Integrated lidar image-sensor devices and systems and related methods of operation
A Light Detection and Ranging (LIDAR) apparatus includes a detector having a first pixel and a second pixel configured to output respective detection signals responsive to light incident thereon, and receiver optics configured to collect the light over a field of view and direct first and second portions of the light to the first and second pixels, respectively. The first pixel includes one or more time of flight (ToF) sensors, and the second pixel includes one or more image sensors. At least one of the receiver optics or arrangement of the first and second pixels in the detector is configured to correlate the first and second pixels such that depth information indicated by the respective detection signals output from the first pixel is correlated with image information indicated by the respective detection signals output from the second pixel. Related devices and methods of operation are also discussed.
1. A Light Detection and Ranging (LIDAR) apparatus, comprising:
a detector comprising a first pixel and a second pixel configured to output respective detection signals responsive to light incident thereon, the first pixel comprising one or more time of flight (ToF) sensors, and the second pixel comprising one or more image sensors; and
a gate structure that overlaps at least a portion of the first pixel and at least a portion of the second pixel in plan view.
2. The LIDAR apparatus of claim 1 , wherein the first and second pixels are configured to detect light of different first and second wavelength ranges, respectively, and wherein the gate structure is transparent to the light of one of the first and second wavelength ranges.
3. The LIDAR apparatus of claim 2 , wherein the gate structure is not transparent to the light of another of the first and second wavelength ranges.
4. The LIDAR apparatus of claim 2 , wherein respective junction regions of the first and second pixels overlap in plan view.
5. The LIDAR apparatus of claim 2 , wherein respective junction regions of the first and second pixels are arranged side-by-side in plan view.
6. The LIDAR apparatus of claim 5 , wherein the gate structure comprises a plurality of gate structures arranged adjacent a periphery of the first pixel.
7. The LIDAR apparatus of claim 6 , wherein the second pixel comprises a plurality of sub-pixels arranged adjacent the periphery of the first pixel.
8. The LIDAR apparatus of claim 7 , wherein the first and second pixels comprise first and second wavelength-selective filters that are configured to selectively transmit light of the first and second wavelength ranges, respectively, to respective junction regions of the first and second pixels.
9. The LIDAR apparatus of claim 8 , wherein the first wavelength range comprises near infrared wavelengths, and wherein the second wavelength range comprises red, green, or blue wavelengths.
10. The LIDAR apparatus of claim 1 , wherein the first and second pixels are provided in a same substrate.
11. The LIDAR apparatus of claim 10 , wherein respective junction regions of the first and second pixels are provided at different depths relative to a surface of the substrate.
12. The LIDAR apparatus of claim 10 , further comprising: receiver optics configured to collect the light over a field of view and direct first and second portions of the light to the first and second pixels, respectively.
13. The LIDAR apparatus of claim 10 , further comprising:
isolation structures in or on the substrate, wherein the isolation structures separate respective junction regions of the first pixel from respective junction regions of the second pixel.
14. The LIDAR apparatus of claim 13 , wherein the isolation structures comprise intermediate junction regions.
15. A Light Detection and Ranging (LIDAR) detector array, comprising:
a plurality of first pixels and a plurality of second pixels configured to output respective detection signals responsive to light incident thereon, the first pixels comprising time of flight (ToF) sensors, and the second pixels comprising image sensors; and
a plurality of gate structures, wherein each gate structure overlaps at least a portion of a corresponding first pixel and at least a portion of a corresponding second pixel in plan view.
16. The LIDAR detector array of claim 15 , further comprising: a substrate comprising the plurality of first pixels and the plurality of second pixels therein.
17. The LIDAR detector array of claim 15 , wherein the first and second pixels are configured to detect light of different first and second wavelength ranges, respectively, and the gate structures are transparent to the light of one of the first and second wavelength ranges but are not transparent to the light of another of the first and second wavelength ranges.
18. The LIDAR detector array of claim 15 , wherein the gate structures are arranged adjacent a periphery of respective ones of the first pixels.
19. The LIDAR detector array of claim 18 , wherein the second pixels respectively comprise red, green, and blue sub-pixels arranged adjacent the periphery of the respective ones of the first pixels.
20. The LIDAR detector array of claim 15 , further comprising:
first and second readout circuits; and
a plurality of input/output (I/O) pads electrically connected to respective pixels of the first and second pixels, wherein the I/O pads are configured to output the respective detection signals from the first and second pixels to the first and second readout circuits, respectively.