Optical power splitters incorporating one or more spiral elements
Structures for an optical power splitter and methods of forming a structure for an optical power splitter. The structure comprises a spiral waveguide core having an outer perimeter. The structure further comprises a plurality of waveguide cores. Each waveguide core has a section disposed adjacent to the outer perimeter of the spiral waveguide core.
1. A structure for an optical power coupler, the structure comprising:
a spiral waveguide core including a plurality of spiral elements that are arranged in a spiral, the spiral elements including an outermost spiral element having an outer radius defining an outer perimeter of the spiral waveguide core; and
a plurality of first waveguide cores, each of the first waveguide cores having a section disposed adjacent to the outer perimeter of the spiral waveguide core.
2. The structure of claim 1 further comprising:
a second waveguide core connected to the outermost spiral element.
3. The structure of claim 1 wherein the spiral elements include an innermost spiral element, and further comprising:
a second waveguide core connected to the innermost spiral element.
4. The structure of claim 1 wherein the spiral waveguide core and the first waveguide cores are disposed in the same plane.
5. The structure of claim 1 wherein the section of each of the first waveguide cores is a taper terminated by an end.
6. The structure of claim 5 wherein the taper of each of the first waveguide cores has a longitudinal axis that is aligned perpendicular to a tangent at a point on the outer perimeter of the spiral waveguide core.
7. The structure of claim 5 wherein the taper of each of the first waveguide cores has a longitudinal axis that is aligned tangential to a point on the outer perimeter of the spiral waveguide core.
8. The structure of claim 5 wherein the taper of each of the first waveguide cores has a longitudinal axis that is aligned at an acute angle relative to a point on the outer perimeter of the spiral waveguide core.
9. The structure of claim 1 wherein the spiral waveguide core comprises a first material, and the first waveguide cores comprise a second material different from the first material.
10. The structure of claim 9 wherein the first material is silicon, and the second material is silicon nitride.
11. The structure of claim 9 wherein the first material is silicon nitride, and the second material is silicon.
12. The structure of claim 1 wherein the spiral waveguide core and the first waveguide cores include a lower layer and an upper layer stacked over the lower layer, the upper layer comprises a first material, the lower layer comprises a second material different from the first material, and the lower layer is separated from the upper layer by dielectric material.
13. The structure of claim 12 wherein the spiral waveguide core comprises silicon, and the first waveguide cores comprise silicon nitride.
14. The structure of claim 1 further comprising:
a dielectric layer over the spiral waveguide core,
wherein the first waveguide cores are disposed on the dielectric layer.
15. The structure of claim 1 further comprising:
a dielectric layer over the first waveguide cores,
wherein the spiral waveguide core is disposed on the dielectric layer.
16. The structure of claim 15 wherein the spiral waveguide core comprises silicon nitride, and the first waveguide cores comprise silicon.
17. The structure of claim 1 wherein the first waveguide cores number four or more.
18. The structure of claim 1 wherein the spiral elements are continuously wound in the spiral with a continuously decreasing radius from the center point.
19. The structure of claim 18 wherein the spiral is an Archimedes spiral.
20. A method of forming a structure for an optical power coupler, the method comprising:
forming a spiral waveguide core including a plurality of spiral elements that are arranged in a spiral, wherein the spiral elements include an outermost spiral element having an outer radius defining an outer perimeter of the spiral waveguide core; and
forming a plurality of waveguide cores, wherein each waveguide core has a section disposed adjacent to the outer perimeter of the spiral waveguide core.