Gyro sensor, electronic device, and vehicle
A gyro sensor includes a substrate, a fixed section fixed to the substrate, a driving section configured to perform driving along an X axis parallel to a principal plane of the substrate, a mass section coupled to the driving section and displaced along the X axis, a detecting section coupled to the mass section, capable of turning around a Z axis crossing the X axis, and capable of being displaced along the Z axis by a Coriolis force acting on a turning motion horizontal to the substrate, and an elastic section coupling the detecting section and the fixed section. The fixed section is disposed between the center of gravity of the detecting section and the mass section in a plan view.
1. A gyro sensor comprising:
three mutually orthogonal axes being defined as an X-axis, a Y-axis, and a Z-axis;
a substrate; and
an element unit that is supported on an upper surface of the substrate, is located on a plus side of the Z axis, and is configured to detect an angular velocity based on a change in capacitance, wherein
the element unit comprises:
a fixed section fixed to the upper surface of the substrate;
a mass section configured to be displaced in an X-axis direction along the X-axis parallel to the upper surface of the substrate;
a driving section that drives the mass section in the X-axis direction;
a first detecting section that is connected to the mass section and is configured to be displaced in a Z-axis direction along the Z-axis;
a second detecting section that is connected to the mass section and is configured to be displaced in the Z-axis direction;
a first elastic section connecting the first detecting section and the fixed section;
a second elastic section connecting the second detecting section and the fixed section;
a first fixed detecting section facing the first detecting section and spaced apart from the first detecting section; and
a second fixed detecting section facing the second detecting section and spaced apart from the second detecting section.
2. The gyro sensor according to claim 1 , wherein
in a plan view from the Z-axis direction, the fixed section is arranged between the first detecting section and the second detecting section.
3. The gyro sensor according to claim 1 , wherein
the first detecting section and the second detecting section rotate in opposite phases along a plane including the X-axis and the Y-axis.
4. The gyro sensor according to claim 1 , wherein
the first elastic section includes a fold, and
the second elastic section includes a fold.
5. The gyro sensor according to claim 4 , wherein
the first elastic section includes folds on a plus side and a minus side in the X-axis direction,
the second elastic section includes folds on the plus side and the minus side in the X-axis direction.
6. The gyro sensor according to claim 1 , wherein
the first detecting section is arranged on a plus side of the Y axis, and
the second detecting section is arranged on a minus side of the Y axis.
7. The gyro sensor according to claim 1 , wherein the element part comprises:
a first joining section connecting the first detecting section and the first elastic section; and
a second joining section connecting the second detecting section and the second elastic section.
8. The gyro sensor according to claim 5 , wherein
a first groove is provided on a connection side of the first detecting section with the first joining section.
9. The gyro sensor according to claim 5 , wherein
a second groove is provided on a connection side of the second detecting section with the second joining section.
10. The gyro sensor according to claim 1 , further comprising:
a first coupling spring connecting the mass section and the first detecting section and extending along the Y-axis; and
a second coupling spring connecting the mass section and the second detecting section and extending along the Y-axis.
11. The gyro sensor according to claim 1 , wherein
the first fixed detecting section and the second fixed detecting section are arranged on an upper surface of the substrate.
12. An electronic device comprising the gyro sensor according to claim 1 .
13. A vehicle comprising the gyro sensor according to claim 1 .