Solar cell and preparation method thereof
A solar cell and preparation method. The solar cell includes silicon substrate having first or second polarity, where the substrate includes first and second sides opposite to each other; first passivation structure on first side of the substrate, a portion of first structure farthest from the substrate having first polarity and a position where first structure is located being first electrode region; second passivation structure on a side of first structure away from the substrate, a portion of second structure farthest from the substrate having second polarity and a position where second structure is located being second electrode region, second and first electrode regions are not overlapped and second structure has a process temperature lower than first structure; and first electrode in first region on a side of second structure away from the substrate and second electrode in second region on a side of second structure away from the substrate.
1 . A solar cell, comprising:
a silicon substrate having a first polarity or a second polarity, wherein the silicon substrate includes a first side and a second side opposite to each other; the first polarity is used for transporting one of electrons and holes, and the second polarity is used for transporting the other of electrons and holes;
a first passivation structure on the first side of the silicon substrate, wherein a portion of the first passivation structure farthest from the silicon substrate has a first polarity; and a position where the first passivation structure is located is a first electrode region;
a second passivation structure on a side of the first passivation structure away from the silicon substrate, wherein a portion of the second passivation structure farthest from the silicon substrate has a second polarity; and a position where the second passivation structure is located is a second electrode region, the second electrode region is not overlapped with the first electrode region, and the second passivation structure has a process temperature lower than the first passivation structure; and
a first electrode in the first electrode region on a side of the first passivation structure away from the silicon substrate, and a second electrode in the second electrode region on a side of the second passivation structure away from the silicon substrate;
wherein the second passivation structure is not overlapped with the first passivation structure in a direction perpendicular to the first side or the second side, and side surfaces of the first passivation structure and the second passivation structure contact each other, and the first passivation structure completely covers, but does not exceed, the first electrode region, and the second passivation structure completely covers, but does not exceed, the second electrode region, and
wherein the first passivation structure comprises a tunneling passivation sublayer and a first passivation sublayer on a side of the tunneling passivation sublayer away from the silicon substrate; the second passivation structure comprises a dielectric passivation sublayer and a second passivation sublayer on a side of the dielectric passivation sublayer away from the silicon substrate; side surfaces of the tunneling passivation sublayer and the first passivation sublayer contact with the second passivation structure; and side surfaces of the dielectric passivation sublayer and the second passivation sublayer contact with the first passivation structure wherein the tunneling passivation sublayer and the dielectric passivation sublayer comprise different materials.
2 . The solar cell according to claim 1 ,
wherein the portion of the first passivation structure farthest from the silicon substrate is the first passivation sublayer.
3 . The solar cell according to claim 2 , wherein
the tunneling passivation sublayer is made of a material comprising at least one of silicon oxide, aluminum oxide, silicon oxynitride or silicon carbide; and
the first passivation sublayer is made of a material comprising at least one of doped polysilicon or doped silicon carbide.
4 . The solar cell according to claim 2 , wherein
the tunneling passivation sublayer has a thickness ranging from 1 nm to 3 nm; and
the first passivation sublayer has a thickness ranging from 10 nm to 200 nm.
5 . The solar cell according to claim 1 ,
wherein the portion of the second passivation structure farthest from the silicon substrate is the second passivation sublayer.
6 . The solar cell according to claim 5 , wherein
the dielectric passivation sublayer is made of a material comprising at least one of polysilicon, amorphous silicon or silicon oxide; and
the second passivation sublayer is made of a material comprising at least one of doped polysilicon, doped amorphous silicon or doped silicon carbide.
7 . The solar cell according to claim 5 , wherein
the dielectric passivation sublayer has a thickness ranging from 1 nm to 15 nm; and
the second passivation sublayer has a thickness ranging from 1 nm to 20 nm.
8 . The solar cell according to claim 1 , wherein
the first electrode region includes a plurality of strip-shaped regions spaced apart, the second electrode region includes a plurality of strip-shaped regions spaced apart, and the strip-shaped regions in the first electrode region and the strip-shaped regions in the second electrode region are alternately distributed.
9 . The solar cell according to claim 1 , wherein
the first passivation structure has a process temperature ranging from 300° C. to 650° C.; and
the second passivation structure has a process temperature ranging from 150° C. to 200° C.
10 . A method for preparing a solar cell, wherein the solar cell is a solar cell according to claim 1 , and the method comprises:
forming the first passivation structure in the first electrode region on the first side of the silicon substrate through a patterning process;
forming the second passivation structure in the second electrode region on the first side of the silicon substrate through the patterning process; and
forming the first electrode in the first electrode region and the second electrode in the second electrode region on the first side of the silicon substrate through the patterning process.
11 . The method according to claim 10 , wherein the first passivation structure comprises:
a tunneling passivation sublayer; and
a first passivation sublayer on a side of the tunneling passivation sublayer away from the silicon substrate, wherein the portion of the first passivation structure farthest from the silicon substrate is the first passivation sublayer.
12 . The method according to claim 11 , wherein
the tunneling passivation sublayer is made of a material comprising at least one of silicon oxide, aluminum oxide, silicon oxynitride or silicon carbide; and
the first passivation sublayer is made of a material comprising at least one of doped polysilicon or doped silicon carbide.
13 . The method according to claim 11 , characterized in that
the tunneling passivation sublayer has a thickness ranging from 1 nm to 3 nm; and
the first passivation sublayer has a thickness ranging from 10 nm to 200 nm.
14 . The method according to claim 10 , wherein the second passivation structure comprises:
a dielectric passivation sublayer; and
a second passivation sublayer on a side of the dielectric passivation sublayer away from the silicon substrate, wherein the portion of the second passivation structure farthest from the silicon substrate is the second passivation sublayer.
15 . The method according to claim 14 , wherein
the dielectric passivation sublayer is made of a material comprising at least one of polysilicon, amorphous silicon or silicon oxide; and
the second passivation sublayer is made of a material comprising at least one of doped polysilicon, doped amorphous silicon or doped silicon carbide.
16 . The method according to claim 14 , wherein
the dielectric passivation sublayer has a thickness ranging from 1 nm to 15 nm; and
the second passivation sublayer has a thickness ranging from 1 nm to 20 nm.
17 . The method according to claim 10 , wherein
the first electrode region includes a plurality of strip-shaped regions spaced apart, the second electrode region includes a plurality of strip-shaped regions spaced apart, and the strip-shaped regions in the first electrode region and the strip-shaped regions in the second electrode region are alternately distributed.
18 . The method according to claim 10 , wherein
the first passivation structure has a process temperature ranging from 300° C. to 650° C.; and
the second passivation structure has a process temperature ranging from 150° C. to 200° C.