SINGLE PHOTON DETECTION ELEMENT, ELECTRONIC DEVICE, AND LiDAR DEVICE
Disclosed is a single photon detection device that comprises a first well, a heavily doped region provided on the first well, a guard ring provided on a side surface of the heavily doped region, and an insulating pattern inserted into the guard ring. The first well has a first conductivity type. The heavily doped region and the guard ring have a second conductivity type different from the first conductivity type.
1 . A single photon detection device comprising:
a first well;
a heavily doped region provided on the first well;
a guard ring provided on a side surface of the heavily doped region; and
an insulating pattern inserted into the guard ring,
wherein the first well has a first conductivity type,
wherein the heavily doped region and the guard ring have a second conductivity type different from the first conductivity type.
2 . The single photon detection device of claim 1 , wherein the insulating pattern is apart from the heavily doped region by the guard ring.
3 . The single photon detection device of claim 1 , wherein the guard ring is in contact with the heavily doped region.
4 . The single photon detection device of claim 1 , further comprising:
a second well provided between the first well and the heavily doped region,
wherein the second well has the first conductivity type.
5 . The single photon detection device of claim 4 , wherein the guard ring extends to a side surface of the second well.
6 . The single photon detection device of claim 4 , wherein a bottom surface of the guard ring is located at a depth between a bottom surface and an top surface of the second well.
7 . The single photon detection device of claim 4 , wherein the second well extends onto the bottom surface of the guard ring.
8 . The single photon detection device of claim 4 , wherein a bottom surface of the second well is located at a depth between an top surface and a bottom surface of the guard ring.
9 . The single photon detection device of claim 4 , wherein the heavily doped region protrudes from a side surface of the second well.
10 . The single photon detection device of claim 4 ,
wherein a side surface of the heavily doped region and a side surface of the second well directly adjacent to the side surface of the heavily doped region form a coplanar surface.
11 . The single photon detection device of claim 1 , further comprising:
a contact provided on the opposite side of the heavily doped region with the guard ring interposed therebetween,
wherein the contact has the first conductivity type.
12 . The single photon detection device of claim 11 , further comprising:
an isolation region provided on the opposite side of the guard ring with the contact interposed therebetween.
13 . An electronic device comprising:
a single photon detection device including a first well, a heavily doped region provided on the first well, a guard ring provided on a side surface of the heavily doped region, and an insulating pattern inserted into the guard ring,
wherein the first well has a first conductivity type, and the heavily doped region and the guard ring have a second conductivity type different from the first conductivity type.
14 . A LiDAR device comprising:
a electronic devices including a single photon detection element,
wherein the single photon detection device includes a first well, a heavily doped region provided on the first well, a guard ring provided on a side surface of the heavily doped region, and an insulating pattern inserted into the guard ring,
wherein the first well has a first conductivity type, and the heavily doped region and the guard ring have a second conductivity type different from the first conductivity type.