Microwave generator driver limiter

1 . A microwave power generator comprising:

a regulated control loop comprising:

a driver stage comprising a driver transistor, the driver stage is configured to receive a source signal that varies based upon a setpoint;

an output stage comprising a power amplifier configured to receive an amplified representation of the source signal from the driver stage; and

a driver limiter configured to be coupled between the driver stage and a DC voltage supply, the driver limiter comprising a resistor coupled between the DC voltage supply and the driver transistor;

wherein the resistor has a resistance value effective to reduce a DC voltage supplied by the DC voltage supply to a control voltage that is applied to the driver transistor to set an output power of the driver transistor at a level effective to drive the power amplifier of the output stage to its maximum output power without exceeding a maximum input power rating of the power amplifier.

2 . The microwave power generator as claimed in claim 1 , wherein:

the resistance value of the resistor is about 13 ohms;

the DC voltage supplied by the DC voltage supply is about 50 volts;

the control voltage applied to the driver transistor is about 43 volts; and

the output power of the driver transistor is about 11 watts.

3 . The microwave power generator as claimed in claim 2 , wherein the resistor is comprised by six resistors connected in series, wherein each of the six resistors has a resistance of about 2.2 ohms.

4 . The microwave power generator as claimed in claim 1 , wherein the driver stage further comprises:

a first capacitor coupled between an input node of the driver stage and the driver transistor; and

a second capacitor coupled between the driver transistor and an output node of the driver stage, wherein

the first and second capacitors have values that keep the driver stage stable and spurious free without attenuating a passband frequency of the driver stage.

5 . The microwave power generator as claimed in claim 4 , wherein

the driver limiter further comprises a third capacitor coupled between an output node of the resistor and ground, and

the third capacitor has a capacitance value effective to minimize overshoot and undershoot of a pulsed RF signal while providing sufficient RF filtering.

6 . The microwave power generator as claimed in claim 5 , wherein the capacitance value of the third capacitor is approximately 0.1 microfarads.

7 . The microwave power generator as claimed in claim 5 , wherein

the driver limiter further comprises a choke inductor coupled between the output node of the resistor and the driver transistor, and

the choke inductor prevents RF leakage from the driver stage into the driver limiter stage.

8 . The microwave power generator as claimed in claim 7 , wherein

the driver limiter further comprises a fourth capacitor coupled between the input node to the resistor and ground,

the fourth capacitor having a bulk capacitance value that maintains a stable voltage level and smooths out any high frequency noise.

9 . The microwave power generator as claimed in claim 1 , wherein the driver transistor is a gallium nitride transistor having a peak frequency of about 2.7 GHZ and a peak output power level of about 15 W.

10 . A method for applying output power to a plasma load, the method comprising:

receiving a setpoint for the output power;

producing a source signal with an attenuation stage and pre-driver stage that varies based upon the setpoint;

receiving, at a driver stage, the source signal and producing an amplified representation of the source signal;

coupling a resistor between a DC power supply and a driver transistor of the driver stage;

setting a resistance value of the resistor to provide a control voltage at an output node of the resistor that is reduced relative to an output voltage of the DC power supply; and

applying the control voltage to the driver transistor to set the output power of the driver transistor at a level effective to drive, with the amplified representation of the source signal, a power amplifier of an output stage coupled to the driver transistor to its maximum output power without exceeding a maximum input power rating of the power amplifier.

11 . The method as claimed in claim 10 , wherein:

the output voltage of the DC power supply is about 50 volts;

the resistance value of the resistor is set to be about 13 ohms; and

the control voltage at the output node of the resistor is about 43 volts.

12 . The method as claimed in claim 10 , further comprising:

coupling a first capacitor to an input of the driver transistor;

coupling a second capacitor to an output of the driver transistor; and

setting values of the first and second capacitors to keep the output power of the driver transistor stable and spurious free without attenuating a passband frequency of the driver stage.

13 . The method as claimed in claim 12 , further comprising:

coupling a third capacitor coupled between the output node of the resistor and ground, and

setting a capacitance value of the third capacitor to be effective to minimize overshoot and undershoot of a pulsed RF signal while providing sufficient RF filtering.

14 . The method as claimed in claim 13 , further comprising:

coupling a choke inductor between the output node of the resistor and the driver transistor to prevent RF leakage from the driver transistor into the resistor and the DC power supply.

15 . The method as claimed in claim 14 , further comprising:

coupling a fourth capacitor between an input node to the resistor and ground that has a bulk capacitance value that maintains a stable voltage level and smooths out any high frequency noise.

16 . A driver limiter for a driver transistor of a microwave power generator comprising:

a resistor coupled between a DC voltage supply and the driver transistor, wherein

the resistor reduces a DC voltage supplied by the DC voltage supply to a control voltage that is applied to the driver transistor to set an output power of the driver transistor at a level effective to drive a power amplifier of an output stage of the microwave power generator to its maximum output power without exceeding a maximum input power rating of the power amplifier.

17 . The driver limiter as claimed in claim 16 , wherein the resistor has a resistance of about 13 ohms.

18 . The driver limiter as claimed in claim 16 , wherein the resistor comprises six resistors coupled in series between the DC power supply and the driver transistor, wherein each of the six resistors has a resistance of about 2.2 ohms.

19 . The driver limiter as claimed in claim 16 , further comprising:

RF filtering means coupled between the resistor and the driver transistor, wherein

the RF filtering means minimizes overshoot and undershoot of a pulsed RF signal and prevents RF leakage from the driver transistor into the resistor and the DC power supply.

20 . The driver limiter as claimed in claim 19 , wherein the RF filtering means comprises:

a capacitor coupled between the resistor and ground; and

a choke inductor coupled between the resistor and the driver transistor.