Liquid ejecting head, liquid ejecting apparatus, and piezoelectric device
The vibration plate, the first electrode, the piezoelectric layer, and the second electrode are stacked in this order from the pressure chamber plate side in an active area facing the pressure chamber. An area located outwardly from the active area in a longitudinal direction of the pressure chamber includes a first area in which the piezoelectric layer, the second electrode, the insulating layer, and the first conductive layer are stacked in this order, and a second area in which the piezoelectric layer and the insulating layer are stacked in this order without the second electrode and the first conductive layer.
1 . A liquid ejecting head comprising:
a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode;
a first conductive layer electrically coupled to the second electrode;
an insulating layer formed of an insulating material;
a vibration plate that is vibrated when the piezoelectric element is driven; and
a pressure chamber plate defining a pressure chamber that applies pressure to a liquid when the vibration plate is driven, wherein
the vibration plate, the first electrode, the piezoelectric layer, and the second electrode are stacked in this order from a side of the pressure chamber plate in an active area facing the pressure chamber, and
an area located outwardly from the active area in a first direction includes: a first area in which the piezoelectric layer, the second electrode, the insulating layer, and the first conductive layer are stacked in this order in a second direction that intersects the first direction; and a second area in which the piezoelectric layer and the insulating layer are stacked in this order in the second direction without the second electrode and the first conductive layer.
2 . The liquid ejecting head according to claim 1 , wherein the first conductive layer has a larger thickness than the second electrode.
3 . The liquid ejecting head according to claim 2 , wherein a surface of the insulating layer away from the pressure chamber plate in the second area is closer to the pressure chamber plate than is a surface of the insulating layer away from the pressure chamber plate in the first area.
4 . The liquid ejecting head according to claim 3 , wherein the piezoelectric layer has a smaller thickness in the second area than in the first area.
5 . The liquid ejecting head according to claim 3 , wherein the area located outwardly from the active area in the first direction includes a third area in which the insulating layer and a second conductive layer electrically coupled to the first electrode are stacked in the second direction, and
the second area is located between the first area and the third area in the first direction.
6 . The liquid ejecting head according to claim 5 , wherein the second conductive layer has a larger thickness than the first electrode.
7 . The liquid ejecting head according to claim 5 , wherein the area located outwardly from the active area in the first direction includes a fourth area in which the piezoelectric layer, the second electrode, and the first conductive layer are stacked in this order in the second direction, and
the first area is located between the fourth area and the second area in the first direction.
8 . The liquid ejecting head according to claim 7 , wherein the first area is wider than the third area in the first direction.
9 . The liquid ejecting head according to claim 7 , wherein the fourth area is wider than the first area in the first direction.
10 . The liquid ejecting head according to claim 1 , further comprising a protection plate defining a space housing the piezoelectric element, wherein
the protection plate is coupled to the insulating layer with an adhesive in the second area.
11 . The liquid ejecting head according to claim 10 , wherein the area located outwardly from the active area in the first direction includes a fourth area in which the piezoelectric layer, the second electrode, and the first conductive layer are stacked in this order in the second direction,
the first area is located between the fourth area and the second area in the first direction,
the first conductive layer has a stepped portion in an area extending from the first area to the fourth area, and
the protection plate is coupled to the first conductive layer with an adhesive in the first area.
12 . The liquid ejecting head according to claim 1 , further comprising a protection plate defining a space housing the piezoelectric element, wherein
the protection plate is coupled to a stack including the piezoelectric element, the vibration plate, and the pressure chamber plate with an adhesive in an area located outwardly from the second area in the first direction.
13 . The liquid ejecting head according to claim 1 , wherein the second area in which the vibration plate, the first electrode, the piezoelectric layer, and the insulating layer are stacked in this order from the side of the pressure chamber plate.
14 . The liquid ejecting head according to claim 1 , wherein the first direction is a longitudinal direction of the pressure chamber.
15 . A liquid ejecting apparatus comprising the liquid ejecting head according to claim 1 .
16 . A piezoelectric device comprising:
a substrate having a recess;
a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode;
a vibration plate that is vibrated when the piezoelectric element is driven;
a first conductive layer electrically coupled to the second electrode; and
an insulating layer formed of an insulating material, wherein
the vibration plate, the first electrode, the piezoelectric layer, and the second electrode are stacked in this order from a side of the substrate in an active area having the recess, and
an area located outwardly from the active area in a first direction includes: a first area in which the piezoelectric layer, the second electrode, the insulating layer, and the first conductive layer are stacked in this order in a second direction that intersects the first direction; and a second area in which the piezoelectric layer and the insulating layer are stacked in this order in the second direction without the second electrode and the first conductive layer.