Apparatus for synchronous growth of silicon carbide crystals in multiple independent crucibles arranged linearly
View Patent ↗The present application discloses a method and apparatus for synchronous growth of silicon carbide crystals in multiple crucibles comprising a chamber and an insulation layer assembly arranged close to inner walls of the chamber wherein the insulation layer assembly is used to divide the chamber into a plurality of independent growth cavities, and each of the growth cavities is provided with an independent growth assembly; wherein the independent growth assembly comprises a graphite crucible, a seed crystal tray arranged on the top of the graphite crucible and a drive assembly arranged at the bottom the crucible.
1. An apparatus for synchronous growth of silicon carbide crystals in multiple crucibles comprises a chamber and an insulation layer assembly arranged close to inner walls of the chamber,
wherein a plurality of heater components are arranged at intervals inside the insulation layer assembly, by which the chamber is divided into a plurality of independent growth cavities that are linearly arranged, and each of the growth cavities is provided with an independent growth assembly,
wherein the independent growth assembly comprises a graphite crucible and a seed crystal tray arranged on a top of the graphite crucible, and
wherein:
the graphite crucible is connected with a drive assembly at a bottom of the graphite crucible, and the drive assembly is used to drive the graphite crucible to move in its growth cavity;
the drive assembly comprises a lifting mechanism and a rotating mechanism;
the lifting mechanism comprises a hollow lifting rod connected to the bottom of the graphite crucible in a sliding way and a lifting motor fixed at a bottom of the chamber and connected with a bottom end of the hollow lifting rod; and
the rotating mechanism comprises a stepping motor fixed inside the hollow lifting rod and a rotating rod coaxially and fixedly connected with an output shaft of the stepping motor, with the rotating rod being fixedly connected with the bottom of the graphite crucible.
2. The apparatus according to claim 1 , wherein the growth cavity has a circular horizontal cross section.
3. The apparatus according to claim 1 , wherein the growth cavity has a symmetrically polygonal horizontal cross section, with a number of sides of ≥4.
4. The apparatus according to claim 1 , wherein the hollow lifting rod penetrates through the bottom of the chamber.
5. The apparatus according to claim 1 , wherein the graphite crucible is provided with an annular chute at the bottom of the graphite crucible, and the hollow lifting rod is provided with a sliding roller matching the annular chute on a top end of the hollow lifting rod.
6. The apparatus according to claim 1 , wherein the heater components comprise a first heater and a second heater arranged around a periphery of the graphite crucible and a third heater fixed at the bottom of the graphite crucible.
7. The apparatus according to claim 6 , wherein the graphite crucible has a height of M, the first heater and the second heater are arranged around the periphery of the graphite crucible in which the first heater is extends from an upper edge of the graphite crucible to a height of ¼M from the upper edge of the graphite crucible, the second heater extends from a lower edge of the graphite crucible to a height of ¾M from the upper edge of the graphite crucible, and the second heater has a height that does not exceed a height of silicon carbide raw materials.
8. An apparatus for synchronous growth of silicon carbide crystals in multiple crucibles comprising a chamber and an insulation layer assembly arranged close to inner walls of the chamber,
wherein the insulation layer assembly is used to divide the chamber into a plurality of independent growth cavities that are linearly arranged, and each of the growth cavities is provided with an independent growth assembly,
wherein the independent growth assembly comprises a graphite crucible, a seed crystal tray arranged on a top of the graphite crucible and heater components arranged around a periphery of the graphite crucible, and
wherein:
the graphite crucible is connected with a drive assembly at a bottom of the graphite crucible, and the drive assembly is used to drive the graphite crucible to move in its growth cavity;
the drive assembly comprises a lifting mechanism and a rotating mechanism;
the lifting mechanism comprises a hollow lifting rod connected to the bottom of graphite crucible in a sliding way and a lifting motor fixed at a bottom of the chamber and connected with a bottom end of the hollow lifting rod; and
the rotating mechanism comprises a stepping motor fixed inside the hollow lifting rod and a rotating rod coaxially and fixedly connected with an output shaft of the stepping motor, with the rotating rod being fixedly connected with the bottom of the graphite crucible.
9. The apparatus according to claim 8 , wherein the growth cavity has a circular horizontal cross section.
10. The apparatus according to claim 8 , wherein the growth cavity has a symmetrically polygonal horizontal cross section, with a number of sides of ≥4.
11. The apparatus according to claim 8 , wherein the hollow lifting rod penetrates through the bottom of the chamber.
12. The apparatus according to claim 8 , wherein the graphite crucible is provided with an annular chute at the bottom of the graphite crucible, and the hollow lifting rod is provided with a sliding roller matching the annular chute on a top end of the hollow lifting rod.
13. The apparatus according to claim 8 , wherein the heater components comprise a first heater and a second heater arranged around the periphery of the graphite crucible and a third heater fixed at a bottom of the graphite crucible.
14. The apparatus according to claim 13 , wherein the graphite crucible has a height of M, the first heater and the second heater are arranged around the periphery of the graphite crucible in which the first heater is extends from an upper edge of the graphite crucible to a height of ¼M from the upper edge of the graphite crucible, the second heater ( 14 ) extends from a lower edge of the graphite crucible to a height of ¾M from the upper edge of the graphite crucible, and the second heater has a height that does not exceed a height of silicon carbide raw materials.
15. The apparatus according to claim 1 , wherein the heater components comprise a first heater that is a single continuous body and surrounds the plurality of graphite crucibles.