Patent Application
Provisional
App. No. 63/331,735
· Confirmation No. 3149
Coatings for Use in Remote Plasma Source Applications and Method of Manufacture
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2022-04-27 | OATH |
Oath or Declaration filed | 3 | View | |
| 2022-04-26 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2022-04-15 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2022-04-15 | DRW.NONBW |
Drawings-other than black and white line drawings | 6 | View | |
| 2022-04-15 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2022-04-15 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2022-04-15 | SPEC |
Specification | 6 | View | |
| 2022-04-15 | CLM |
Claims | 1 | View | |
| 2022-04-15 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 2022-04-15 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View |
Inventors
Chiu-Ying Tai
Chelmsford, MA
Michael Harris
Hudson, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 45134
- Docket No.
- E311-P1
- Confirmation No.
- 3149
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 63/331,735
- Filed
- 2022-04-15
External Links