Electronic device
An electronic device includes a substrate, a base substrate, a metal connection body, a support body, a metal body, and a via. The substrate includes one main surface with a functional element and is a piezoelectric substrate or a compound semiconductor substrate. The substrate is mounted on the base substrate such that the one main surface faces the base substrate. The metal body is in contact with the support body and includes at least a portion extending to outside the substrate in plan view from the support body. The via connects the portion of the metal body outside the substrate and the base substrate to each other and has a higher thermal conductivity than the substrate.
1 . An electronic device comprising:
a functional element substrate including a first main surface with a functional element provided thereon, the functional element substrate being a piezoelectric substrate or a compound semiconductor substrate;
a base substrate on which the functional element substrate is mounted such that the first main surface faces the base substrate;
a metal connection body electrically connecting the functional element and the base substrate to each other;
a support body at a second main surface of the functional element substrate opposite to the first main surface, the support body having a higher thermal conductivity than the functional element substrate;
a first metal body in contact with the support body, the first metal body including at least a portion that extends to outside the functional element substrate in plan view from the support body;
a via connecting the portion of the first metal body outside the functional element substrate and the base substrate to each other, the via having a higher thermal conductivity than the functional element substrate; and
a second metal body between the functional element and the metal connection body; wherein
the first metal body extends across the functional element substrate in plan view from the support body;
the portion of the first metal body outside the functional element substrate is located on both sides of opposing sides of the functional element substrate in plan view from the support body;
the portion of the first metal body on the both sides is connected to the base substrate with the via interposed between the portion and the base substrate;
the metal connection body extends from inside the functional element substrate in plan view from the support body to outside the functional element substrate; and
the second metal body extends from inside the functional element substrate in plan view from the support body to outside the functional element substrate.
2 . The electronic device according to claim 1 , wherein
the support body includes a recess or a through hole in a surface opposite to a surface adjacent to the functional element substrate;
a conductive film that has a higher thermal conductivity than the support body is provided in the recess or the through hole; and
the conductive film is in contact with the first metal body.
3 . The electronic device according to claim 1 , wherein
the functional element substrate is a piezoelectric substrate;
the support body is a high-acoustic-velocity support substrate through which bulk waves propagate at a higher acoustic velocity than acoustic waves that propagate through the functional element substrate; and
the electronic device further includes a low-acoustic-velocity film between the functional element substrate and the high-acoustic-velocity support substrate, and through which bulk waves propagate at a lower acoustic velocity than acoustic waves that propagate through the functional element substrate.
4 . The electronic device according to claim 1 , further comprising:
an insertion layer between the support body and the functional element substrate; wherein
the insertion layer has a higher thermal conductivity than the functional element substrate and the support body.
5 . The electronic device according to claim 1 , further comprising:
an intermediate layer between the functional element substrate and the support body; wherein
the intermediate layer is in contact with the functional element substrate and has a coefficient of linear expansion that is between a coefficient of linear expansion of the functional element substrate and a coefficient of linear expansion of the support body.
6 . The electronic device according to claim 1 , wherein the support body includes at least one of a mixture of a metal and a resin, silicon, silicon carbide, aluminum oxide, boron nitride, aluminum nitride, silicon nitride, copper, or nickel.
7 . The electronic device according to claim 1 , wherein the support body has a surface roughness that is larger on a surface closer to the first metal body than on a surface closer to the functional element substrate.
8 . The electronic device according to claim 1 , further comprising an insulator covering a side surface of the functional element substrate and a side surface of the support body.
9 . The electronic device according to claim 1 , wherein
a plurality of the metal connection bodies are provided; and
the via has a cross-sectional area larger than at least one of cross-sectional areas of the plurality of metal connection bodies.
10 . The electronic device according to claim 1 , further comprising an electronic component mounted on a surface of the first metal body opposite to a surface of the first metal body closer to the support body.
11 . The electronic device according to claim 10 , wherein the via has a cross-sectional area that is larger than a cross-sectional area of a portion of the electronic component at which the electronic component is mounted on the surface of the first metal body.
12 . The electronic device according to claim 1 , wherein the functional element substrate is a piezoelectric substrate including at least one of crystal, LiTaO 3 LiNbO 3 , KNbO 3 , La 3 Ga 5 SiO 14 , or Li 2 B 4 O 7 .
13 . The electronic device according to claim 1 , wherein the functional element substrate is a compound semiconductor substrate including at least one of GaAs or GaN.
14 . An electronic device comprising:
a functional element substrate including a first main surface with a functional element provided thereon, the functional element substrate being a piezoelectric substrate or a compound semiconductor substrate;
a base substrate on which the functional element substrate is mounted such that the first main surface faces the base substrate;
a metal connection body electrically connecting the functional element substrate and the base substrate to each other;
a support body at a second main surface of the functional element substrate opposite to the first main surface, the support body including at least one of a mixture of a metal and a resin, silicon, silicon carbide, boron nitride, aluminum nitride, silicon nitride, copper, or nickel;
a first metal body in contact with the support body, the first metal body including at least a portion extending to outside the functional element substrate in plan view from the support body;
a via connecting the portion of the first metal body outside the functional element substrate and the base substrate to each other, the via including one of a copper-based conductive paste solidified material and a silver-based conductive paste solidified material; and
a second metal body between the functional element and the metal connection body; wherein
the first metal body extends across the functional element substrate in plan view from the support body;
the portion of the first metal body outside the functional element substrate is located on both sides of opposing sides of the functional element substrate in plan view from the support body;
the portion of the first metal body on the both sides is connected to the base substrate with the via interposed between the portion and the base substrate;
the metal connection body extends from inside the functional element substrate in plan view from the support body to outside the functional element substrate; and
the second metal body extends from inside the functional element substrate in plan view from the support body to outside the functional element substrate.