Gate valve apparatus and semiconductor manufacturing apparatus
A gate valve apparatus and a semiconductor manufacturing apparatus, in which a volume of a drive portion for driving a valve body is reduced, are provided. The gate valve apparatus includes a housing having an opening, a valve body configured to open and close the opening, and a drive portion configured to drive the valve body, in which the drive portion includes a first crankshaft including a first input shaft rotatably supported by a side wall of the housing and a first output shaft rotatably supported by the valve body, a second crankshaft including a second input shaft rotatably supported by the side wall of the housing and a second output shaft rotatably supported by the valve body, a rotation transmission portion configured to transmit rotation of the first input shaft to the second input shaft, and an actuator configured to rotate the first input shaft.
1 . A gate valve apparatus comprising:
a housing having an opening;
a valve body configured to open and close the opening; and
a drive portion configured to drive the valve body,
wherein the drive portion includes:
a first crankshaft including a first input shaft rotatably supported by a side wall of the housing and a first output shaft rotatably supported by the valve body;
a second crankshaft including a second input shaft rotatably supported by the side wall of the housing and a second output shaft rotatably supported by the valve body;
a rotation transmission portion configured to transmit rotation of the first input shaft to the second input shaft, the rotation transmission portion including:
a first timing pulley attached to the first input shaft;
a second timing pulley provided to the second input shaft; and
a timing belt connecting the first timing pulley to the second timing pulley, the rotation transmission portion synchronizing rotation of the first input shaft and the second input shaft; and
an actuator connected to the first input shaft to rotate the first input shaft to cause the valve body to move along an arc to open and close the opening.
2 . The gate valve apparatus according to claim 1 , wherein a rotation axis of the actuator and the first input shaft are disposed to be orthogonal to each other, and
the drive portion further includes an orthogonal gearbox which receives a rotation of the rotation axis of the actuator and outputs a rotation of the first input shaft.
3 . The gate valve apparatus according to claim 1 , wherein the central axis of the first input shaft is disposed to parallel to a longer side direction of the opening.
4 . The gate valve apparatus according to claim 1 , further comprising:
a conductive valve body receiving member having the opening communicating with a container opening through which a substrate is carried into and out of a processing container and interposed between the valve body and the processing container in a state in which the opening is closed by the valve body;
a first airtight sealing member interposed between the valve body and the valve body receiving member to airtightly seal a space therebetween in the state in which the opening is closed by the valve body;
a first conductive member interposed between the valve body and the valve body receiving member to electrically connect the valve body to the valve body receiving member in the state in which the opening is closed by the valve body;
a second airtight sealing member provided to surround the opening and interposed between the valve body receiving member and the housing to airtightly seal a space therebetween; and
a second conductive member provided to surround the opening and interposed between the valve body receiving member and the housing to electrically connect the valve body receiving member to the housing.
5 . The gate valve apparatus according to claim 4 , wherein the first conductive member and the second conductive member are formed of the same material.
6 . The gate valve apparatus according to claim 4 , wherein the first conductive member is provided to surround the first airtight sealing member in the state in which the opening is closed by the valve body.
7 . The gate valve apparatus according to claim 4 , wherein the second conductive member is provided to surround the second airtight sealing member.
8 . The gate valve apparatus according to claim 4 , wherein each of the first airtight sealing member and the second airtight sealing member is an O-ring.
9 . A semiconductor manufacturing apparatus comprising:
a transfer chamber;
a chamber disposed adjacent to the transfer chamber; and
the gate valve apparatus according to claim 1 , which is provided between the transfer chamber and the chamber.
10 . The semiconductor manufacturing apparatus according to claim 9 , wherein a rotation axis of the actuator and the first input shaft are disposed to be orthogonal to each other, and
the drive portion further includes an orthogonal gearbox which receives a rotation of the rotation axis of the actuator and outputs a rotation of the first input shaft.
11 . The semiconductor manufacturing apparatus according to claim 9 , wherein the chamber is a substrate processing chamber.
12 . The semiconductor manufacturing apparatus according to claim 9 , wherein the chamber is a load-lock chamber.
13 . The semiconductor manufacturing apparatus according to claim 9 , wherein the chamber is another transfer chamber different from the transfer chamber.
14 . The semiconductor manufacturing apparatus according to claim 9 , wherein the semiconductor manufacturing apparatus includes a plurality of the chambers, and
at least two of the plurality of chambers are disposed in a horizontal direction.
15 . The semiconductor manufacturing apparatus according to claim 9 , wherein the semiconductor manufacturing apparatus includes a plurality of the chambers, and
at least two of the plurality of chambers are disposed in a vertical direction.
16 . The semiconductor manufacturing apparatus according to claim 9 , wherein the gate valve apparatus further comprises:
a conductive valve body receiving member having the opening communicating with a container opening through which a substrate is carried into and out of a processing container and interposed between the valve body and the processing container in a state in which the opening is closed by the valve body;
a first airtight sealing member interposed between the valve body and the valve body receiving member to airtightly seal a space therebetween in the state in which the opening is closed by the valve body;
a first conductive member interposed between the valve body and the valve body receiving member to electrically connect the valve body to the valve body receiving member in the state in which the opening is closed by the valve body;
a second airtight sealing member provided to surround the opening and interposed between the valve body receiving member and the housing to airtightly seal a space therebetween; and
a second conductive member provided to surround the opening and interposed between the valve body receiving member and the housing to electrically connect the valve body receiving member to the housing.
17 . The semiconductor manufacturing apparatus according to claim 16 , wherein the first conductive member and the second conductive member are formed of the same material.
18 . The semiconductor manufacturing apparatus according to claim 16 , wherein the first conductive member is provided to surround the first airtight sealing member in the state in which the opening is closed by the valve body.
19 . The semiconductor manufacturing apparatus according to claim 16 , wherein the second conductive member is provided to surround the second airtight sealing member.
20 . The semiconductor manufacturing apparatus according to claim 16 , wherein each of the first airtight sealing member and the second airtight sealing member is an O-ring.