Dynamic generation of layout adaptive packaging
Aspects of disclosure provide a method for attaching wiring connections to a component using both design and field measured data of the component to produce accurate wiring connections.
1. A method for processing an apparatus in a maskless microlithography system, comprising:
obtaining position data on a component and an aspect of an electrical connection to the component for a designed state;
measuring a stage including the component with at least one device to develop a second set of coordinate data for the component and the electrical connection;
comparing the obtained coordinate data of the component to the second set of coordinate data for the component to determine an offset of the component measured with the at least one device to the designed state;
altering the aspect of the electrical connection to the component based, at least in part, upon the offset prior to forming the electrical connection; and
forming an altered electrical connection on an electrical connection location between the component and a fixed perimeter.
2. The method according to claim 1 , wherein the method is performed in-situ in the maskless microlithography system.
3. The method according to claim 1 , further comprising:
placing the component upon a substrate;
placing the substrate on the stage of the maskless microlithography system; and
placing the stage within range of at least one device of the maskless microlithography system.
4. The method according to claim 1 , further comprising:
providing the electrical connection location between the component and the predetermined location using the altered aspect of the electrical connection prior to forming the altered electrical connection.
5. The method according to claim 1 , wherein the comparing the obtained coordinate data to the second set of coordinate data further comprises comparing the offset to a threshold; wherein
when the offset is less than the threshold, setting the offset to zero; and
when the offset is greater than the threshold, generating a warning to a user that the threshold has been exceeded.
6. The method according to claim 1 , wherein the altering the aspect of the electrical connection is based upon the offset.
7. A method for processing a substrate in a maskless microlithography system, comprising:
obtaining coordinate data in a designed state pertaining to at least one component and an aspect of at least one wiring connection to the at least one component, wherein the component is at least one of on and in the substrate;
measuring the substrate including the component with a device to develop a second set of coordinate data for the component;
comparing the obtained coordinate data of the component of a stage to the second set of coordinate data for the component to determine an offset of the component measured with the device to the designed state;
altering the aspect of the at least one wiring connection to the component based, at least in part, upon one of the offset, images of the component used to develop the second set of coordinate data for the component, and the second set of coordinate data for the component prior to forming the at least one wiring connection; and
forming an altered wiring connection on an electrical connection location between an edge of the component and a fixed perimeter.
8. The method according to claim 7 , wherein the method is performed in-situ in the maskless microlithography system.
9. The method according to claim 7 , wherein the comparing the obtained coordinate data to the second set of coordinate data further comprises comparing the offset to a threshold; wherein
when the offset is less than the threshold, setting the offset to zero; and
when the offset is greater than the threshold, generating a warning to a user that the threshold has been exceeded.
10. The method according to claim 7 , further comprising:
placing the component upon the substrate;
placing the substrate on the stage within the microlithography system; and
moving the substrate on the stage to the device of the maskless microlithography system.
11. The method according to claim 7 , further comprising:
providing the electrical connection location between the component and the predetermined location using the altered aspect of the wiring connection prior to forming the altered wiring connection.
12. The method according to claim 7 , wherein the altering the aspect of the at least one wiring connection is based upon the offset.