IP Library › Granted Patent US 12,176,023
Granted Patent B2
US 12,176,023 · App. 18/080,456 · Granted Dec 24, 2024

Non-volatile static random access memory bit cells with ferroelectric field-effect transistors

Inventors: Pirooz Parvarandeh (Los Altos Hills, CA); Venkatesh P. Gopinath (Fremont, CA); Navneet Jain (Milpitas, CA); Bipul C. Paul (Mechanicville, NY); Halid Mulaosmanovic (Dresden, DE)
Assignee: GlobalFoundries U.S. Inc.
G11C11/412G11C11/419H01L29/40111H10B10/12
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Quick Facts
Patent No.
US 12,176,023
App. No.
18/080,456
Granted
Dec 24, 2024
Kind
B2
Abstract

Structures for a static random access memory bit cell and methods of forming a structure for a static random access memory bit cell. The structure comprises a static random access memory bit cell including a first node and a second node, a first ferroelectric field-effect transistor including a first terminal connected to the first node, and a second ferroelectric field-effect transistor including a second terminal connected to the second node.

Claims (36)

1. A structure comprising:

a static random access memory bit cell including a first node and a second node;

a first ferroelectric field-effect transistor including a first gate terminal and a first source/drain terminal, the first gate terminal connected to the first node;

a second ferroelectric field-effect transistor including a second gate terminal and a second source/drain terminal, the second gate terminal connected to the second node; and

a signal line connected to the first source/drain terminal of the first ferroelectric field-effect transistor by a first unswitched line and to the second source/drain terminal of the second ferroelectric field-effect transistor by a second unswitched line.

2. A structure comprising:

a static random access memory bit cell including a first node and a second node;

a first ferroelectric field-effect transistor including a first gate terminal and a first source/drain terminal, the first gate terminal connected to the first node;

a second ferroelectric field-effect transistor including a second gate terminal and a second source/drain terminal, the second gate terminal connected to the second node; and

a signal line connected to the first source/drain terminal of the first ferroelectric field-effect transistor and to the second source/drain terminal of the second ferroelectric field-effect transistor,

wherein the first source/drain terminal of the first ferroelectric field-effect transistor is directly connected to the signal line, and the second source/drain terminal of the second ferroelectric field-effect transistor is directly connected to the signal line.

3. The structure of claim 2 wherein the first gate terminal includes a first ferroelectric layer, and the second gate terminal includes a second ferroelectric layer.

4. The structure of claim 2 wherein the first ferroelectric field-effect transistor and the second ferroelectric field-effect transistor are n-type ferroelectric field-effect transistors.

5. The structure of claim 2 wherein the first ferroelectric field-effect transistor and the second ferroelectric field-effect transistor are p-type ferroelectric field-effect transistors.

6. The structure of claim 1 wherein the static random access memory bit cell includes a first inverter and a second inverter that is cross-connected to the first inverter.

7. The structure of claim 1 wherein the static random access memory bit cell further comprises a first access transistor and a second access transistor, and further comprising:

a first bit line connected by the first access transistor to the first node; and

a second bit line connected by the second access transistor to the second node.

8. A method comprising:

forming a first ferroelectric field-effect transistor including a first gate terminal and a first source/drain terminal, wherein the first gate terminal is connected to a first node of a static random access memory bit cell;

forming a second ferroelectric field-effect transistor including a second gate terminal and a second source/drain terminal, wherein the second gate terminal is connected to a second node of the static random access memory bit cell; and

forming a signal line connected to the first source/drain terminal of the first ferroelectric field-effect transistor by a first unswitched line and to the second source/drain terminal of the second ferroelectric field-effect transistor by a second unswitched line.

9. The structure of claim 1 wherein the first gate terminal includes a first ferroelectric layer, and the second gate terminal includes a second ferroelectric layer.

10. The structure of claim 9 wherein the first ferroelectric layer and the second ferroelectric layer comprise a high-k dielectric material.

11. The structure of claim 1 wherein the first ferroelectric field-effect transistor and the second ferroelectric field-effect transistor are n-type ferroelectric field-effect transistors.

12. The structure of claim 1 wherein the first ferroelectric field-effect transistor and the second ferroelectric field-effect transistor are p-type ferroelectric field-effect transistors.

13. The structure of claim 1 wherein the signal line is configured to supply a programming voltage for a store operation to the first ferroelectric field-effect transistor and the second ferroelectric field-effect transistor.

14. The structure of claim 1 wherein the signal line is configured to supply a programming voltage for a restore operation to the first ferroelectric field-effect transistor and the second ferroelectric field-effect transistor.

15. The structure of claim 2 wherein the signal line is configured to supply a programming voltage for a store operation to the first ferroelectric field-effect transistor and the second ferroelectric field-effect transistor.

16. The structure of claim 2 wherein the signal line is configured to supply a programming voltage for a restore operation to the first ferroelectric field-effect transistor and the second ferroelectric field-effect transistor.

17. The structure of claim 2 wherein the static random access memory bit cell includes a first inverter and a second inverter that is cross-connected to the first inverter.

18. The structure of claim 2 wherein the static random access memory bit cell further comprises a first access transistor and a second access transistor, and further comprising:

a first bit line connected by the first access transistor to the first node; and

a second bit line connected by the second access transistor to the second node.

19. The method of claim 8 wherein the signal line is configured to supply a programming voltage for a store operation to the first ferroelectric field-effect transistor and the second ferroelectric field-effect transistor.

20. The method of claim 8 wherein the signal line is configured to supply a programming voltage for a restore operation to the first ferroelectric field-effect transistor and the second ferroelectric field-effect transistor.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 13, 2022
From: PARVARANDEH, PIROOZ; GOPINATH, VENKATESH P.; JAIN, NAVNEET; PAUL, BIPUL C.; MULAOSMANOVIC, HALID
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 062073/0035 →
Continuity (1)
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