IP Library › Granted Patent US 12,325,933
Granted Patent B2
US 12,325,933 · App. 18/086,888 · Granted Jun 10, 2025

Silicon carbide powder, method for manufacturing silicon carbide ingot using the same, and silicon carbide wafer

Inventors: Jong Hwi Park (Gyeonggi-do, KR); Kap Ryeol Ku (Gyeonggi-do, KR); Jung Gyu Kim (Gyeonggi-do, KR); Jung Woo Choi (Gyeonggi-do, KR); Jung Doo Seo (Gyeonggi-do, KR); Myung Ok Kyun (Gyeonggi-do, KR)
Assignee: SENIC INC.
C30B29/06C30B29/36C30B33/10C30B33/12C30B35/002H01L21/02126
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Quick Facts
Patent No.
US 12,325,933
App. No.
18/086,888
Granted
Jun 10, 2025
Kind
B2
Abstract

Disclosed are a silicon carbide powder, a method of manufacturing a silicon carbide powder, and a silicon carbide wafer. More particularly, the silicon carbide powder includes carbon and silicon and in the silicon carbide powder, O1s/C1s of a surface measured by X-ray photoelectron spectroscopy is 0.28 or less.

Claims (8)

1. A silicon carbide powder, comprising carbon and silicon,

wherein O1s/C1s measured by X-ray photoelectron spectroscopy is 0.28 or less,

wherein O1s/Si2p of a surface measured by X-ray photoelectron spectroscopy is 0.39 or less,

wherein an oxygen ratio in the surface measured by X-ray photoelectron spectroscopy is 13 atom % or less,

wherein a concentration of oxygen in a depth where an oxygen concentration change according to an etching time is 2 atom %/100s or less is 5 atom % or less.

2. The silicon carbide powder according to claim 1 , wherein Zn2p/C1s of a surface of measured by X-ray photoelectron spectroscopy is 0.023 or less.

3. The silicon carbide powder according to claim 2 , wherein Mg1s/C1s of the surface of the silicon carbide powder measured by X-ray photoelectron spectroscopy is 0.005 or less.

4. The silicon carbide powder according to claim 1 , wherein N1s/C1s of the surface measured by X-ray photoelectron spectroscopy is 0.018 or less.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 20, 2025
From: SENIC INC.
To: EIN CRYSTAL CO., LTD.
Reel/Frame 072990/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 21, 2025
From: PUJOL SIMON, ANTONI; JACAS, JOSEP
To: LEAR CORPORATION
Reel/Frame 070591/0067 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 22, 2022
From: PARK, JONG HWI; KU, KAP RYEOL; KIM, JUNG GYU; CHOI, JUNG WOO; SEO, JUNG DOO; KYUN, MYUNG OK
To: SENIC INC.
Reel/Frame 062181/0910 →
Priority Claims (1)
KR 10-2021-0186627 · Dec 23, 2021 · national
Continuity (1)
Related Publication 20230203707A1 · Jun 29, 2023
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