Memory subword driver circuits and layout
In some examples, a subword driver block of a memory device includes a first active region and a second active region adjacent to each other. The first active region forms drains/sources of a first and second transistors in a first region; the second active region forms drains/sources of a third and fourth transistors in a second region, where the first and second regions are adjacent to each other. The first, second, third and fourth transistors are coupled to a common non-active potential via a shared contact overlaid over a merged region between the first and second regions. The first and second active regions may comprise N+ diffusion materials.
1. An apparatus comprising:
a subword driver block comprising:
at least first and second active regions extending in a first direction; and
one or more common diffusion regions spaced in the first direction and configured to merge the first and second active regions;
a gate electrode layer comprising:
first gate electrode extending in a second direction substantially perpendicularly to the first direction, the first gate electrode overlaid across the first and second active regions in a plan view to form first and second transistors; and
second gate electrode extending in the second direction, the second gate electrode overlaid across the first and second active regions in the plan view to form third and fourth transistors;
a diffusion contact overlaid on the first active region, the diffusion contact is shared by the second and fourth transistors via a respective common diffusion region of the one or more common diffusion regions;
a wiring layer comprising a plurality of interconnections extending in the second direction and coupled to respective word lines of a memory cell array; and
a contact wiring coupled to the diffusion contact, wherein the contact wiring is positioned between first and second interconnections of the plurality of interconnections.
2. The apparatus of claim 1 , wherein the wiring layer comprises a metal zero layer.
3. The apparatus of claim 1 , wherein the first and second interconnections define a recess around the contact wiring.
4. Apparatus of claim 1 , wherein the quantity of the plurality of interconnections is reduced based at least in part on the presence of the one or more common diffusion regions.
5. The apparatus of claim 1 , further comprising:
a third active region extending in the first direction;
a fourth active region extending in the first direction;
a second common diffusion region configured to merge the third and fourth active regions,
wherein the first and second active regions comprise an first N-type MOSFET area, wherein the third and fourth active regions comprise a second N-type MOSFET area; and
a plurality of active regions between the first N-type MOSFET area and the second N-type MOSFET area, wherein the plurality of active regions comprises a P-type MOSFET area.
6. An apparatus comprising:
a subword driver block comprising:
at least first and second active regions extending in a first direction; and
one or more common diffusion regions spaced in the first direction and configured to merge the first and second active regions;
a gate electrode layer comprising:
first gate electrode extending in a second direction substantially perpendicularly to the first direction, the first gate electrode overlaid across the first and second active regions in a plan view to form first and second transistors; and
second gate electrode extending in the second direction, the second gate electrode overlaid across the first and second active regions in the plan view to form third and fourth transistors;
a diffusion contact overlaid on the first active region, the diffusion contact is shared by the second and fourth transistors via a respective common diffusion region of the one or more common diffusion regions; and
a wiring layer comprising a plurality of interconnections extending in the second direction and coupled to respective word lines of a memory cell array,
wherein at least one of the plurality of interconnections comprises a bend portion to allow for proper spacing between adjacent interconnections.
7. The apparatus of claim 6 further comprising a contact wiring coupled to the diffusion contact, wherein the contact wiring is positioned between first and second interconnections of the plurality of interconnections.
8. An apparatus, comprising:
a first active region on which a first transistor and a second transistor are formed;
a second active region adjacent to the first active region on which a third transistor and a fourth transistor are formed;
a third active region on which a fifth transistor and a sixth transistor are formed;
a fourth active region adjacent to the third active region on which a seventh transistor and an eighth transistor are formed;
a plurality of active regions between the second and third active regions, wherein the plurality of active regions are a different type than the first, second, third, and fourth active regions;
a wiring region comprising a plurality of interconnections extending substantially perpendicular to the active regions and coupled to respective word lines of a memory cell array; and
a contact wiring coupled to a diffusion contact overlaid on at least one active region of the first, second, third, or fourth active regions, wherein the contact wiring is positioned between first and second interconnections of the plurality of interconnections.
9. The apparatus of claim 8 , wherein the type of the first, second, third, and fourth active regions is an N-type MOSFET area, and the type of the plurality of active regions is a P-type MOSFET area.
10. The apparatus of claim 8 , further comprising:
one or more first common diffusion regions configured to merge the first and second active regions.
11. An apparatus, comprising:
a first active region on which a first transistor and a second transistor are formed;
a second active region adjacent to the first active region on which a third transistor and a fourth transistor are formed;
a third active region on which a fifth transistor and a sixth transistor are formed;
a fourth active region adjacent to the third active region on which a seventh transistor and an eighth transistor are formed; and
a plurality of active regions between the second and third active regions, wherein the plurality of active regions are a different type than the first, second, third, and fourth active regions;
one or more first common diffusion regions configured to merge the first and second active regions; and
first respective diffusion contacts overlaid on the first active region and adjacent to the one or more first common diffusion regions.
12. The apparatus of claim 11 further comprising a wiring region comprising a plurality of interconnections extending substantially perpendicular to the active regions and coupled to respective word lines of a memory cell array.
13. The apparatus of claim 12 further comprising a contact wiring coupled to a diffusion contact overlaid on at least one active region of the first, second, third, or fourth active regions, wherein the contact wiring is positioned between first and second interconnections of the plurality of interconnections.
14. An apparatus, comprising:
a subword driver block comprising a plurality of active regions with a plurality of transistors, and comprising one or more common diffusion regions each configured to merge two active regions of the plurality of active regions;
a gate electrode layer comprising a plurality of gate electrodes substantially perpendicular to the plurality of active regions, the intersection of the gate electrodes and the active regions forming the plurality of transistors;
a wiring layer above the active regions and gate electrode layer, the wiring layer comprising a plurality of interconnections coupled to respective word lines of a memory cell array; and
a contact wiring coupled to a diffusion contact on an active region adjacent to a common diffusion region of the one or more common diffusion regions, wherein the contact wiring is positioned between first and second interconnections of the plurality of interconnections.
15. The apparatus of claim 14 , wherein the wiring layer comprises a metal zero layer.
16. The apparatus of claim 14 , wherein the first and second interconnections define a recess around the contact wiring.
17. The apparatus of claim 14 , wherein at least one of the plurality of interconnections comprises a bend portion to allow for proper spacing between adjacent interconnections.
18. An apparatus, comprising:
a subword driver block comprising a plurality of active regions with a plurality of transistors, and comprising one or more common diffusion regions each configured to merge two active regions of the plurality of active regions;
a gate electrode layer comprising a plurality of gate electrodes substantially perpendicular to the plurality of active regions, the intersection of the gate electrodes and the active regions forming the plurality of transistors;
a wiring layer above the active regions and gate electrode layer, the wiring layer comprising a plurality of interconnections coupled to respective word lines of a memory cell array, wherein the quantity of the plurality of interconnections is reduced based at least in part on the presence of the one or more common diffusion regions.
19. The apparatus of claim 18 , further comprising a contact wiring coupled to a diffusion contact on an active region adjacent to a common diffusion region of the one or more common diffusion regions, wherein the contact wiring is positioned between first and second interconnections of the plurality of interconnections.