IP Library Granted Patent US 12,461,380
Granted Patent B2
US 12,461,380 · App. 18/311,097 · Granted Nov 4, 2025

Antireflection coatings for metasurfaces

Inventors: Dianmin Lin (Los Altos, CA); Michael Anthony Klug (Austin, TX); Pierre St. Hilaire (Belmont, CA); Mauro Melli (San Leandro, CA); Christophe Peroz (Tokyo, JP); Evgeni Poliakov (Oakland, CA)
Assignee: Magic Leap, Inc.
G02B27/4205G02B1/002G02B1/111G02B5/1847G02B27/0093G02B27/0172G02B27/4272G02B2027/014G02B2027/0174G02B2027/0178G02B2027/0185G02B2207/101
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,461,380
App. No.
18/311,097
Granted
Nov 4, 2025
Kind
B2
Abstract

Antireflection coatings for metasurfaces are described herein. In some embodiments, the metasurface may include a substrate, a plurality of nanostructures thereon, and an antireflection coating disposed over the nanostructures. The antireflection coating may be a transparent polymer, for example a photoresist layer, and may have a refractive index lower than the refractive index of the nanostructures and higher than the refractive index of the overlying medium (e.g., air). Advantageously, the antireflection coatings may reduce or eliminate ghost images in an augmented reality display in which the metasurface is incorporated.

Claims (32)

1 . An optical system comprising:

an optical element comprising a metasurface that includes a plurality of nanostructures forming repeating unit cells, wherein, as seen in a top-down view, each unit cell comprises:

a plurality of spaced-apart first nanostructures, each of the first nanostructures comprising:

a first length; and

a first width,

wherein the first length is longer than the first width,

wherein the first length extends in a first direction and the first width extends in a second direction,

wherein the second direction crosses the first direction,

wherein the first widths of different ones of the plurality of spaced-apart first nanostructures differ from one another, wherein the first nanostructures are separated from each other by a gap along the first lengths of the first nanostructures; and

a plurality of spaced-apart second nanostructures disposed at a side of the plurality of spaced-apart first nanostructures, each of the second nanostructures comprising: having

a second length extending in the second direction; and

a second width extending in the first direction,

wherein the second widths of different ones of the plurality of spaced-apart second nanostructures differ from one another, and

wherein the second nanostructures are separated from each other by a gap along the second lengths of the second nanostructures,

wherein the second direction crosses the first direction; and

an antireflection coating for the optical element comprising the metasurface, the antireflection coating comprising:

a layer of an optically transparent material having a refractive index greater than 1 and less than a refractive index of a material comprising the metasurface,

wherein the layer of the optically transparent material is conformally disposed over the nanostructures of the metasurface to follow contours of the nanostructures without completely filling volumes separating each of the nanostructures such that a top surface of the optical element is non-planar, and wherein the unfilled volumes that separate the first nanostructures from the second nanostructures are of a different volume from the unfilled volumes that separate the first nanostructures or that separate the second nanostructures.

2 . The optical system of claim 1 , wherein the optically transparent material comprises a polymer.

3 . The optical system of claim 1 , wherein the optically transparent material comprises photoresist.

4 . The optical system of claim 1 , wherein the optically transparent material has a refractive index from about 1.2 to about 2.

5 . The optical system of claim 1 , wherein a distance from a topmost surface of the metasurface to a topmost surface of the antireflection coating is from about 10 nm to about 1 micron.

6 . The optical system of claim 1 , wherein the antireflection coating reduces an amount of incident light reflected by the metasurface by more than about 50% as compared to an amount of incident light reflected by a substantially similar metasurface that does not include the antireflection coating.

7 . The optical system of claim 6 , wherein the incident light has an incident angle from about −20° to 20°.

8 . The optical system of claim 1 , wherein the antireflection coating has a thickness configured to provide destructive interference between light reflecting off a top surface of the antireflection coating and light reflecting off a bottom surface of the antireflection coating.

9 . The optical system of claim 1 , wherein the metasurface comprises a diffraction grating.

10 . The optical system of claim 1 , wherein the metasurface comprises an asymmetric diffraction grating.

11 . The optical system of claim 1 , wherein the metasurface comprises a Pancharatnam-Berry phase optical element (PBOE).

12 . The optical system of claim 1 , wherein the metasurface comprises multi-tier nanostructures.

13 . The optical system of claim 1 , further comprising a waveguide, wherein the optical element is formed on or in the waveguide.

14 . The optical system of claim 13 , wherein the optical element is an incoupling optical element.

15 . The optical system of claim 13 , wherein the waveguide comprises an optically transmissive substrate, and wherein the metasurface overlies the substrate.

Assignments (2)
SECURITY INTEREST Recorded Oct 15, 2025
From: MAGIC LEAP, INC.; MENTOR ACQUISITION ONE, LLC; MOLECULAR IMPRINTS, INC.
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 073109/0238 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 2, 2023
From: LIN, DIANMIN; KLUG, MICHAEL ANTHONY; ST. HILAIRE, PIERRE; MELLI, MAURO; PEROZ, CHRISTOPHE; POLIAKOV, EVGENI
To: MAGIC LEAP, INC.
Reel/Frame 063512/0200 →
Continuity (3)
Division 15879005 · Jan 24, 2018
Provisional Application 62451587 · Jan 27, 2017
Related Publication 20230273450A1 · Aug 31, 2023
References Cited (284)
US 5995285A · Unno · 1999 [cited by applicant]
US 6122103A · Perkins et al. · 2000 [cited by applicant]
US 6850221B1 · Tickle · 2005 [cited by applicant]
US 7542209B2 · McGuire, Jr. · 2009 [cited by applicant]
US 7570424B2 · Perkins et al. · 2009 [cited by applicant]
US 7573640B2 · Nivon et al. · 2009 [cited by applicant]
US 7905650B2 · Ma et al. · 2011 [cited by applicant]
US 7916390B2 · Himel et al. · 2011 [cited by applicant]
US 7961393B2 · Perkins et al. · 2011 [cited by applicant]
US 7991257B1 · Coleman · 2011 [cited by applicant]
US 8047653B2 · Akahane et al. · 2011 [cited by applicant]
US 8206618B2 · Moriyama et al. · 2012 [cited by applicant]
US 8279737B2 · Miyasaka et al. · 2012 [cited by applicant]
US 8467643B2 · Iizuka et al. · 2013 [cited by applicant]
US 8917447B2 · Wolk et al. · 2014 [cited by applicant]
US 8950867B2 · Macnamara · 2015 [cited by applicant]
US 9081426B2 · Armstrong · 2015 [cited by applicant]
US 9176065B2 · Bond et al. · 2015 [cited by applicant]
US 9188717B2 · Nishiwaki · 2015 [cited by applicant]
US 9215293B2 · Miller · 2015 [cited by applicant]
US 9310559B2 · Macnamara · 2016 [cited by applicant]
US 9348143B2 · Gao et al. · 2016 [cited by applicant]
US D758367S · Natsume · 2016 [cited by applicant]
US 9417452B2 · Schowengerdt et al. · 2016 [cited by applicant]
US 9470819B2 · Ren et al. · 2016 [cited by applicant]
US 9470906B2 · Kaji et al. · 2016 [cited by applicant]
US 9547174B2 · Gao et al. · 2017 [cited by applicant]
US 9568730B2 · Yamada et al. · 2017 [cited by applicant]
US 9625717B2 · Sunnari et al. · 2017 [cited by applicant]
US 9671566B2 · Abovitz et al. · 2017 [cited by applicant]
US 9740006B2 · Gao · 2017 [cited by applicant]
US 9791700B2 · Schowengerdt · 2017 [cited by applicant]
US 9799853B2 · Lamansky et al. · 2017 [cited by applicant]
US 9851563B2 · Gao et al. · 2017 [cited by applicant]
US 9857591B2 · Welch et al. · 2018 [cited by applicant]
US 9874749B2 · Bradski et al. · 2018 [cited by applicant]
US 9880328B2 · Gollier et al. · 2018 [cited by applicant]
US 9887459B2 · Casciato et al. · 2018 [cited by applicant]
US 10025009B2 · Yamada et al. · 2018 [cited by applicant]
US 10254454B2 · Klug et al. · 2019 [cited by applicant]
US 10371951B2 · Rolland et al. · 2019 [cited by applicant]
US 10409059B2 · Mason · 2019 [cited by applicant]
US 10466394B2 · Lin et al. · 2019 [cited by applicant]
US 10527851B2 · Lin et al. · 2020 [cited by applicant]
US 10690826B2 · Klug et al. · 2020 [cited by applicant]
US 11211544B2 · Ubachs et al. · 2021 [cited by applicant]
US 11231544B2 · Lin et al. · 2022 [cited by applicant]
US 11243338B2 · Lin et al. · 2022 [cited by applicant]
US 11366296B2 · Devlin et al. · 2022 [cited by applicant]
US 11681153B2 · Lin et al. · 2023 [cited by applicant]
US 20040233534A1 · Nakanishi et al. · 2004 [cited by applicant]
US 20040263981A1 · Coleman · 2004 [cited by applicant]
US 20050161589A1 · Kim et al. · 2005 [cited by applicant]
US 20060028436A1 · Armstrong · 2006 [cited by applicant]
US 20060056166A1 · Yeo et al. · 2006 [cited by applicant]
US 20060119937A1 · Perkins et al. · 2006 [cited by applicant]
US 20060119951A1 · McGuire · 2006 [cited by applicant]
US 20060126179A1 · Levola · 2006 [cited by applicant]
US 20060126699A1 · Kaneda · 2006 [cited by applicant]
US 20060154044A1 · Yamada et al. · 2006 [cited by applicant]
US 20060221448A1 · Nivon et al. · 2006 [cited by applicant]
US 20060240232A1 · Faris · 2006 [cited by applicant]
US 20070081123A1 · Lewis · 2007 [cited by applicant]
US 20070188837A1 · Shimizu et al. · 2007 [cited by applicant]
US 20070211337A1 · Himel et al. · 2007 [cited by applicant]
US 20070229955A1 · Kawamura et al. · 2007 [cited by applicant]
US 20080043302A1 · Park et al. · 2008 [cited by applicant]
US 20080176041A1 · Sato et al. · 2008 [cited by applicant]
US 20080225391A1 · Walter et al. · 2008 [cited by applicant]
US 20080278811A1 · Perkins et al. · 2008 [cited by applicant]
US 20090154871A1 · Pyo et al. · 2009 [cited by applicant]
US 20090184297A1 · Moriyama et al. · 2009 [cited by applicant]
US 20100039707A1 · Akahane et al. · 2010 [cited by applicant]
US 20100054662A1 · Hofrichter et al. · 2010 [cited by applicant]
US 20100157400A1 · Dimov et al. · 2010 [cited by applicant]
US 20100232017A1 · McCarthy et al. · 2010 [cited by applicant]
US 20110069727A1 · Reid et al. · 2011 [cited by applicant]
US 20110141541A1 · Bratkovski · 2011 [cited by applicant]
US 20110141873A1 · Miyasaka et al. · 2011 [cited by applicant]
US 20110166045A1 · Dhawan et al. · 2011 [cited by applicant]
US 20110170184A1 · Wolk · 2011 [cited by applicant]
US 20110268145A1 · Kikuta et al. · 2011 [cited by applicant]
US 20110315988A1 · Yu et al. · 2011 [cited by applicant]
US 20120013989A1 · Choi et al. · 2012 [cited by applicant]
US 20120099817A1 · Quan et al. · 2012 [cited by applicant]
US 20120127062A1 · Bar-Zeev et al. · 2012 [cited by applicant]
US 20120162549A1 · Gao et al. · 2012 [cited by applicant]
US 20120287767A1 · Miyasaka et al. · 2012 [cited by applicant]
US 20130082922A1 · Miller · 2013 [cited by applicant]
US 20130105438A1 · Zhu et al. · 2013 [cited by applicant]
US 20130117377A1 · Miller · 2013 [cited by applicant]
US 20130125027A1 · Abovitz · 2013 [cited by applicant]
US 20130176554A1 · Loncar et al. · 2013 [cited by applicant]
US 20130208234A1 · Lewis · 2013 [cited by applicant]
US 20130208332A1 · Yu et al. · 2013 [cited by applicant]
US 20130242262A1 · Lewis · 2013 [cited by applicant]
US 20130264470A1 · Nishiwaki · 2013 [cited by applicant]
US 20140043689A1 · Mason · 2014 [cited by applicant]
US 20140063585A1 · Hagoplan et al. · 2014 [cited by applicant]
US 20140064655A1 · Nguyen et al. · 2014 [cited by applicant]
US 20140071539A1 · Gao · 2014 [cited by applicant]
US 20140140653A1 · Brown et al. · 2014 [cited by applicant]
US 20140146390A1 · Kaempfe et al. · 2014 [cited by applicant]
US 20140167022A1 · Huh et al. · 2014 [cited by applicant]
US 20140177023A1 · Gao et al. · 2014 [cited by applicant]
US 20140204438A1 · Yamada et al. · 2014 [cited by applicant]
US 20140218468A1 · Gao et al. · 2014 [cited by applicant]
US 20140233126A1 · Ye et al. · 2014 [cited by applicant]
US 20140264998A1 · Smith et al. · 2014 [cited by applicant]
US 20140267420A1 · Schowengerdt et al. · 2014 [cited by applicant]
US 20140272295A1 · Deshpande et al. · 2014 [cited by applicant]
US 20140306866A1 · Miller et al. · 2014 [cited by applicant]
US 20140333926A1 · Bond et al. · 2014 [cited by applicant]
US 20150016777A1 · Abovitz et al. · 2015 [cited by applicant]
US 20150040978A1 · Shalaev et al. · 2015 [cited by applicant]
US 20150103306A1 · Kaji et al. · 2015 [cited by applicant]
US 20150116721A1 · Kats et al. · 2015 [cited by applicant]
US 20150167921A1 · Gollier et al. · 2015 [cited by applicant]
US 20150178939A1 · Bradski et al. · 2015 [cited by applicant]
US 20150205034A1 · Fäcke et al. · 2015 [cited by applicant]
US 20150205126A1 · Schowengerdt · 2015 [cited by applicant]
US 20150219806A1 · Arbabi et al. · 2015 [cited by applicant]
US 20150219807A1 · Lochbihler · 2015 [cited by applicant]
US 20150219842A1 · Sqalli et al. · 2015 [cited by applicant]
US 20150222883A1 · Welch · 2015 [cited by applicant]
US 20150222884A1 · Cheng · 2015 [cited by applicant]
US 20150248158A1 · Schowengerdt · 2015 [cited by applicant]
US 20150253570A1 · Sunnari et al. · 2015 [cited by applicant]
US 20150268415A1 · Schowengerdt et al. · 2015 [cited by applicant]
US 20150277117A1 · Yamada et al. · 2015 [cited by applicant]
US 20150302652A1 · Miller et al. · 2015 [cited by applicant]
US 20150309263A2 · Abovitz et al. · 2015 [cited by applicant]
US 20150326570A1 · Publicover et al. · 2015 [cited by applicant]
US 20150346490A1 · TeKolste et al. · 2015 [cited by applicant]
US 20150346495A1 · Welch et al. · 2015 [cited by applicant]
US 20160004679A1 · Grimm · 2016 [cited by applicant]
US 20160011419A1 · Gao · 2016 [cited by applicant]
US 20160025626A1 · Fegadolli et al. · 2016 [cited by applicant]
US 20160025914A1 · Brongersma et al. · 2016 [cited by applicant]
US 20160026253A1 · Bradski et al. · 2016 [cited by applicant]
US 20160061993A1 · Ren et al. · 2016 [cited by applicant]
US 20160077261A1 · Arbabi et al. · 2016 [cited by applicant]
US 20160110920A1 · Schowengerdt · 2016 [cited by applicant]
US 20160154044A1 · Bertness · 2016 [cited by applicant]
US 20160197311A1 · Lamansky et al. · 2016 [cited by applicant]
US 20160306079A1 · Arbabi et al. · 2016 [cited by applicant]
US 20170010488A1 · Klug et al. · 2017 [cited by applicant]
US 20170131460A1 · Lin et al. · 2017 [cited by applicant]
US 20170235144A1 · Piskunov et al. · 2017 [cited by applicant]
US 20170322418A1 · Lin et al. · 2017 [cited by applicant]
US 20180045953A1 · Fan et al. · 2018 [cited by applicant]
US 20180113310A1 · Rolland · 2018 [cited by examiner]
US 20180156949A1 · Tsai et al. · 2018 [cited by applicant]
US 20180341090A1 · Devlin et al. · 2018 [cited by applicant]
US 20190206136A1 · West et al. · 2019 [cited by applicant]
US 20200142110A1 · Lin et al. · 2020 [cited by applicant]
US 20200150437A1 · Lin et al. · 2020 [cited by applicant]
US 20200333609A1 · Leister et al. · 2020 [cited by applicant]
US 20210341661A1 · Klug et al. · 2021 [cited by applicant]
US 20230273450A1 · Lin et al. · 2023 [cited by applicant]
US 20230417980A1 · Lin et al. · 2023 [cited by applicant]
US 20230418074A1 · Lin et al. · 2023 [cited by applicant]
CN 101177237A · 2008 [cited by applicant]
CN 101556356A · 2009 [cited by applicant]
CN 102112898A · 2011 [cited by applicant]
CN 103620478A · 2014 [cited by applicant]
CN 104659179A · 2015 [cited by applicant]
CN 104956148A · 2015 [cited by applicant]
CN 105374918A · 2016 [cited by applicant]
CN 111399107A · 2020 [cited by applicant]
EP 3452301A1 · 2019 [cited by applicant]
GB 1588370A · 1981 [cited by applicant]
JP S60140204A · 1985 [cited by applicant]
JP S6286307A · 1987 [cited by applicant]
JP H06347630A · 1994 [cited by applicant]
JP 10020106A · 1998 [cited by applicant]
JP H11295524A · 1999 [cited by applicant]
JP 2001264527A · 2001 [cited by applicant]
JP 2003502708A · 2003 [cited by applicant]
JP 2003344630A · 2003 [cited by applicant]
JP 2005018061A · 2005 [cited by applicant]
JP 2006320807A · 2006 [cited by applicant]
JP 2006337758A · 2006 [cited by applicant]
JP 2007033558A · 2007 [cited by applicant]
JP 2007079608A · 2007 [cited by applicant]
JP 2007265581A · 2007 [cited by applicant]
JP 2008511874A · 2008 [cited by applicant]
JP 2008523422A · 2008 [cited by applicant]
JP 2008535032A · 2008 [cited by applicant]
JP 2009506347A · 2009 [cited by applicant]
JP 2009169214A · 2009 [cited by applicant]
JP 2009169213A · 2009 [cited by applicant]
JP 2009192979A · 2009 [cited by applicant]
JP 2009288718A · 2009 [cited by applicant]
JP 2010139621A · 2010 [cited by applicant]
JP 2012027221A · 2012 [cited by applicant]
JP 2012510637A · 2012 [cited by applicant]
JP 2012230246A · 2012 [cited by applicant]
JP 2012256055A · 2012 [cited by applicant]
JP WO2011001641A1 · 2012 [cited by applicant]
JP 2014142386A · 2014 [cited by applicant]
JP 2015049376A · 2015 [cited by applicant]
JP 2015105990A · 2015 [cited by applicant]
JP 2015524935A · 2015 [cited by applicant]
JP 2015166861A · 2015 [cited by applicant]
JP 2015194551A · 2015 [cited by applicant]
JP 2015534117A · 2015 [cited by applicant]
JP 2016527571A · 2016 [cited by applicant]
JP 2017500605A · 2017 [cited by applicant]
JP 2018514803A · 2018 [cited by applicant]
JP 2018519542A · 2018 [cited by applicant]
JP 2018536204A · 2018 [cited by applicant]
JP 2020507112A · 2020 [cited by applicant]
JP 2021509727A · 2021 [cited by applicant]
KR 1020150043391A · 2015 [cited by applicant]
KR 101556356B1 · 2015 [cited by applicant]
TW 201530195A · 2015 [cited by applicant]
TW 201546580A · 2015 [cited by applicant]
WO 2000079317A1 · 2000 [cited by applicant]
WO 2006041596A2 · 2006 [cited by applicant]
WO 2006063049A1 · 2006 [cited by applicant]
WO 2006106501A1 · 2006 [cited by applicant]
WO 2007089073A1 · 2007 [cited by applicant]
WO 2008056577A1 · 2008 [cited by applicant]
WO 2010039301A2 · 2010 [cited by applicant]
WO 2012004644A1 · 2012 [cited by applicant]
WO 2013162609A1 · 2013 [cited by applicant]
WO 2014044912A1 · 2014 [cited by applicant]
WO 2015023536A1 · 2015 [cited by applicant]
WO 2015081313A2 · 2015 [cited by applicant]
WO 2016161175A1 · 2016 [cited by applicant]
WO 2016168173A1 · 2016 [cited by applicant]
WO 2016205249A1 · 2016 [cited by applicant]
WO 2016205256A1 · 2016 [cited by applicant]
WO 2017079480A1 · 2017 [cited by applicant]
WO 2017193012A1 · 2017 [cited by applicant]
WO 2018140502A1 · 2018 [cited by applicant]
WO 2018140651A1 · 2018 [cited by applicant]
Aieta, F. et al., “Multiwavelength achromatic metasurfaces by dispersive phase compensation,” Science, vol. 347, Issue 6228, Mar. 20, 2015, in 5 pages. URL: www.sciencemag.org. [cited by applicant]
Arbabi, A. et al., “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nature Nanotechnology, published online Aug. 31, 2015, in 8 pages.… [cited by applicant]
ARToolKit: https://web.archive.org/web/20051013062315/http://www.hitl.washington.edu:80/artoolkit/documentation/hardware.htm, archived Oct. 13, 2005. [cited by applicant]
Azuma, “A Survey of Augmented Reality,” Teleoperators and Virtual Environments 6, 4 (Aug. 1997), pp. 355-385. https://web.archive.org/web/20010604100006/http://www.cs.unc.edu/ azuma/ARpresence.pdf. [cited by applicant]
Azuma, “Predictive Tracking for Augmented Realty,” TR95-007, Department of Computer Science, UNC-Chapel Hill, NC, Feb. 1995. [cited by applicant]
Bimber, et al., “Spatial Augmented Reality—Merging Real and Virtual Worlds,” 2005 https://web.media.mit.edu/raskar/book/BimberRaskarAugmentedRealityBook.pdf. [cited by applicant]
CN201880020962.X Office Action dated Oct. 9, 2022. [cited by applicant]
Cunningham et al., “A plastic colorimetric resonant optical biosensor for multiparallel detection of label-free biochemical interactions,” Sensors and Actuators B, vol. 85, 2190226, Jul. 2002, in 8 pages. [cited by applicant]
EP18744218.1 Examination Report dated Dec. 16, 2022. [cited by applicant]
Hasman, E. et al., “Polarization dependent focusing lens by use of quantized Pancharatnam-Berry phase diffractive optics”, Applied Physics Letters, vol. 82, No. 3, Jan. 20, 2003, in 3 pages. [cited by applicant]
Hongqiang Li, et al., “Large-Area Binary Blazed Grating Coupler between Nanophotonic Waveguide and LED,” The Scientific World Journal, vol. 2014, Article ID 586517, in six pages. [cited by applicant]
IL268115 Office Action dated Aug. 30, 2022. [cited by applicant]
International Preliminary Report on Patentability for PCT Application No. PCT/US2018/015057, dated Aug. 8, 2019. [cited by applicant]
International Search Report and Written Opinion for PCT Application No. PCT/US2018/015057, dated Apr. 5, 2018. [cited by applicant]
Jacob, “Eye Tracking in Advanced Interface Design,” Human-Computer Interaction Lab Naval Research Laboratory, Washington, D.C. / paper/ in Virtual Environments and Advanced Interface Design, ed. by W. Barfield and T.A. … [cited by applicant]
JP2022-160836 Office Action dated Jun. 7, 2023. [cited by applicant]
Khorasaninejad, M. et al., “Broadband Multifunctional Efficient Meta-Gratings Based on Dielectric Waveguide Phase Shifters”, Nano Letters, vol. 15, Sep. 2015, in 7 pages. [cited by applicant]
Kildishev, A. et al., “Planar Photonics with Metasurfaces”, Science, vol. 339, Mar. 15, 2013, in 9 pages. URL: http://d .doi.org/10.1126/science.1232009. [cited by applicant]
KR10-2019-7024534 Office Action dated Oct. 19, 2022. [cited by applicant]
Laakkonen, et al., “Double-groove, two-depth grating coupler for light guides,” J. Opt. Soc. Am. A/vol. 23, No. 12/ Dec. 2006. [cited by applicant]
Lin, D. et al., “Dielectric gradient metasurface optical elements”, Science, vol. 345, Issue 6194, Jul. 18, 2014, in 6 pages. [cited by applicant]
Lin, D. et al., “Supplementary Materials for Dielectric gradient metasurface optical elements”, Science, vol. 345, Issue 6194, Jul. 18, 2014, in 22 pages. [cited by applicant]
Pors, A. et al., “Gap plasmon-based metasurfaces for total control of reflected light”, Scientific Reports, vol. 3, Jul. 8, 2013, in 6 pages. [cited by applicant]
Schowengerdt, et al., “Volumetric Display Using Scanned Fiber Array,” in Journal of SID Symposium Digest of Technical papers, vol. 41, Issue 1, May 2010. [cited by applicant]
Shalaev et al., “High-Efficiency All Dielectric Metasurfaces for Ultra-Compact Beam Manipulation in Transmission Mode,” Nano letters 15.9 (2015): 6261-6266. [cited by applicant]
Tanriverdi and Jacob, “Interacting With Eye Movements in Virtual Environments,” Department of Electrical Engineering and Computer Science, Tufts University, Medford, MA—paper/Proc. AMC CHI 2000 Human Factors in Computin… [cited by applicant]
Yu, N. et al., “Light Propagation with Phase Discontinuities: Generalized Laws of Reflection and Refraction,” Science, vol. 334, No. 333, Oct. 21, 2011, in 6 pages. URL: www.sciencemag.org. [cited by applicant]
Yu, N. et al., “Optical Metasurfaces and Prospect of Their Applications Including Fiber Optics”, Journal of Lightwave Technology, vol. 33, No. 12, Jun. 15, 2015, in 15 pages. URL: http://ieeeplore.ieee.org/document/7045… [cited by applicant]
Zhao, et al., Manipulating light polarization with ultrathin plasmonic metasurfaces, Physical Review B, vol. 84, 84, 205428 (2011), Nov. 2011. [cited by applicant]
Zhou, et al., “Silicon photonic devices based on binary blazed gratings,” Optical Engineering 52(9), Sep. 2013. [cited by applicant]
Zhu, A. Y. et al., “Broadband visible wavelength high efficiency meta-gratings”, Conference on Lasers and Electro-Optics, OSA Technical Digest (online), Jan. 2016, in 2 pages. [cited by applicant]
JP2022-160836 Final Office Action dated Sep. 20, 2023. [cited by applicant]
IN201947028809 Hearing Notice dated Dec. 29, 2023. [cited by applicant]
Decision to Grant received for Japanese Patent Application No. 2019-539228, mailed on Sep. 5, 2022, 5 pages (2 pages of English Translation and 3 pages of Original Document). [cited by applicant]
Extended European Search Report received for European Application No. 18744218.1, mailed on Nov. 6, 2020, 7 pages. [cited by applicant]
Intention to grant received for European Patent Application No. 18744218.1, mailed on Jun. 4, 2024, 6 pages. [cited by applicant]
Korean Notice of Allowance for Korean Application No. 10-2019-7024534, dated Mar. 29, 2023, 11 pages (6 pages of English Translation and 5 pages of Original Document). [cited by applicant]
Korean Notice of Allowance for Korean Application No. 10-2023-7022019, dated Jan. 29, 2024, 6 pages (3 pages of English Translation and 3 pages of Original Document). [cited by applicant]
Korean Office Action received for Korean Application No. 10-2019-7024534, dated Apr. 18, 2022, 13 pages (7 pages of English Translation and 5 pages of Original Document). [cited by applicant]
Office Action received for Japanese Patent Application No. 2019-539228 , mailed on Dec. 24, 2021, 8 pages (4 pages of English Translation and 4 pages of Original Document). [cited by applicant]
Office Action received for Japanese Patent Application No. 2019-539228 , mailed on May 26, 2022, 6 pages (3 pages of English Translation and 3 pages of Original Document). [cited by applicant]
Office Action received for Japanese Patent Application No. 2022-160836 , mailed on Aug. 13, 2024, 4 pages (2 pages of English Translation and 2 pages of Original Document). [cited by applicant]
Office Action received for Japanese Patent Application No. 2022-160836, mailed on Jun. 7, 2023, 6 pages (3 pages of English Translation and 3 pages of Original Document). [cited by applicant]
Office Action received for Japanese Patent Application No. 2022-160836 , mailed on Sep. 20, 2023, 6 pages (3 pages of English Translation and 3 pages of Original Document). [cited by applicant]
Office Action received for Japanese Patent Application No. 2023-143437 , mailed on Jan. 17, 2024, 4 pages (2 pages of English Translation and 2 pages of Original Document). [cited by applicant]
Office Action received for Korean Patent Application No. 10-2023-7022019 , mailed on Jul. 24, 2023, 5 pages (3 pages of English Translation and 2 pages of Original Document). [cited by applicant]