Patent Application
Utility
App. No. 18/134,087
· Confirmation No. 7221
COATINGS FOR USE IN REMOTE PLASMA SOURCE APPLICATIONS AND METHOD OF THEIR MANUFACTURE
Applicant:
MKS Instruments, Inc.
Final Rejection Mailed
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2026-07-01 | CTFR |
Final Rejection | 11 | View | |
| 2026-07-01 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2026-07-01 | SRNT |
Examiner's search strategy and results | 34 | View | |
| 2026-07-01 | 1449 |
List of References cited by applicant and considered by examiner | 5 | View | |
| 2026-06-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2026-06-08 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2026-06-08 | CLM |
Claims | 3 | View | |
| 2026-06-08 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2026-06-08 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2026-05-20 | FOR |
Foreign Reference | 22 | View | |
| 2026-05-20 | FOR |
Foreign Reference | 41 | View | |
| 2026-05-20 | FOR |
Foreign Reference | 11 | View | |
| 2026-05-20 | FOR |
Foreign Reference | 5 | View | |
| 2026-05-20 | FOR |
Foreign Reference | 8 | View | |
| 2026-05-20 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 5 | View | |
| 2026-05-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2026-04-15 | CTNF |
Non-Final Rejection | 12 | View | |
| 2026-04-15 | 892 |
List of references cited by examiner | 1 | View | |
| 2026-04-15 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2026-04-15 | SRNT |
Examiner's search strategy and results | 32 | View | |
| 2026-04-15 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2026-04-15 | FOR |
Foreign Reference | 34 | View | |
| 2026-04-15 | FOR |
Foreign Reference | 54 | View | |
| 2026-04-15 | 1449 |
List of References cited by applicant and considered by examiner | 4 | View | |
| 2026-04-15 | FOR |
Foreign Reference | 46 | View | |
| 2026-04-15 | FOR |
Foreign Reference | 105 | View | |
| 2026-02-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2026-02-09 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 4 | View | |
| 2026-02-09 | ADS |
Application Data Sheet | 8 | View | |
| 2026-02-09 | R46C.REQ |
Request under 37CFR1.46(c) to correct, update, change applicant | 2 | View | |
| 2026-02-09 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2026-02-09 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2025-12-15 | CTRS |
Requirement for Restriction/Election | 6 | View | |
| 2023-10-19 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2023-08-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2023-08-22 | DRW.NONBW |
Drawings-other than black and white line drawings | 5 | View | |
| 2023-08-22 | A.PE |
Preliminary Amendment | 1 | View | |
| 2023-08-22 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2023-08-22 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View | |
| 2023-08-22 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 2023-08-18 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 4 | View | |
| 2023-08-18 | REF.OTHER |
Other reference-Patent/Application/Search Documents | 3 | View | |
| 2023-08-18 | REF.OTHER |
Other reference-Patent/Application/Search Documents | 5 | View | |
| 2023-08-18 | FOR |
Foreign Reference | 15 | View | |
| 2023-08-18 | FOR |
Foreign Reference | 21 | View | |
| 2023-08-18 | FOR |
Foreign Reference | 42 | View | |
| 2023-08-18 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2023-06-14 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2023-06-06 | PA.. |
Power of Attorney | 4 | View | |
| 2023-06-06 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2023-05-11 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2023-05-11 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2023-05-11 | M327 |
Miscellaneous Communication to Applicant - No Action Count | 1 | View | |
| 2023-05-08 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2023-05-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2023-05-04 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2023-05-04 | NTC.MISS.PRT |
Notice to File Missing Parts | 2 | View | |
| 2023-05-04 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2023-05-04 | OATH |
Oath or Declaration filed | 6 | View | |
| 2023-04-13 | ADS |
Application Data Sheet | 8 | View | |
| 2023-04-13 | SPEC |
Specification | 10 | View | |
| 2023-04-13 | CLM |
Claims | 2 | View | |
| 2023-04-13 | ABST |
Abstract | 1 | View | |
| 2023-04-13 | DRW.NONBW |
Drawings-other than black and white line drawings | 5 | View | |
| 2023-04-13 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2023-04-13 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2023-04-13 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View | |
| 2023-04-13 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View |
Inventors
Chiu-Ying TAI
Chelmsford, MA
Michael HARRIS
Hudson, MA
Attorneys & Agents of Record
Classification
USPC
205/50
C25D11/026
H01J37/32357
H01J37/32862
C25D11/18
H01J37/32816
Prosecution
- Examiner
- VAN, LUAN V
- Art Unit
- 1795
- Customer No.
- 45134
- Docket No.
- E311-US1
- Confirmation No.
- 7221
Publication
- Pub. No.
- US20230332320A1
- Pub. Date
- 2023-10-19
INTELLECTUAL PROPERTY AGREEMENT SUPPLEMENT
Recorded 2023-07-18
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2023-05-04
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Quick Facts
- App. No.
- 18/134,087
- Filed
- 2023-04-13
- Pub. No.
- US20230332320A1
- Examiner
- VAN, LUAN V
- Art Unit
- 1795
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