Deposition device and deposition method
According to one embodiment, a deposition device includes a stage, a deposition head opposed to the stage, and a chamber accommodating the stage and the deposition head. The deposition head comprises a deposition source heating a material and generating vapor, a nozzle connected to the deposition source to emit the vapor generated by the deposition source, a control plate comprising a sleeve surrounding the nozzle, and a movement mechanism moving the control plate along an extension direction of the sleeve.
1 . A deposition device comprising:
a first deposition head configured to deposit a first material on a processing substrate; and
a second deposition head configured to deposit a second material on the processing substrate on which the first material is deposited,
each of the first deposition head and the second deposition head comprising:
a deposition source heating the material and generating vapor;
a nozzle connected to the deposition source to emit the vapor generated by the deposition source; and
a sleeve surrounding the nozzle and further extending to the processing substrate than a tip of the nozzle,
a distance from the tip of the nozzle to a tip of the sleeve in the second deposition head being smaller than a distance from the tip of the nozzle to a tip of the sleeve in the first deposition head.
2 . The deposition device of claim 1 , wherein
a spread angle of the vapor of the second material emitted from the second deposition head is larger than a spread angle of the vapor of the first material emitted from the first deposition head.
3 . The deposition device of claim 1 , wherein
each of the first deposition head and the second deposition head further comprises a moving mechanism which moves a control plate comprising the sleeve along an extension direction of the sleeve.
4 . The deposition device of claim 1 , wherein
the first material is a material for forming a lower layer of an organic layer constituting an organic EL element, and
the second material is a material for forming an upper electrode of the organic layer constituting the organic EL element.
5 . The deposition device of claim 1 , wherein
the first material is a material for forming an organic layer constituting an organic EL element, and
the second material is a material for forming an upper electrode constituting the organic EL element.