Granted Patent B2

US 12,512,431 · App. 18/111,134 · Granted Dec 30, 2025

Inventors: Liang Wu (Shanghai, CN); Wenshan Pang (Shanghai, CN); Lulu Qi (Shanghai, CN); Xiang Yu (Shanghai, CN); Leijian Yu (Shanghai, CN); Jiong Chen (Shanghai, CN); Gregory Khosrov Arslanian (Pipersville, PA); Yuxiang Zhou (Shanghai, CN)

Assignee: Air Products and Chemicals, Inc.

H01L24/11H01L24/742H01L24/75H01L24/81H01L2224/117H01L2224/1181H01L2224/11849H01L2224/742H01L2224/7501H01L2224/75251H01L2224/81022H01L2224/81211H01L2224/81815H01L2224/81908H01L2924/40

Abstract

Claims (17)

1 . An apparatus for wafer oxide removal and reflow treatment, comprising:

a heating plate,

a sample plate for supporting a wafer sample above the heating plate, and

an electron attachment pin plate above the sample plate,

wherein the heating plate is configured to be capable of moving up and down, and contacting and heating the sample further comprising a shelf for supporting the sample plate, wherein the shelf is located between the sample plate and the heating plate and configured to allow the heating plate to lift the sample plate.

2 . The apparatus according to claim 1 , wherein the heating plate is further configured to be capable of rotating.

3 . The apparatus according to claim 2 , wherein the heating plate is controlled by air cylinders or screw rods for up and down movement and/or rotation.

4 . The apparatus according to claim 1 , wherein the heating plate is capable of contacting and heating the sample plate at a heating rate up to 50° C./min to a temperature up to 500° C.

5 . The apparatus according to claim 1 , wherein the shelf is separated from the electron attachment pin plate, so that when the sample plate sits on the shelf, the gap between the sample surface of the wafer sample on the sample plate and the pin tips of the electron attachment pin plate is greater than 10 mm.

6 . The apparatus according to claim 1 , wherein the heating plate, the sample plate, and the electron attachment pin plate are contained in a chamber.

7 . The apparatus according to claim 1 , wherein the electron attachment pin plate is capable of emitting electrons which collide with hydrogen molecules to produce hydrogen anions to reduce oxides to metal and produce water vapor.

8 . The apparatus according to claim 1 , wherein the apparatus comprises an electron attachment kit comprising the electron attachment pin plate, a high voltage power supply, and a pulse generator.

9 . The apparatus according to claim 1 , wherein the apparatus comprises a heating subsystem comprising the heating plate and a heating control means.

10 . The apparatus according to claim 1 , wherein the heating plate is made of silicon nitride.

11 . The apparatus according to claim 1 , wherein the apparatus comprises a gas delivery means of N 2 , H 2 , or a mixture thereof.

12 . The apparatus according to claim 6 , wherein the apparatus comprises a monitoring system for monitoring a H 2 or O 2 content, a gas flow rate, a chamber pressure, a temperature, or a cooling water flow.

13 . The apparatus according to claim 6 , wherein the apparatus comprises a camera or video for monitoring the inside of the chamber.

Assignments (1)

Continuity (1)

References Cited (28)