Selective deposition of diamond
A method provides a single-crystal diamond substrate having a growth surface. A diamond growth inhibitor (DGI) is positioned over a diamond inhibition area of the growth surface. A first diamond portion having a first dopant concentration is deposited using chemical vapor deposition over a growth area of the growth surface. The diamond growth inhibitor and non-diamond carbon thereon are removed.
1 . A method of growing diamond, the method comprising:
providing a single-crystal diamond substrate having a growth surface, the single-crystal diamond substrate having an intrinsic dopant concentration;
positioning a diamond growth inhibitor over a diamond inhibition area of the growth surface;
positioning a silicon pad over the single crystal diamond substrate;
depositing a first diamond portion having a first dopant concentration using chemical vapor deposition over a growth area of the growth surface, the first dopant concentration being different from the intrinsic dopant concentration, wherein depositing comprises growing polycrystalline diamond over the silicon pad; and
removing the diamond growth inhibitor and non-diamond carbon thereon.
2 . The method of claim 1 , wherein the diamond growth inhibitor is configured to cause deposition of unbonded or Sp2 bonded carbon.
3 . The method of claim 1 , further comprising:
etching exposed regions of the growth surface not covered by diamond growth inhibitor, prior to removing the diamond growth inhibitor, to form etched regions, the diamond growth inhibitor functioning as a mask preventing or reducing the formation of etched regions beneath the diamond growth inhibitor;
positioning the diamond growth inhibitor over a second diamond inhibition area of the growth surface;
etching the growth surface to form second etched regions, the diamond growth inhibitor functioning as a mask preventing or reducing the formation of the second etched regions beneath the diamond growth inhibitor; and
depositing a second diamond portion having a second dopant concentration using chemical vapor deposition, the second diamond portion having a different dopant concentration from the first diamond portion.
4 . The method as defined by claim 3 , further comprising removing the diamond growth inhibitor over the second diamond inhibition area of the growth surface.
5 . The method as defined by claim 3 , wherein the first doped diamond portion and the second doped diamond portion are single crystal.
6 . The method as defined by claim 1 , wherein amorphous carbon deposits over the diamond growth inhibitor.
7 . The method as defined by claim 1 , wherein the diamond growth inhibitor is formed from gold.
8 . The method as defined by claim 1 , wherein the diamond growth inhibitor is formed from aluminum oxide.
9 . The method as defined by claim 1 , wherein the first doped diamond portion and the second doped diamond portion form a p-n junction or PIN diode.
10 . The method as defined by claim 1 , wherein the first doped diamond portion and the second doped diamond portion form a semiconductor device.
11 . The method as defined by claim 9 , further comprising tracing lines to contact pads and electrically coupling the device to a power source.
12 . The method as defined by claim 1 , wherein amorphous carbon forms on the diamond growth inhibitor when depositing diamond using chemical vapor deposition.
13 . The method as defined by claim 1 , further comprising an adherence portion between the diamond growth inhibitor and the diamond growth surface.
14 . The method as defined by claim 1 , further comprising polishing to remove the diamond growth inhibitor.
15 . The method as defined by claim 1 , further comprising embedding the first doped portion and the second doped portion by depositing undoped diamond over the growth surface.
16 . The method as defined by claim 1 , wherein doped diamond of a given color is selectively deposited to form a logo in the diamond.
17 . A diamond grown using the process of claim 1 .
18 . A diamond comprising:
a single-crystal undoped diamond;
a first single-crystal diamond portion having a first dopant concentration embedded in the single crystal diamond;
a second single-crystal diamond portion having a second dopant concentration embedded in the single crystal diamond a silicon pad positioned over the single-crystal diamond; and
polycrystalline diamond grown over the silicon pad.
19 . The diamond of claim 18 , wherein the first single-crystal diamond portion is boron doped and/or the second single-crystal diamond portion is nitrogen doped.