Display device having a partition provided on a rib covering a part of a lower electrode and manufacturing method thereof
According to one embodiment, a display device includes a lower electrode, a rib including an aperture overlapping the lower electrode, a partition on the rib, an upper electrode which is in contact with the partition, an organic layer between the lower electrode and the upper electrode, and a sealing layer above the upper electrode. The partition includes a lower portion provided on the rib, and an upper portion provided on the lower portion and including an end portion protruding from a side surface of the lower portion. The upper portion contains at least one of a conductive oxide and titanium.
1 . A display device comprising:
a lower electrode;
a rib which covers part of the lower electrode and comprises an aperture overlapping the lower electrode;
a partition provided on the rib;
an upper electrode which faces the lower electrode and is in contact with the partition;
an organic layer located between the lower electrode and the upper electrode and emitting light based on a potential difference between the lower electrode and the upper electrode; and
a sealing layer located above the upper electrode, wherein
the partition comprises a lower portion provided on the rib, and an upper portion provided on the lower portion and comprising an end portion protruding from a side surface of the lower portion,
the upper portion includes a first layer formed of titanium and a second layer formed of a conductive oxide, and
the second layer is thinner than the first layer.
2 . The display device of claim 1 , wherein
the second layer covers the first layer.
3 . The display device of claim 1 , wherein
the conductive oxide forming the second layer is ITO, IZO or IGZO.
4 . A display device comprising:
a lower electrode;
a rib which covers part of the lower electrode and comprises an aperture overlapping the lower electrode;
a partition provided on the rib;
an upper electrode which faces the lower electrode and is in contact with the partition;
an organic layer located between the lower electrode and the upper electrode and emitting light based on a potential difference between the lower electrode and the upper electrode; and
a sealing layer located above the upper electrode, wherein
the partition comprises a lower portion provided on the rib, and an upper portion provided on the lower portion and comprising an end portion protruding from a side surface of the lower portion, and
the upper portion comprises a single-layer structure of titanium.
5 . A display device comprising:
a lower electrode;
a rib which covers part of the lower electrode and comprises an aperture overlapping the lower electrode;
a partition provided on the rib;
an upper electrode which faces the lower electrode and is in contact with the partition;
an organic layer located between the lower electrode and the upper electrode and emitting light based on a potential difference between the lower electrode and the upper electrode; and
a sealing layer located above the upper electrode, wherein
the partition comprises a lower portion provided on the rib, and an upper portion provided on the lower portion and comprising an end portion protruding from a side surface of the lower portion, and
the upper portion includes a first layer formed of titanium and a second layer formed of silicon oxide.
6 . The display device of claim 5 , wherein
the second layer covers the first layer.
7 . The display device of claim 5 , wherein
the second layer is thicker than the first layer.
8 . The display device of claim 1 , wherein
the lower portion contains aluminum.
9 . The display device of claim 1 , wherein
the lower portion includes a barrier layer provided on the rib, and a metal layer provided on the barrier layer.
10 . The display device of claim 9 , wherein
the barrier layer is formed of one of molybdenum, molybdenum tungsten alloy and copper.
11 . The display device of claim 1 , wherein
the side surface of the lower portion comprises projections and depressions.
12 . A manufacturing method of a display device, the method comprising:
forming a lower electrode;
forming a rib which covers at least part of the lower electrode;
forming a partition comprising a lower portion provided on the rib, and an upper portion containing at least one of a conductive oxide and titanium and protruding from a side surface of the lower portion;
forming an organic layer on the lower electrode;
forming an upper electrode which is in contact with the partition and is located on the organic layer;
forming a sealing layer on the upper electrode;
forming a resist on the sealing layer; and
removing portions of the organic layer, the upper electrode and the sealing layer exposed from the resist by etching using the resist as a mask.
13 . The manufacturing method of claim 12 , wherein
the sealing layer is formed of silicon nitride.
14 . The manufacturing method of claim 12 , wherein
at least part of the partition is exposed from the resist.
15 . The manufacturing method of claim 12 , wherein
the forming the partition includes:
forming a metal layer on the rib;
forming the upper portion on the metal layer;
reducing a thickness of a first portion of the metal layer exposed from the upper portion by anisotropic etching; and
forming the lower portion by reducing a width of a second portion of the metal layer located under the upper portion by isotropic etching.
16 . The manufacturing method of claim 12 , wherein
the upper portion includes a first layer formed of titanium and a second layer formed of a conductive oxide.
17 . The manufacturing method of claim 12 , wherein
the upper portion comprises a single-layer structure of titanium.
18 . The manufacturing method of claim 12 , wherein
the upper portion includes a first layer formed of titanium and a second layer formed of silicon oxide.