Solar cell and preparation method thereof
The present disclosure provides a solar cell and a preparation method thereof, belongs to the technical field of solar cells. The preparation method of a solar cell according to the present disclosure includes: forming a passivation structure on a contact silicon layer at a back side of a silicon substrate; where the back side is a side opposite to a light incident side; removing the passivation structure located at least part of an electrode region by laser to form a contact opening, melting at least part of the contact silicon layer at the contact opening by laser, and solidifying the molten contact silicon layer to form a re-solidified structure; where the electrode region is a region configured to form a back electrode; and electroplating to form a back electrode in the electrode region on the back side of the contact silicon layer.
1. A preparation method of a solar cell, characterized in comprising:
forming a passivation structure on a contact silicon layer at a back side of a silicon substrate; wherein the back side is a side opposite to a light incident side;
removing the passivation structure located at least part of an electrode region by laser to form a contact opening, melting at least part of the contact silicon layer at the contact opening by laser, and solidifying the molten contact silicon layer to form a re-solidified structure; wherein the electrode region is a region configured to form a back electrode; and
electroplating to form the back electrode in the electrode region on the back side of the contact silicon layer,
characterized in that removing the passivation structure located at least part of the electrode region by laser to form the contact opening comprises:
irradiating the passivation structure at a plurality of spaced positions in the electrode region by laser, removing the irradiated passivation structure to form a contact opening, and tilting an edge portion of the remaining passivation structure close to the contact opening;
wherein the back electrode has a thickness greater than the passivation structure.
2. The preparing method according to claim 1 , characterized in that removing the passivation structure located at least part of the electrode region by laser to form the contact opening, and melting at least part of the contact silicon layer at the contact opening by laser comprises:
irradiating the passivation structure located at least part of the electrode region by laser, and evaporating and removing the irradiated passivation structure to form a contact opening; and
irradiating the contact silicon layer located at least part of the contact opening by laser to melt the contact silicon layer.
3. The preparation method according to claim 2 , characterized in that
the laser used for evaporating and removing the passivation structure has a pulse duration between 1 ps and 30 ps, and an energy density between 0.2 J/cm 2 and 1.2 J/cm 2 ; and
the laser used for melting the contact silicon layer has a pulse duration between 1 ns and 50 ns, and an energy density between 0.1 J/cm 2 and 0.5 J/cm 2 .
4. The preparation method according to claim 2 , characterized in that
a pattern of the laser used for evaporating and removing the passivation structure comprises a plurality of non-overlapping first spots, each of which has a radial dimension between 40 μm and 60 μm; and
a pattern of the laser used for melting the contact silicon layer comprises second spots centered on the respective first spots, each of the second spots has a radial dimension between 20 μm and 40 μm and less than the radial dimension of the first spot where it is located.
5. The preparation method according to claim 1 , characterized in that
a part of the tilted edge portion of the passivation structure closest to the contact silicon layer forms an angle between 15° and 60° with the contact silicon layer.
6. The preparation method according to claim 1 , characterized in that
a maximum distance between the tilted edge portion of the passivation structure and the contact silicon layer is between 250 nm and 2000 nm.
7. The preparation method according to claim 1 , characterized in that
in a direction from the tilted edge portion of the passivation structure to a center of the passivation structure, an orthographic projection of the tilted edge portion of the passivation structure on the contact silicon layer has a size between 1 μm and 4 μm.
8. The preparation method according to claim 1 , characterized in that
the tilted edge portion of the passivation structure has a curved structure.
9. The preparation method according to claim 1 , characterized in that
a distance between two adjacent spaced positions is between 1 μm and 20 μm.
10. The preparation method according to claim 1 , characterized in that
the passivation structure has a thickness between 50 nm and 200 nm; and
the back electrode has a thickness between 1 μm and 12 μm.
11. The preparation method according to claim 1 , characterized in that
the re-solidified structure has a depth between 30 nm and 1000 nm.
12. The preparation method according to claim 1 , characterized in that
a tunneling layer is provided on the back side of the silicon substrate; and
the contact silicon layer is a poly-Si layer on a back side of the tunneling layer.
13. The preparation method according to claim 1 , characterized in that before forming the passivation structure on the contact silicon layer at the back side of the silicon substrate, the method further comprises:
polishing the back side of the contact silicon layer.
14. A solar cell, characterized in comprising:
a silicon substrate having a contact silicon layer on a back side thereof; wherein the back side is a side opposite to a light incident side;
a passivation structure on a back side of the contact silicon layer, wherein the passivation structure has a contact opening formed by laser in at least part of an electrode region, and at least part of the contact silicon layer at the contact opening is a re-solidified structure; the electrode region is a region configured to form a back electrode, and the re-solidified structure is a structure formed by solidifying the contact silicon layer after laser melting; and
the back electrode in the electrode region; wherein the back electrode is provided on a side of the passivation structure away from the silicon substrate, and formed on the contact silicon layer through electroplating, and
a plurality of spaced contact openings are provided in the electrode region, and an edge portion of the passivation structure close to the contact openings is tilted; and
the back electrode has a thickness greater than the passivation structure.
15. The solar cell according to claim 14 , characterized in that the solar cell further satisfies at least one of the following conditions:
a part of the tilted edge portion of the passivation structure closest to the contact silicon layer forms an angle between 15° and 60° with the contact silicon layer;
a maximum distance between the tilted edge portion of the passivation structure and the contact silicon layer is between 250 nm and 2000 nm;
in a direction from the tilted edge portion of the passivation structure to a center of the passivation structure, an orthographic projection of the tilted edge portion of the passivation structure on the contact silicon layer has a size between 1 μm and 4 μm;
the tilted edge portion of the passivation structure has a curved structure, and
a distance between two adjacent contact openings is between 1 μm and 20 μm.
16. The solar cell according to claim 14 , characterized in that
the passivation structure has a thickness between 50 nm and 200 nm; and
the back electrode has a thickness between 1 μm and 12 μm.
17. The solar cell according to claim 14 , characterized in that the re-solidified structure has a depth between 30 nm and 1000 nm.
18. The solar cell according to claim 14 , characterized in that a tunneling layer is provided on the back side of the silicon substrate; and
the contact silicon layer is a poly-Si layer on a back side of the tunneling layer.