IP Library Granted Patent US 12,036,793
Granted Patent B2
US 12,036,793 · App. 18/209,942 · Granted Jul 16, 2024

Electrohydrodynamic jet printed photonic devices

Inventors: Brian Iezzi (Ann Arbor, MI); Max Shtein (Ann Arbor, MI); Zahra Afkhami Kheirabadi (Ann Arbor, MI); Kira Barton (Ann Arbor, MI)
Assignee: The Regents of the University of Michigan
B41J2/06B41J11/00214G03F7/2018H01L33/46
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Quick Facts
Patent No.
US 12,036,793
App. No.
18/209,942
Granted
Jul 16, 2024
Kind
B2
Abstract

A method of fabricating a thin film structure includes printing, using an electrohydrodynamic jet (e-jet) printing apparatus, a first layer comprising a first liquid ink, such that the first layer is supported by a substrate, curing the first layer; printing, using the e-jet printing apparatus, a second layer comprising a second liquid ink, such that the second layer is supported by the first layer, and curing the second layer.

Claims (16)

1. A device comprising:

a substrate; and

a patterned stack supported by the substrate, wherein the patterned stack comprises:

a first layer supported by the substrate, the first layer comprising a first photopolymer; and

a second layer supported by the first layer, the second layer comprising a second photopolymer;

wherein the first and second photopolymers have different refractive indices.

2. The device of claim 1 , wherein the patterned stack further comprises further alternating patterned layers of the first and second photopolymers, the alternating patterned layers being supported by the second patterned layer.

3. The device of claim 1 , wherein each of the first and second patterned layers has a thickness less than about 200 nm.

4. The device of claim 1 , wherein the patterned stack is configured as a one-dimensional photonic crystal.

5. The device of claim 1 , wherein the patterned stack is configured as a Bragg reflector.

6. The device of claim 1 , wherein the patterned stack is one of a pixelated array of patterned stacks supported by the substrate.

7. The device of claim 1 , further comprising a photodetector supported by the substrate.

8. The device of claim 7 , wherein the photodetector is disposed between the patterned stack and the substrate.

9. The device of claim 1 , wherein the substrate comprises silicon.

10. The device of claim 1 , wherein the first photopolymer has a higher refractive index than the second photopolymer.

11. The device of claim 1 , wherein the patterned stack further comprises a third layer supported by the second layer, the third layer comprising a third photopolymer.

Assignments (2)
CONFIRMATORY LICENSE Recorded Apr 10, 2025
From: UNIVERSITY OF MICHIGAN
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 070810/0085 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 19, 2023
From: IEZZI, BRIAN; SHTEIN, MAX; AFKHAMI KHEIRABADI, ZAHRA; BARTON, KIRA
To: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
Reel/Frame 063987/0193 →
Continuity (3)
Division 17396043 · Aug 6, 2021
Provisional Application 63062389 · Aug 6, 2020
Related Publication 20230321977A1 · Oct 12, 2023