Display device with aluminum bilayer electrode
According to one embodiment, a display device comprises a lower electrode, a rib, a partition, an upper electrode, an organic layer between the lower electrode and the upper electrode, and a sealing layer above the upper electrode. The partition includes a lower portion on the rib, and an upper portion on the lower portion with an end portion protruding from a side surface of the lower portion. The lower portion includes a first aluminum layer of a first aluminum alloy, and a second aluminum layer of pure aluminum or a second aluminum alloy different from the first aluminum alloy and which is arranged on the first aluminum layer.
1. A display device comprising:
a lower electrode;
a rib which covers a part of the lower electrode and which includes an aperture overlaps with the lower electrode;
a partition arranged on the rib;
an upper electrode which is opposed to the lower electrode and is in contact with the partition;
an organic layer located between the lower electrode and the upper electrode to emit light in accordance with a potential difference between the lower electrode and the upper electrode; and
a sealing layer located above the upper electrode,
wherein
the partition includes a lower portion arranged on the rib, and an upper portion arranged on the lower portion with an end portion protruding from a side surface of the lower portion,
the lower portion includes a first aluminum layer formed of a first aluminum alloy, and a second aluminum layer which is formed of pure aluminum or a second aluminum alloy different from the first aluminum alloy and which is arranged on the first aluminum layer.
2. The display device of claim 1 , wherein
the first aluminum alloy is an aluminum-neodymium alloy or an aluminum-yttrium alloy.
3. The display device of claim 1 , wherein
the second aluminum alloy is an aluminum-silicon alloy.
4. The display device of claim 1 , wherein
a thickness of the first aluminum layer is 30% or less of a total thickness of the first aluminum layer and the second aluminum layer.
5. The display device of claim 1 , wherein
the lower portion further comprises a barrier layer located between the rib and the first aluminum layer.
6. The display device of claim 5 , wherein
the barrier layer is formed of any one of molybdenum, a molybdenum tungsten alloy, and copper.
7. The display device of claim 1 , wherein
the upper portion includes at least one of a conductive oxide and titanium.
8. The display device of claim 7 , wherein
the upper portion includes a first layer formed of titanium and a second layer formed of a conductive oxide.
9. The display device of claim 8 , wherein
the second layer covers the first layer.
10. The display device of claim 1 , wherein
a side surface of the lower portion is uneven.
11. A method of manufacturing a display device in which a partition including a lower portion and an upper portion arranged on the lower portion with an end portion protruding from a side surface of the lower portion is arranged on a boundary between adjacent sub-pixels, the method comprising:
forming a first aluminum layer of a first aluminum alloy;
forming a second aluminum layer of pure aluminum or a second aluminum alloy different from the first aluminum alloy, on the first aluminum layer;
forming the upper portion on the second aluminum layer;
removing a portion of the second aluminum layer, which is exposed from the upper portion, by anisotropic etching; and
reducing a width of the second aluminum layer located under the upper portion and removing a portion of the first aluminum layer, which is exposed from the second aluminum layer, by isotropic etching, and thereby forming the lower portion.
12. The method of claim 11 , wherein
an etching rate of the first aluminum layer in the anisotropic etching is slower than an etching rate of the second aluminum layer in the anisotropic etching.
13. The method of claim 11 , wherein
the first aluminum alloy is an aluminum-neodymium alloy or an aluminum-yttrium alloy.
14. The method of claim 11 , wherein
the second aluminum alloy is an aluminum-silicon alloy.
15. The method of claim 11 , wherein
a thickness of the first aluminum layer is 30% or less of a total thickness of the first aluminum layer and the second aluminum layer.