Semiconductor Light Receiving Element
A structure for blocking light incidence to a peripheral part of an element is applied to a rear surface portion, and when optically coupled to a light receiving element, the light is made incident to a center part of the element without fail. An embodiment relates to a semiconductor light receiving element, including a semiconductor light-absorbing layer on a front surface of a semiconductor substrate, for receiving signal light from a rear surface of the semiconductor substrate, and a transmittance of an inner region of a similar shape having a same center as an operating region defined in the semiconductor light-absorbing layer on the rear surface of the semiconductor substrate is higher than that of an outside of the shape.
1 . A semiconductor light-receiving element, including a semiconductor light absorbing layer on a front surface of a semiconductor substrate, for receiving a signal light from a rear surface of the semiconductor substrate,
wherein a transmittance of an inner region on the rear surface of the semiconductor substrate with a similar shape having a same center as an operating region defined in the semiconductor light absorbing layer is higher than a transmittance of an outside of the inner region.
2 . The semiconductor light-receiving element according to claim 1 , wherein
a light shielding film is formed on the outside of the inner region.
3 . The semiconductor light-receiving element according to claim 1 , wherein
an anti-reflection film with the similar shape having the same center as the operating region is formed.
4 . The semiconductor light-receiving element according to claim 1 , wherein
an anti-reflection film is formed on the rear surface of the semiconductor substrate, and
a ring-shaped light-shielding film is formed on a concentric circle having the same center as the operating region on the outside of the inner region.
5 . The semiconductor light-receiving element according to claim 3 , wherein
the anti-reflection film is formed of a dielectric multilayer film.
6 . The semiconductor light-receiving element according to claim 1 , wherein
the similar shape having the same center as that of the operating region is a circular shape or an elliptical shape.