Display device
A display device includes a first transistor. The first transistor includes an oxide semiconductor layer, a first gate electrode facing the oxide semiconductor layer and a gate insulating layer between the oxide semiconductor layer and the first gate electrode. The first gate electrode has hydrogen storage properties.
1. A display device comprising:
a first transistor, the first transistor including:
an oxide semiconductor layer;
a first gate electrode facing the oxide semiconductor layer; and
a gate insulating layer between the oxide semiconductor layer and the first gate electrode,
wherein
the first gate electrode includes
a first conductive layer formed on the gate insulating layer and having hydrogen storage properties,
a second conductive layer formed on the first conductive layer and having a lower resistance than the first conductive layer,
a third conductive layer formed on the second conductive layer and having hydrogen storage properties, and
a fourth conductive layer formed on the third conductive layer and having hydrogen storage properties,
the first conductive layer, the second conductive layer and the third conductive layer forms an inclined side surface facing upward, and
the fourth conductive layer covers an upper surface and a side surface of the third conductive layer and a side surface of the second conductive layer.
2. The display device according to claim 1 ,
wherein a thickness of the third conductive layer is less than a thickness of the first conductive layer.
3. The display device according to claim 1 ,
wherein the fourth conductive layer covers an upper surface and a side surface of the first conductive layer, and is in contact with the first gate insulating layer.
4. The display device according to claim 1 , further comprising:
a second transistor, the second transistor including:
a semiconductor layer;
a second gate electrode facing the semiconductor layer; and
a second gate insulating layer between the semiconductor layer and the second gate electrode; and
a first insulating layer covering the semiconductor layer,
wherein the first insulating layer is arranged in the same layer of the first gate insulating layer.
5. The display device according to claim 4 , further comprising:
a display region displaying an image; and
a peripheral region surrounding the display region,
wherein
a plurality of pixel circuits are provided in the display region,
a driver circuit configured to drive the plurality of pixel circuits is provided in the peripheral region,
the first transistor is included in one of the pixel circuits in the display region, and
the second transistor is included in the driver circuit in the peripheral region.
6. The display device according to claim 5 , further comprising:
a first wiring arranged in the same layer as the first gate electrode provided in the peripheral region; and
a second wiring arranged in the same layer as the second gate electrode,
wherein the first wiring is connected to the second wiring via a contact hole penetrating the first gate insulating layer and the second gate insulating layer.
7. A display device comprising:
a first transistor, the first transistor including:
an oxide semiconductor layer;
a first gate electrode facing the oxide semiconductor layer; and
a gate insulating layer between the oxide semiconductor layer and the first gate electrode,
wherein
the first gate electrode includes
a first conductive layer formed on the gate insulating layer and having hydrogen storage properties, the first conductive layer having a first upper surface and a first side surface,
a second conductive layer formed on the first conductive layer and having a lower resistance than the first conductive layer, the second conductive layer having a second upper surface and a second side surface,
a third conductive layer formed on the second conductive layer and having a higher resistance than the second conductive layer and hydrogen storage properties,
the first conductive layer, the second conductive layer, and the third conductive layer are laminated in this order, and
the third conductive layer is in physical contact with the first side surface, the second side surface, and the second upper surface.
8. The display device according to claim 7 ,
wherein the third conductive layer covers the first upper surface, the first side surface, the second upper surface, and the second side surface,
a surface of the first gate insulating layer is in physical contact with the third conductive layer and a first bottom surface of the first conductive layer, and
the first bottom surface is opposite to the first upper surface.
9. The display device according to claim 7 , further comprising:
a second transistor, the second transistor including:
a semiconductor layer;
a second gate electrode facing the semiconductor layer; and
a second gate insulating layer between the semiconductor layer and the second gate electrode; and
a first insulating layer covering the semiconductor layer,
wherein the first insulating layer is arranged in the same layer of the first gate insulating layer.
10. The display device according to claim 9 , further comprising:
a display region displaying an image; and
a peripheral region surrounding the display region,
wherein
a plurality of pixel circuits are provided in the display region,
a driver circuit configured to drive the plurality of pixel circuits is provided in the peripheral region,
the first transistor is included in one of the pixel circuits in the display region, and
the second transistor is included in the driver circuit in the peripheral region.
11. The display device according to claim 10 , further comprising:
a first wiring arranged in the same layer as the first gate electrode provided in the peripheral region; and
a second wiring arranged in the same layer as the second gate electrode,
wherein the first wiring is connected to the second wiring via a contact hole penetrating the first gate insulating layer and the second gate insulating layer.