Method for manufacturing semiconductor device
A method for manufacturing a semiconductor device includes preparing a plurality of semiconductor elements each including a first surface on which a connection terminal is formed and a second surface on a side opposite to the first surface, preparing a support member in which a curable bonding adhesive layer is formed on a carrier, attaching the plurality of semiconductor elements to the support member such that the second surface of each of the plurality of semiconductor elements is directed toward the curable bonding adhesive layer, fixing the plurality of semiconductor elements to the support member by curing the curable bonding adhesive layer, encapsulating the plurality of semiconductor elements with an encapsulant material, and removing the carrier.
1 . A method for manufacturing a semiconductor device, comprising:
preparing a plurality of semiconductor elements each including a first surface on which a connection terminal is formed and a second surface on a side opposite to the first surface;
preparing a curable bonding adhesive layer and a carrier, wherein the curable bonding adhesive layer is formed on the carrier;
attaching the plurality of semiconductor elements to the curable bonding adhesive layer such that the second surface of each of the plurality of semiconductor elements is directed toward the curable bonding adhesive layer;
fixing the plurality of semiconductor elements to the curable bonding adhesive layer by curing the curable bonding adhesive layer;
encapsulating the plurality of semiconductor elements on the curable bonding adhesive layer with an encapsulant material after curing the curable bonding adhesive layer, so as to bond the encapsulant material to a surface of the cured curable bonding adhesive layer; and
removing the carrier by irradiating with laser, wherein the carrier is removed from the cured curable bonding adhesive layer,
wherein a bonding adhesive strength between the cured curable bonding adhesive layer and the encapsulant material is 4.0 MPa or more,
wherein a bonding adhesive strength of the cured curable bonding adhesive layer to the carrier is 1 MPa or more in the encapsulating, and
wherein a bonding adhesive strength of the cured curable bonding adhesive layer to the carrier is 5 MPa or less when the cured curable bonding adhesive layer is irradiated with the laser in the removing.
2 . The method for manufacturing a semiconductor device according to claim 1 ,
wherein the bonding adhesive strength between the cured curable bonding adhesive layer and the encapsulant material is 8.0 MPa or less.
3 . The method for manufacturing a semiconductor device according to claim 1 ,
wherein the bonding adhesive strength between the cured curable bonding adhesive layer and the encapsulant material is 20 MPa or more.
4 . The method for manufacturing a semiconductor device according to claim 1 ,
wherein a bonding adhesive strength between the cured curable bonding adhesive layer and the plurality of semiconductor elements is 4.0 MPa or more.
5 . The method for manufacturing a semiconductor device according to claim 1 ,
wherein the semiconductor device in a state in which the cured curable bonding adhesive layer protects the second surface of each of the plurality of semiconductor elements is acquired.
6 . The method for manufacturing a semiconductor device according to claim 1 ,
wherein the carrier is a glass substrate.
7 . The method for manufacturing a semiconductor device according to claim 1 ,
wherein the curable bonding adhesive layer includes a resin composition containing a thermoplastic resin and an epoxy curing agent, and a glass transition temperature of the thermoplastic resin is −40° C. or higher and 40° C. or lower.
8 . The method for manufacturing a semiconductor device according to claim 1 ,
wherein a thickness of the curable bonding adhesive layer is 1 μm or more and 400 μm or less after curing.
9 . The method for manufacturing a semiconductor device according to claim 1 ,
wherein the carrier is a glass substrate or a transparent resin substrate, and a thickness thereof is 0.1 mm or more and 2.0 mm or less.
10 . The method for manufacturing a semiconductor device according to claim 1 , further comprising:
grinding an encapsulant material layer encapsulating the plurality of semiconductor elements in a state in which the plurality of semiconductor elements are fixed to the curable bonding adhesive layer.
11 . The method for manufacturing a semiconductor device according to claim 1 , further comprising:
forming a re-distribution layer on the first surface of the plurality of semiconductor elements in a state in which the plurality of semiconductor elements are fixed to the curable bonding adhesive layer.
12 . The method for manufacturing a semiconductor device according to claim 1 , further comprising:
attaching a solder ball to the connection terminal of the plurality of semiconductor elements or the re-distribution layer in a state in which the plurality of semiconductor elements are fixed to the curable bonding adhesive layer.
13 . The method for manufacturing a semiconductor device according to claim 1 ,
wherein the carrier is a light transmissive substrate, and the curable bonding adhesive layer includes a light absorbing agent, and
in the removing of the carrier, the carrier is removed by irradiating the cured curable bonding adhesive layer with laser light from the carrier side.
14 . The method for manufacturing a semiconductor device according to claim 1 ,
wherein in the removing of the carrier, the carrier is removed by applying laser light such that peeling energy for peeling off the carrier is 1 kW/cm 2 or more and 200 kW/cm 2 or less.
15 . The method for manufacturing a semiconductor device according to claim 1 , further comprising:
cleaning an exposed surface of either the cured curable bonding adhesive layer or the encapsulant material layer of the encapsulant material after the removing of the carrier.
16 . The method for manufacturing a semiconductor device according to claim 1 , further comprising:
singulating the plurality of semiconductor elements after the removing of the carrier.
17 . The method for manufacturing a semiconductor device according to claim 16 ,
wherein in the singulating of the plurality of semiconductor elements, the cured curable bonding adhesive layer is singulated together with the plurality of semiconductor elements, and
wherein the semiconductor device is acquired from each of the plurality of semiconductor elements in which the second surface is protected by the cured curable bonding adhesive layer.
18 . The method for manufacturing a semiconductor device according to claim 1 ,
wherein, in the attaching of the plurality of semiconductor elements, a plurality of electronic components are attached to the curable bonding adhesive layer together with the plurality of semiconductor elements, and
wherein, in the fixing of the plurality of semiconductor elements, the plurality of electronic components are fixed to the curable bonding adhesive layer by curing the curable bonding adhesive layer.
19 . The method for manufacturing a semiconductor device according to claim 11 ,
wherein, when the removing the carrier, the cured curable bonding adhesive layer contacts and covers:
a surface of the encapsulant material which is opposite to the re-distribution layer, and
the second surface of each of the plurality of semiconductor elements.