Multi-channel light source for projection optics heating
Systems, apparatuses, and methods are provided for heating a plurality of optical components. An example method can include receiving an input radiation beam from a radiation source. The example method can further include generating a plurality of output radiation beams based on the input radiation beam. The example method can further include transmitting the plurality of output radiation beams towards a plurality of heater head optics configured to heat the plurality of optical components. Optionally, the example method can further include controlling a respective power value, and realizing a flat-top far-field profile, of each of the plurality of output radiation beams.
1 . A system, comprising:
a radiation redistribution system configured to provide radiation to heat a plurality of mirrors, wherein the radiation redistribution system comprises:
an optical input channel configured to receive an input radiation beam from a radiation source;
a radiation splitting system configured to generate a plurality of output radiation beams based on the input radiation beam;
a plurality of optical output channels configured to transmit the plurality of output radiation beams towards a plurality of heater head optics configured to heat the plurality of mirrors,
wherein the plurality of heater head optics comprises:
a plurality of preheaters configured to thermally condition one or more mirrors of the plurality of mirrors when not exposed to EUV radiation, and
a plurality of sector heaters configured to thermally condition the one or more mirrors of the plurality of mirrors during and/or after exposure to EUV radiation; and
a controller coupled to the plurality of preheaters and the plurality of sector heaters to control operation of the respective thermal conditioning.
2 . The system of claim 1 , wherein the optical input channel consists essentially of a single input fiber.
3 . The system of claim 1 , wherein the radiation splitting system comprises a multi-mode fiber coupler.
4 . The system of claim 3 , wherein the radiation splitting system comprises a fixed ratio coupler.
5 . The system of claim 3 , wherein the radiation splitting system comprises a variable ratio coupler.
6 . The system of claim 1 , wherein the radiation splitting system comprises a beam splitter.
7 . The system of claim 1 , wherein the radiation redistribution system further comprises a plurality of power control devices configured to control a respective power value of each of the plurality of output radiation beams.
8 . The system of claim 7 , wherein the plurality of power control devices comprises a plurality of variable optical attenuators.
9 . The system of claim 1 , wherein the radiation redistribution system further comprises a despeckler device.
10 . The system of claim 1 , wherein each one of the plurality of preheaters corresponds to a given one of the plurality of the mirrors.
11 . The system of claim 1 , wherein the plurality of sector heaters thermally condition plural sectors at a back side of each of the plurality of mirrors.
12 . An apparatus, comprising:
an optical input channel configured to receive an input radiation beam from a radiation source;
a set of radiation splitting devices configured to generate a plurality of output radiation beams based on the input radiation beam; and
a plurality of optical output channels configured to transmit the plurality of output radiation beams towards a plurality of heater head optics configured to heat a plurality of mirrors,
wherein the plurality of heater head optics comprises:
a plurality of preheaters configured to thermally condition one or more mirrors of the plurality of mirrors when not exposed to EUV radiation, and
a plurality of sector heaters configured to thermally condition the one or more mirrors of the plurality of mirrors during and/or after exposure to EUV radiation; and
a controller coupled to the plurality of preheaters and the plurality of sector heaters to control operation of the respective thermal conditioning.
13 . The apparatus of claim 12 , wherein the optical input channel consists essentially of a single input fiber.
14 . The apparatus of claim 12 , wherein the set of radiation splitting devices comprises a multi-mode fiber coupler.
15 . The apparatus of claim 14 , wherein the set of radiation splitting devices comprises a fixed ratio coupler.
16 . The apparatus of claim 14 , wherein the set of radiation splitting devices comprises a variable ratio coupler.
17 . The apparatus of claim 12 , wherein the set of radiation splitting devices comprises a beam splitter.
18 . The apparatus of claim 12 , wherein the apparatus further comprises a plurality of power control devices configured to control a respective power value of each of the plurality of output radiation beams.
19 . The apparatus of claim 18 , wherein the plurality of power control devices comprises a plurality of variable optical attenuators.
20 . The apparatus of claim 12 , wherein the apparatus further comprises a despeckler device.
21 . The apparatus of claim 12 , wherein each one of the plurality of preheaters corresponds to a given one of the plurality of the mirrors.
22 . The apparatus of claim 12 , wherein the plurality of sector heaters thermally condition plural sectors at a back side of each of the plurality of mirrors.
23 . A method, comprising:
receiving, by an optical input channel, an input radiation beam from a radiation source;
generating, by a set of radiation splitting devices, a plurality of output radiation beams based on the input radiation beam;
transmitting, by a plurality of optical output channels, the plurality of output radiation beams towards a plurality of heater head optics configured to heat a plurality of mirrors, wherein the plurality of heater head optics comprises a plurality of preheaters and a plurality of sector heaters;
controlling the plurality of preheaters to thermally condition one or more mirrors of the plurality of mirrors when not exposed to EUV radiation; and
controlling the plurality of sector heaters to thermally condition the one or more mirrors of the plurality of mirrors during and/or after exposure to EUV radiation.
24 . The method of claim 23 , further comprising controlling, by a plurality of power control devices, a respective power value of each of the plurality of output radiation beams.