CARRIER-ATTACHED METAL FOIL AND METHOD FOR PRODUCING SAME
There is provided a carrier-attached metal foil in which the metal layer is less likely to be released at the ends of the carrier-attached metal foil or in the cutting place(s) of a downsized carrier-attached metal foil, and moreover a decrease in the strength of the carrier is effectively suppressed. This carrier-attached metal foil includes a carrier; a release layer provided on the carrier; and a metal layer having a thickness of 0.01 μm or more and 4.0 μm or less provided on the release layer. The carrier has a flat region having a developed interfacial area ratio Sdr of less than 5%, and an uneven region having a developed interfacial area ratio Sdr of 5% or more and 39% or less, on at least a surface on the metal layer side, and the uneven region is provided in a linear pattern surrounding the flat region.
1 . A carrier-attached metal foil comprising:
a carrier;
a release layer provided on the carrier; and
a metal layer having a thickness of 0.01 μm or more and 4.0 μm or less provided on the release layer,
wherein the carrier has a flat region having a developed interfacial area ratio Sdr of less than 5% as measured in accordance with ISO 25178, and an uneven region having a developed interfacial area ratio Sdr of 5% or more and 39% or less as measured in accordance with ISO 25178, on at least a surface on the metal layer side, and wherein the uneven region is provided in a linear pattern surrounding the flat region.
2 . The carrier-attached metal foil according to claim 1 , wherein the carrier has a micro-Vickers hardness of 500 HV or more and 3000 HV or less.
3 . The carrier-attached metal foil according to claim 1 , wherein
the carrier has a plurality of the flat regions, and wherein the uneven region is provided in a linear pattern defining the flat regions.
4 . The carrier-attached metal foil according to claim 1 , wherein an outermost surface of the metal layer has a flat shape corresponding to a surface shape of the flat region of the carrier, and an uneven shape corresponding to a surface shape of the uneven region of the carrier.
5 . The carrier-attached metal foil according to claim 1 , wherein the metal layer is composed of at least one metal selected from the group consisting of Cu, Au, and Pt.
6 . The carrier-attached metal foil according to claim 1 , further comprising an intermediate layer between the carrier and the release layer, the intermediate layer comprising at least one metal selected from the group consisting of Cu, Ti, Al, Nb, Zr, Cr, W, Ta, Co, Ag, Ni, In, Sn, Zn, Ga, and Mo.
7 . The carrier-attached metal foil according to claim 1 , further comprising a functional layer between the release layer and the metal layer, the functional layer being composed of at least one metal selected from the group consisting of Ti, Al, Nb, Zr, Cr, W, Ta, Co, Ag, Ni, and Mo.
8 . The carrier-attached metal foil according to claim 1 , wherein the carrier is glass comprising SiO 2 .
9 . The carrier-attached metal foil according to claim 1 , wherein the carrier is composed of at least one glass selected from the group consisting of quartz glass, borosilicate glass, alkali-free glass, soda lime glass, and aluminosilicate glass.
10 . The carrier-attached metal foil according to claim 1 , wherein a ratio of an area of the uneven region to a total area of the flat region and the uneven region of the carrier is 0.01 or more and 0.5 or less.
11 . The carrier-attached metal foil according to claim 1 , wherein the carrier in the uneven region has a release strength of 20 gf/cm or more and 3000 gf/cm or less.
12 . A method for manufacturing the carrier-attached metal foil according to claim 1 , comprising:
providing a carrier in which at least one surface is a flat surface having a developed interfacial area ratio Sdr of less than 5% as measured in accordance with ISO 25178;
performing roughening treatment on at least an outer peripheral portion of a surface of the carrier to form an uneven region having a developed interfacial area ratio Sdr of 5% or more and 39% or less as measured in accordance with ISO 25178 in a linear pattern;
forming a release layer on the carrier; and
forming a metal layer having a thickness of 0.01 μm or more and 4.0 μm or less on the release layer.
13 . The manufacturing method according to claim 12 , wherein the roughening treatment is performed on the surface of the carrier so that the uneven region forms a linear pattern defining a plurality of regions.
14 . The manufacturing method according to claim 12 , wherein the roughening treatment is performed under conditions in which when the roughening treatment is performed on a region in a frame form having a width of 11 mm and constituting an outer peripheral portion of a surface of an untreated carrier of 300 mm square, an average breaking load of a carrier subjected to the roughening treatment is 61% or more and 120% or less of an average breaking load of the untreated carrier, and
wherein the untreated carrier of 300 mm square is the same as the carrier except that the untreated carrier is free from the uneven region and may have a different planar view shape and/or a different size.
15 . The manufacturing method according to claim 12 , wherein the roughening treatment is a blasting treatment.
16 . The manufacturing method according to claim 15 , wherein the blasting treatment comprises projecting a medium having a particle diameter of 7 μm or more and 50 μm or less onto the carrier from a nozzle having a width of 0.1 mm or more and 20 mm or less and a length of 100 mm or more and 1000 mm or less at a discharge pressure of 0.01 MPa or more and 0.80 MPa or less.
17 . The manufacturing method according to claim 16 , wherein the medium is provided in a form of a slurry, and wherein the projecting the medium is performed by discharging the slurry from the nozzle using pressurized air.
18 . The manufacturing method according to claim 15 , wherein a blasting treatment time per unit area for the carrier is 0.03 seconds/cm 2 or more and 10 seconds/cm 2 or less.
19 . A method for manufacturing a carrier-attached metal foil, comprising cutting the carrier-attached metal foil according to claim 1 in the uneven region according to the pattern so that the carrier-attached metal foil is divided into pieces.