Electrostatic chuck
An electrostatic chuck according to the present disclosure includes a plate-shaped body including an adsorption surface for mounting a workpiece, a base, and an electrode film located between the plate-shaped body and the base. The plate-shaped body and the base are made of sapphire. The angle between the adsorption surface and the c-plane of the sapphire is 45° or more.
1 . An electrostatic chuck comprising:
a plate-shaped body comprising an adsorption surface for mounting a workpiece;
a base; and
an electrode film located between the plate-shaped body and the base, wherein
the plate-shaped body and the base are made of sapphire, the plate-shaped body and the base face each other, a c-axis of the sapphire forming the plate-shaped body and a c-axis of the sapphire forming the base being not parallel to each other, and
an angle between the adsorption surface and a c-plane of the sapphire is 45° or more.
2 . The electrostatic chuck according to claim 1 , wherein
a thickness of the base is greater than a thickness of the plate-shaped body.
3 . The electrostatic chuck according to claim 1 , wherein
the electrode film has translucency.