Wide-range perpendicular sensitive magnetic sensor and method for manufacturing the same

1. A wide-range perpendicular sensitive magnetic sensor, comprising:

a substrate;

a plurality of magnetic tunnel junctions;

a plurality of magnetic flux regulators;

a first output port; and

a second output port,

wherein the plurality of magnetic tunnel junctions are arranged on the substrate, the plurality of magnetic flux regulators are arranged above the plurality of magnetic tunnel junctions, the plurality of magnetic tunnel junctions include a first magnetic tunnel junction and a second magnetic tunnel junction, the first magnetic tunnel junction is located below the magnetic flux regulator, and the second magnetic tunnel junction is located below a gap between two adjacent magnetic flux regulators; the first magnetic tunnel junction and the second magnetic tunnel junction are arranged in partitions on the substrate;

wherein the first output port is connected to the first magnetic tunnel junction, the second output port is connected to the second magnetic tunnel junction, the first output port and the second output port are both configured to output a sensing signal representing a magnetic induction intensity of a magnetic field in a Z-axis direction, and the Z-axis direction is a direction perpendicular to the substrate; wherein a magnetic sensing direction of the first magnetic tunnel junction is a positive direction of the Z-axis, and a magnetic sensing direction of the second magnetic tunnel junction is a negative direction of the Z-axis; or the magnetic sensing direction of the first magnetic tunnel junction is the negative direction of the Z-axis, and the magnetic sensing direction of the second magnetic tunnel junction is the positive direction of the Z-axis;

wherein the magnetic sensor includes a voltage input port and a ground port;

wherein the first output port includes a first positive output port and a first negative output port, and the first output port is configured to output a voltage of the first magnetic tunnel junction; the voltage of the first magnetic tunnel junction being linearly related to magnetic reluctance of the first magnetic tunnel junction, and the magnetic reluctance of the first magnetic tunnel junction being linearly related to an external magnetic field; the first positive output port, the first negative output port, the voltage input port, the ground port and the first magnetic tunnel junction forming a first push-pull Wheatstone full-bridge structure; and

wherein the second output port includes a second positive output port and a second negative output port, and the second output port is configured to output a voltage of the second magnetic tunnel junction; the voltage of the second magnetic tunnel junction being linearly related to magnetic reluctance of the second magnetic tunnel junction, and the magnetic reluctance of the second magnetic tunnel junction being linearly related to the external magnetic field; the second positive output port, the second negative output port, the voltage input port, the ground port, and the second magnetic tunnel junction forming a second push-pull Wheatstone full-bridge structure.

2. The wide-range perpendicular sensitive magnetic sensor of claim 1 , wherein the first magnetic tunnel junction and the second magnetic tunnel junction are alternately arranged on the substrate.

3. The wide-range perpendicular sensitive magnetic sensor of claim 1 , wherein the voltage input port, the ground port, the first output port, the second output port, the first magnetic tunnel junction and the second magnetic tunnel junction are all connected by connecting lines.

4. The wide-range perpendicular sensitive magnetic sensor of claim 3 , wherein the magnetic sensor includes a plurality of first magnetic tunnel junctions, the plurality of first magnetic tunnel junctions forming a first magnetic reluctance circuit, a second magnetic reluctance circuit, a third magnetic reluctance circuit and a fourth magnetic reluctance circuit, and the first magnetic reluctance circuit, the second magnetic reluctance circuit, the third magnetic reluctance circuit and the fourth magnetic reluctance circuit each comprising at least one first magnetic tunnel junction;

a first end of the first magnetic reluctance circuit being connected to a first end of the second magnetic reluctance circuit, a second end of the second magnetic reluctance circuit being connected to a first end of the third magnetic reluctance circuit, a second end of the third magnetic reluctance circuit being connected to a first end of the fourth magnetic reluctance circuit, and a second end of the fourth magnetic reluctance circuit being connected to a second end of the first magnetic reluctance circuit;

the first positive output port being respectively connected to the first end of the first magnetic reluctance circuit and the second end of the fourth magnetic reluctance circuit;

the first negative output port being respectively connected to the second end of the second magnetic reluctance circuit and the first end of the third magnetic reluctance circuit;

the voltage input port being respectively connected to the second end of the first magnetic reluctance circuit and the first end of the second magnetic reluctance circuit; and

the ground port being respectively connected to the second end of the third magnetic reluctance circuit and the first end of the fourth magnetic reluctance circuit.

5. The wide-range perpendicular sensitive magnetic sensor of claim 3 , wherein the magnetic sensor includes a plurality of second magnetic tunnel junctions, the plurality of second magnetic tunnel junctions forming a fifth magnetic reluctance circuit, a sixth magnetic reluctance circuit, a seventh magnetic reluctance circuit and an eighth magnetic reluctance circuit, and the fifth magnetic reluctance circuit, the sixth magnetic reluctance circuit, the seventh magnetic reluctance circuit and the eighth magnetic reluctance circuit each comprising at least one second magnetic tunnel junction;

a second end of the fifth magnetic reluctance circuit being connected to a first end of the sixth magnetic reluctance circuit, a second end of the sixth magnetic reluctance circuit being connected to a first end of the seventh magnetic reluctance circuit, a second end of the seventh magnetic reluctance circuit being connected to a first end of the eighth magnetic reluctance circuit, and a second end of the eighth magnetic reluctance circuit being connected to a first end of the fifth magnetic reluctance circuit;

the second positive output port being respectively connected to the first end of the fifth magnetic reluctance circuit and the second end of the eighth magnetic reluctance circuit;

the second negative output port being respectively connected to the second end of the sixth magnetic reluctance circuit and the first end of the seventh magnetic reluctance circuit;

the voltage input port being respectively connected to the second end of the fifth magnetic reluctance circuit and the first end of the sixth magnetic reluctance circuit; and

the ground port being respectively connected to the second end of the seventh magnetic reluctance circuit and the first end of the eighth magnetic reluctance circuit.

6. The wide-range perpendicular sensitive magnetic sensor of claim 1 , wherein the magnetic tunnel junctions includes a magnetic multilayer film of an insulator and/or a semiconductor.

7. The wide-range perpendicular sensitive magnetic sensor of claim 1 , wherein edges of the first magnetic tunnel junction do not exceed edges of the magnetic flux regulator from a top-down perspective, and edges of the second magnetic tunnel junction do not contact with the edges of the magnetic flux regulator on either side from the top-down perspective.

8. A method for manufacturing a wide-range perpendicular sensitive magnetic sensor, the method comprising:

preparing a plurality of magnetic tunnel junctions on a substrate, the plurality of magnetic tunnel junctions comprising a first magnetic tunnel junction and a second magnetic tunnel junction;

preparing connection lines on the substrate, the connection lines comprising a first connection line for connecting the first magnetic tunnel junction and a first output port, and a second connection line for connecting the second magnetic tunnel junction and a second output port, the first output port and the second output port being both configured to output a sensing signal representing a magnetic induction intensity of a magnetic field in a Z-axis direction, the Z-axis direction being a direction perpendicular to the substrate; wherein a magnetic sensing direction of the first magnetic tunnel junction is a positive direction of the Z-axis, and a magnetic sensing direction of the second magnetic tunnel junction is a negative direction of the Z-axis; or the magnetic sensing direction of the first magnetic tunnel junction is the negative direction of the Z-axis, and the magnetic sensing direction of the second magnetic tunnel junction is the positive direction of the Z-axis;

wherein the magnetic sensor includes a voltage input port and a ground port;

wherein the first output port includes a first positive output port and a first negative output port, and the first output port is configured to output a voltage of the first magnetic tunnel junction; the first positive output port, the first negative output port, the voltage input port, the ground port and the first magnetic tunnel junction forming a first push-pull Wheatstone full-bridge structure; the first output port obtaining a first output voltage of the first magnetic tunnel junction; the first output voltage being linearly related to magnetic reluctance of the first magnetic tunnel junction, and the magnetic reluctance of the first magnetic tunnel junction being linearly related to an external magnetic field;

wherein the second output port includes a second positive output port and a second negative output port, and the second output port is configured to output a voltage of the second magnetic tunnel junction; the second positive output port, the second negative output port, the voltage input port, the ground port, and the second magnetic tunnel junction forming a second push-pull Wheatstone full-bridge structure; the second output port obtaining a second output voltage of the second magnetic tunnel junction; the second output voltage being linearly related to magnetic reluctance of the second magnetic tunnel junction, and the magnetic reluctance of the second magnetic tunnel junction being linearly related to the external magnetic field; and

preparing a plurality of magnetic flux regulators above the plurality of magnetic tunnel junctions based on positions of the first magnetic tunnel junction and the second magnetic tunnel junction on the substrate, such that the first magnetic tunnel junction is located below the magnetic flux regulator and the second magnetic tunnel junction is located below a gap between two adjacent magnetic flux regulators; the first magnetic tunnel junction and the second magnetic tunnel junction being arranged in partitions on the substrate.

9. The method of claim 8 , wherein the step of preparing the plurality of magnetic tunnel junctions on the substrate includes:

generating a TMR multilayer film structure on the substrate;

etching the TMR multilayer film structure to obtain a plurality of magnetic tunnel junction units arranged in rows, each row of the magnetic tunnel junction unit forming the magnetic tunnel junction; and

annealing the plurality of magnetic tunnel junction units to obtain the first magnetic tunnel junction and the second magnetic tunnel junction;

wherein a magnetic sensing direction of the first magnetic tunnel junction is a positive direction of the Z-axis, and a magnetic sensing direction of the second magnetic tunnel junction is a negative direction of the Z-axis; or

the magnetic sensing direction of the first magnetic tunnel junction is the negative direction of the Z-axis, and the magnetic sensing direction of the second magnetic tunnel junction is the positive direction of the Z-axis.

10. The method of claim 8 , wherein the connection lines further includes a third connection line for connecting the first magnetic tunnel junction, the voltage input port, and the ground port, and a fourth connection line for connecting the second magnetic tunnel junction, the voltage input port, and the ground port.

11. The method of claim 10 , wherein the preparing the connection lines on the substrate includes:

preparing a portion of the connecting lines on the substrate with the first magnetic tunnel junction and the second magnetic tunnel junction alternately arranged on the substrate; and

depositing a layer of insulating material and depositing a layer of conductive material on the insulating material, and etching the conductive material to prepare another portion of the connection lines.

12. The method of claim 8 , wherein edges of the first magnetic tunnel junction do not exceed edges of the magnetic flux regulator from a top-down perspective, and edges of the second magnetic tunnel junction do not contact with the edges of the magnetic flux regulator on either side from the top-down perspective.