure is connected to the first contact of the first IPD die and the at least one second metal portion on the fourth surface of the second IPD die.
20 . The RF component package of claim 16 , wherein the first surface of the first IPD die faces the third surface of the second IPD die and the at least one electrical interconnection structure is connected to the first contact of the first IPD die and the second contact on the third surface of the second IPD die.
21 . The RF component package of claim 16 , further comprising:
a first conductive via structure in the first SiC substrate, wherein the at least one first metal portion on the second surface of the first SiC substrate is electrically connected to the first contact on the first surface of the first IPD die by the first conductive via structure; and
a second conductive via structure in the second SiC substrate, wherein the at least one second metal portion on the fourth surface of the second SiC substrate is electrically connected to the second contact on the third surface of the second IPD die by the second conductive via structure.
22 . The RF component package of claim 16 , wherein the at least one first metal portion on the second surface of the first SiC substrate is patterned to form at least one of a pad and a routing trace for the electrical connection of the first IDP die to the second IPD die.
23 . The RF component package of claim 16 , wherein the at least one second metal portion on the fourth surface of the second SiC substrate is patterned to form at least one of a pad and a routing trace for the electrical connection of the first IDP die to the second IPD die.
24 . The RF component package of claim 16 , further comprising:
a dielectric material between the first IDP die and the second IPD die.
25 . The RF component package of claim 16 , wherein the first IPD die comprises a first metal-insulator-metal (MIM) capacitor on the first SiC substrate and the second IPD die comprises a second MIM capacitor on the second SiC substrate and the at least one electrical interconnection structure comprises (i) a first electrical interconnection structure between a first metal on the first surface of the first MIM capacitor and a second metal on the third surface of the second MIM capacitor and (ii) a second electrical interconnection structure between a second metal on the first surface of the first MIM capacitor and a first metal on the third surface of the second MIM capacitor.
26 . The RF component package of claim 16 , wherein the first IPD die comprises a first metal-insulator-metal (MIM) capacitor on the first SiC substrate and the second IPD die comprises a second MIM capacitor on the second SiC substrate and the at least one electrical interconnection structure comprises (i) a first interconnection structure between a first metal on the first surface of the first MIM capacitor and a first metal portion of the at least one second metal portion on the fourth surface of the second IPD die and (ii) a second electrical interconnection structure between a second metal on the first surface of the first MIM capacitor and second metal portion of the at least one second metal portion on the fourth surface of the second IPD die.
27 . The RF component package of claim 16 , wherein the first IPD die comprises a first spiral inductor and the second IPD die comprises a second spiral inductor and the at least one electrical interconnection structure comprises a first electrical interconnection structure and a second electrical interconnection structure between the first and second spiral inductors connected in parallel.
28 . The RF component package of claim 16 , wherein the first IPD die comprises a first spiral inductor and the second IPD die comprises a second spiral inductor and the at least one electrical interconnection structure is between the first and second spiral inductors connected in series.
29 . The RF component package of claim 16 , wherein the first IPD die comprises a one to one coupler comprising a first metal trace of the first surface of the first IPD die and a second metal trace on the third surface of the second IPD die, and the at least one electrical interconnection structure is between one of the first and second surfaces of the first IPD die and one of the third and fourth surfaces of the second IPD die.
30 . The RF component package of claim 16 , wherein the device comprises a resonant structure comprising the first IPD die comprising a metal-insulator-metal capacitor and the second IPD die comprising an inductor, and the at least one electrical interconnection structure is between one of the first and second surfaces of the first IPD die and one of the third and fourth surfaces of the second IPD die.