Sputtering target and manufacturing method therefor
A sputtering target according to one embodiment is an integrated sputtering target comprising a target portion and a backing plate portion, both of them being made of copper and unavoidable impurities, wherein a Vickers hardness Hv is 90 or more, and wherein a flat ratio of crystal grains in a cross section orthogonal to a sputtering surface is 0.35 or more and 0.65 or less.
1. An integrated sputtering target comprising a target portion and a backing plate portion, both of them containing from 0.1% by mass to 8% by mass of at least one element selected from aluminum, manganese, nickel and cobalt, the balance being copper and unavoidable impurities, wherein a Vickers hardness Hv is 90 or more, and wherein a flat ratio of crystal grains in a cross section orthogonal to a sputtering surface to be used for sputtering is 0.35 or more and 0.85 or less.
2. The sputtering target according to claim 1 , wherein the sputtering target has an average crystal grain size of 5 μm or more and 50 μm or less.
3. The sputtering target according to claim 1 , wherein the target portion and the backing plate portion further contain one or more elements selected from the group consisting of Fe, Cr, Si, Ag, S, and P in a total nonzero amount of 0.01% by mass or less.
4. The sputtering target according to claim 1 , wherein the sputtering target contains from 0.1% by mass to 6% by mass of at least one element selected from aluminum, manganese, nickel, and cobalt.
5. A method for manufacturing the integrated sputtering target according to claim 1 , the method comprising:
melting a raw material to cast an ingot comprising the element, copper and the unavoidable impurities; and subjecting the ingot to hot forging, first cold rolling or first cold forging, a heat treatment, and a second cold rolling or a second cold forging in this order,
wherein the second cold rolling or the second cold forging is carried out at a change rate of from 20% to 60%, and
wherein in the second cold rolling or the second cold forging, crystal grains are crushed in a thickness direction to change a flat ratio of the crystal grains in a cross section orthogonal to a sputtering surface to be used for sputtering.
6. The method according to claim 5 , wherein the heat treatment is carried out at a temperature of from 200° C. to 500° C. for 0.5 hours to 3 hours.
7. The method according to claim 5 , wherein the first cold rolling or the first cold forging is carried out at a change rate of 70% or more.
8. The method according to claim 5 , wherein the hot forging is carried out at a temperature of from 300° C. to 900° C.
9. The method according to claim 5 , wherein the ingot further contains one or more elements selected from the group consisting of Fe, Cr, Si, Ag, S, and P in a total amount of 0.01% by mass or less.
10. The method according to claim 5 , wherein the method manufactures a sputtering target containing 0.1% by mass to 6% by mass of at least one element selected from aluminum, manganese, nickel, and cobalt.