Monoalkyl tin trialkoxides and/or monoalkyl tin triamides with low metal contamination and/or particulate contamination, and corresponding methods
The purification of monoalkyl tin trialkoxides and monoalkyl tin triamides are described using fractional distillation and/or ultrafiltration. The purified compositions are useful as radiation sensitive patterning compositions or precursors thereof. The fractional distillation process has been found to be effective for the removal of metal impurities down to very low levels. The ultrafiltration processes have been found to be effective at removal of fine particulates. Commercially practical processing techniques are described.
1 . An article comprising a container formed of plastic or dealkalized material and, within the container, a composition comprising a mixture of a semiconductor grade solvent and a solvated monoalkyl tin trialkoxide (RSn(OR′) 3 ), wherein the mixture has a tin concentration from about 0.004M to about 1.4M and a concentration of non-tin metals and metalloid elements of each no more than 3 parts-per-billion (ppb) by mass.
2 . The article of claim 1 wherein the semiconductor grade solvent comprises an alcohol or mixture of alcohols.
3 . The article of claim 1 wherein the composition comprises a radiation sensitive patterning composition.
4 . The article of claim 1 wherein the R comprises an alkyl group, an aryl group, an alkenyl group, or a cycloalkyl group, wherein the R has 1-31 carbon atoms and forms a radiation sensitive carbon bond with the Sn.
5 . The article of claim 1 wherein the R is a branched alkyl ligand represented by R 1 R 2 R 3 C—, where R 1 and R 2 are independently an alkyl group with 1-10 carbon atoms, and R 3 is hydrogen or an alkyl group with 1-10 carbon atoms.
6 . The article of claim 1 wherein the R comprises methyl (CH 3 —), ethyl (CH 3 CH 2 —), isopropyl (CH 3 CH 3 HC—), t-butyl ((CH 3 ) 3 C—), t-amyl (CH 3 CH 2 (CH 3 ) 2 C—), sec-butyl (CH 3 (CH 3 CH 2 )CH—), n-butyl (CH 3 CH 2 CH 2 CH 2 —), neopentyl (CH 3 ) 3 CCH 2 —), benzyl, allyl, cyclohexyl, cyclopentyl, cyclobutyl, or cyclopropyl.
7 . The article of claim 1 wherein the R is an alkyl ligand or a cycloalkyl ligand with 1-31 carbon atoms with one or more carbon atoms substituted with one or more heteroatom functional groups containing S, O, N, Si, Ge, Sn, Te, and/or halogen atoms.
8 . The article of claim 1 wherein the R′ are independently hydrocarbon groups with 1-10 carbon atoms.
9 . The article of claim 1 wherein the R′ comprises a methyl group, ethyl group, isopropyl group, t-butyl group, or t-amyl group.
10 . The article of claim 1 further comprising a monoalkyl tin trialkoxide (R 1 Sn(OR″) 3 ) wherein the R is different from R 1 and the R′ is the same or different from R″.
11 . The article of claim 1 comprising no more than about 1 mole % dialkyltin compounds.
12 . The article of claim 11 having a tin concentration from about 0.005M to about 0.25M and the concentration of non-tin metals and metalloid elements of each no more than 2.5 parts-per-billion (ppb) by mass, wherein the solvent comprises an alcohol or mixture of alcohols.
13 . The article of claim 1 having the concentration of non-tin metals and metalloid elements of each no more than 2.5 parts-per-billion (ppb) by mass.
14 . The article of claim 1 wherein the mixture has a particle contamination of no more than about 40 particles per mL with a particle size of at least about 70 nm as determined by light scattering.
15 . The article of claim 1 wherein the mixture has a particle contamination of no more than about 3 particles per mL with a particle size of at least about 150 nm as determined by light scattering.
16 . A composition comprising a monoalkyl tin trialkoxide (RSn(OR′) 3 ), wherein a testing solution prepared by adjusting the composition with a solvent to form a solution with 0.044M tin ions has a contamination with non-tin metals and metalloid elements of each no more than 3 parts-per-billion (ppb) by mass.
17 . The composition of claim 16 wherein the R comprises methyl (CH 3 —), ethyl (CH 3 CH 2 —), isopropyl (CH 3 CH 3 HC—), t-butyl ((CH 3 ) 3 C—), t-amyl (CH 3 CH 2 (CH 3 ) 2 C—), sec-butyl (CH 3 (CH 3 CH 2 )CH—), n-butyl (CH 3 CH 2 CH 2 CH 2 —), neopentyl ((CH 3 ) 3 CCH 2 —), benzyl, allyl, cyclohexyl, cyclopentyl, cyclobutyl, or cyclopropyl and/or wherein the R′ comprises a methyl group, ethyl group, isopropyl group, or t-butyl group.
18 . The composition of claim 16 wherein the R is an alkyl ligand or a cycloalkyl ligand with 1-31 carbon atoms with one or more carbon atoms substituted with one or more heteroatom functional groups containing S, O, N, Si, Ge, Sn, Te, and/or halogen atoms.
19 . The composition of claim 16 comprising no more than about 1 mole % dialkyltin compounds.
20 . The composition of claim 16 having a particle contamination of no more than about 40 particles per mL with a particle size of at least about 70 nm as determined by light scattering.
21 . The composition of claim 16 wherein the composition consists essentially of the monoalkyl tin trialkoxide (RSn(OR′) 3 ).
22 . The composition of claim 16 having a particle contamination of no more than about 3 particles per mL with a particle size of at least about 150 nm as determined by light scattering.
23 . The composition of claim 16 wherein the composition further comprises a monoalkyl tin trialkoxide (R 1 Sn(OR″) 3 ) wherein the R is different from R 1 and the R′ is the same or different from R″.