IP Library › Granted Patent US 11,976,968
Granted Patent B2
US 11,976,968 · App. 18/139,426 · Granted May 7, 2024

Light detector

Inventors: Soh Uenoyama (Hamamatsu, JP); Takuya Hashimoto (Hamamatsu, JP)
Assignee: HAMAMATSU PHOTONICS K.K.
G01J1/44G01J1/0411G01J2001/4466
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Quick Facts
Patent No.
US 11,976,968
App. No.
18/139,426
Granted
May 7, 2024
Kind
B2
Abstract

The light detector includes a light detection substrate having at least one light receiving region and a light incident surface on which a detection target light is incident, and a meta-lens including a plurality of unit structures arranged in a grid pattern and disposed on the light incident surface to focus the detection target light. When viewed in a thickness direction of the light detection substrate, an opening region in which no unit structure is formed is provided in a region including a center of the meta-lens.

Claims (37)

1. A light detector comprising:

a light detection substrate having at least one light receiving region and a light incident surface on which a detection target light is incident; and

a meta-lens configured by a plurality of unit structures arranged in a grid pattern and disposed on the light incident surface to focus the detection target light,

wherein when viewed in a thickness direction of the light detection substrate, an opening region in which the unit structure is not formed is provided in a region including a center of the meta-lens,

the meta-lens is formed such that a first distance is 40% or more and 90% or less of a second distance,

the second distance is a distance in the thickness direction from the meta-lens to a focus point set by the meta-lens, and

the first distance is a distance in the thickness direction from the meta-lens to a light-condensing point formed at a position closer to the light incident surface than the focus point due to the opening region being provided.

2. The light detector according to claim 1 , further comprising:

a dielectric layer disposed between the light detection substrate and the meta-lens, and having a refractive index lower than that of the light detection substrate.

3. The light detector according to claim 1 , wherein

a numerical aperture NA of the meta-lens is set so as to satisfy the following Equation (1), and

in the Equation (1), λ eff is an effective wavelength of the detection target light passing through the meta-lens, and P is a period in which the plurality of unit structures are arranged

λ

eff

4

*

P

<

N

⁢

A

<

λ

eff

2

*

P

.

(

1

)

4. The light detector according to claim 1 , wherein when viewed in the thickness direction, the opening region has a rectangular shape.

5. The light detector according to claim 1 , wherein the plurality of unit structures are configured such that a phase distribution of the meta-lens follows a quadratic phase pattern.

6. The light detector according to claim 1 , wherein the light detection substrate includes an avalanche photodiode.

7. The light detector according to claim 1 , wherein when viewed in the thickness direction, the meta-lens is formed to overlap both an adjacent region adjacent to the light receiving region and a peripheral region inside of the light receiving region along a boundary between the light receiving region and the adjacent region.

8. The light detector according to claim 1 , wherein the meta-lens is formed such that the first distance is not less than 50% and not more than 80% of the second distance.

9. The light detector according to claim 1 , wherein when viewed in the thickness direction, a width of the opening region is equal to or greater than a half of a width of the meta-lens.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 26, 2023
From: UENOYAMA, SOH; HASHIMOTO, TAKUYA
To: HAMAMATSU PHOTONICS K.K.
Reel/Frame 063445/0278 →
Priority Claims (1)
JP 2022-077091 · May 9, 2022 · national
Continuity (1)
Related Publication 20230358606A1 · Nov 9, 2023
Cited By (1)
US 12,270,701