Depositing device and method for manufacturing organic light emitting diode display using the same
A deposition device includes a deposition source for discharging a deposition material to be deposited on a substrate, an angle control member at least partly in a discharging path of the deposition material for controlling a discharging angle of the deposition material, and an angle control member driver coupled to the angle control member, the angle control member driver for moving the angle control member in a discharging direction of the deposition material to control the discharging angle.
1. A deposition device comprising:
a deposition source for discharging a deposition material to be deposited on a substrate;
an angle control member at least partly in a discharging path of the deposition material for controlling a discharging angle of the deposition material by increasing or decreasing an area of the discharging path; and
an angle control member driver coupled to the angle control member, the angle control member driver for moving the angle control member in a discharging direction of the deposition material to control the discharging angle.
2. The deposition device of claim 1 , wherein the angle control member driver comprises a ball screw drive, a cylinder drive, or a linear motion guide drive.
3. The deposition device of claim 1 , further comprising a controller for controlling the angle control member driver to move the angle control member according to a process condition.
4. A deposition device comprising:
a deposition source for discharging a deposition material to be deposited on a substrate and comprising a spray nozzle for discharging the deposition material, and
an angle control member at least partly in a discharging path of the deposition material for controlling a discharging angle of the deposition material and comprising a pair of angle control members each located on a long side of the deposition source and extending in a length direction of the deposition source; and
an angle control member driver coupled to the angle control member, the angle control member driver for moving the angle control member in a discharging direction of the deposition material to control the discharging angle.
5. The deposition device of claim 4 , further comprising a pair of cover plates each on a side of a respective one of the pair of angle control members,
wherein the pair of cover plates are configured to move in a direction crossing the discharging direction to control a gap between the pair of cover plates.
6. The deposition device of claim 5 , wherein a movement of the cover plate corresponds to a movement of the angle control member.
7. The deposition device of claim 5 , wherein the pair of cover plates comprises at least two pairs of cover plates adjacent one another in the length direction of the deposition source.
8. The deposition device of claim 7 , wherein each of the cover plates of the at least two pairs of cover plates is independently operable.
9. A method for manufacturing an organic light emitting diode display, the method comprising:
facing a substrate toward a deposition source for discharging a deposition material; and
forming a thin film on the substrate by discharging the deposition material on the substrate,
wherein the forming of the thin film on the substrate comprises controlling a discharging angle of the deposition material by moving an angle control member with respect to the deposition source to increase or decrease a discharging area of the deposition material, the angle control member being partly in the discharging path of the deposition material.
10. The method of claim 9 , wherein the moving the angle control member comprises moving the angle control member toward the deposition source at a rate corresponding to an amount of process time passed.
11. The method of claim 9 , wherein the deposition material comprises an organic material for forming an organic emission layer, and
wherein the thin film comprises the organic emission layer.