Display device
According to one embodiment, a display device comprises a first lower electrode, a rib including a first pixel aperture, a partition including a lower portion on the rib and an upper portion protruding from a side surface of the lower portion, a first upper electrode, and a first organic layer between the first lower electrode and the first upper electrode. The lower portion includes a bottom layer and a stem layer on the bottom layer. The bottom layer is formed of a material which has a smaller etching rate to a mixed acid containing phosphoric acid, nitric acid, and acetic acid than the stem layer and which is conductive.
1. A display device comprising:
a first lower electrode;
a rib including a first pixel aperture overlapping with the first lower electrode;
a partition including a lower portion arranged on the rib and an upper portion protruding from a side surface of the lower portion;
a first upper electrode opposed to the first lower electrode; and
a first organic layer located between the first lower electrode and the first upper electrode, contacting with the first lower electrode through the first pixel aperture, and emitting light in accordance with a potential difference between the first lower electrode and the first upper electrode,
wherein
the lower portion includes a bottom layer contacting with the first upper electrode and a stem layer arranged on the bottom layer, and
the bottom layer is formed of a material which has a smaller etching rate to a mixed acid containing phosphoric acid, nitric acid, and acetic acid than the stem layer and which is conductive.
2. The display device of claim 1 , wherein
the upper portion is formed of a material whose etching rate to the mixed acid is smaller than an etching rate of the stem layer.
3. The display device of claim 1 , wherein
the stem layer is formed of aluminum or an aluminum alloy.
4. The display device of claim 1 , wherein
the stem layer includes a plurality of layers formed of aluminum or an aluminum alloy.
5. The display device of claim 1 , wherein
the bottom layer is formed of titanium, titanium nitride, tungsten, or a tungsten alloy.
6. The display device of claim 1 , wherein
the bottom layer includes a plurality of layers formed of titanium, titanium nitride, tungsten, or a tungsten alloy.
7. The display device of claim 1 , wherein
the upper portion is formed of titanium, titanium nitride, tungsten, or a tungsten alloy.
8. The display device of claim 1 , wherein
the upper portion is formed to be thicker than the bottom layer.
9. The display device of claim 1 , wherein
the upper portion includes a first layer and a second layer covering the first layer, and
the second layer is formed of a material whose etching rate to dry etching using etching gas containing fluorine is smaller than an etching rates of the first layer and the bottom layer.
10. The display device of claim 9 , wherein
the first layer is formed of the same material as the bottom layer and formed to be thicker than the bottom layer.
11. The display device of claim 9 , wherein
the second layer is formed of ITO, IZO or IGZO.
12. The display device of claim 1 , wherein
the rib is formed of silicon oxide or silicon oxynitride.
13. The display device of claim 1 , wherein
the rib includes a first rib layer formed of silicon nitride, and a second rib layer which is formed of silicon oxide or silicon oxynitride and which covers the first rib layer.
14. A display device comprising:
a first lower electrode and a second lower electrode;
a rib including a first pixel aperture overlapping with the first lower electrode and a second pixel aperture overlapping with the second lower electrode;
a partition including a lower portion arranged on the rib between the first pixel aperture and the second pixel aperture, and an upper portion protruding from a side surface of the lower portion;
a first upper electrode opposed to the first lower electrode;
a second upper electrode opposed to the second lower electrode;
a first organic layer located between the first lower electrode and the first upper electrode, contacting with the first lower electrode through the first pixel aperture, and emitting light in accordance with a potential difference between the first lower electrode and the first upper electrode; and
a second organic layer located between the second lower electrode and the second upper electrode, contacting with the second lower electrode through the second pixel aperture, and emitting light in accordance with a potential difference between the second lower electrode and the second upper electrode,
wherein
the rib is formed of silicon oxide or silicon oxynitride,
the lower portion includes a conductive bottom layer and a stem layer which is formed of a metal and is arranged on the bottom layer,
the bottom layer includes a first end on a side of the first pixel aperture and a second end on a side of the second pixel aperture,
the stem layer includes a first side surface on a side of the first pixel aperture and a second side surface on a side of the second pixel aperture, and
the first end protrudes from the first side surface, and the second end protrudes from the second side surface.
15. The display device of claim 14 , wherein
a protrusion length of the first end from the first side surface is different from a protrusion length of the second end from the second side surface.
16. The display device of claim 14 , wherein
a protrusion length of the first end from the first side surface and a protrusion length of the second end from the second side surface are the same.
17. The display device of claim 14 , wherein
the stem layer is formed of aluminum or an aluminum alloy.
18. The display device of claim 14 , wherein
the stem layer includes a plurality of layers formed of aluminum or an aluminum alloy.
19. The display device of claim 14 , wherein
the bottom layer is formed of titanium, titanium nitride, tungsten, or a tungsten alloy.
20. The display device of claim 14 , wherein
the bottom layer includes a plurality of layers formed of titanium, titanium nitride, tungsten, or a tungsten alloy.
21. The display device of claim 14 , wherein
the upper portion is formed of a material including titanium, titanium nitride, tungsten, or a tungsten alloy.
22. The display device of claim 14 , wherein
the upper portion is formed to be thicker than the bottom layer.
23. The display device of claim 14 , wherein
the first upper electrode is in contact with the first end, and
the second upper electrode is in contact with the second end.
24. A display device comprising:
a first lower electrode and a second lower electrode;
a rib including a first pixel aperture overlapping with the first lower electrode and a second pixel aperture overlapping with the second lower electrode;
a partition including a lower portion arranged on the rib and an upper portion protruding from a side surface of the lower portion;
a first upper electrode opposed to the first lower electrode;
a second upper electrode opposed to the second lower electrode;
a first organic layer located between the first lower electrode and the first upper electrode, contacting with the first lower electrode through the first pixel aperture, and emitting light in accordance with a potential difference between the first lower electrode and the first upper electrode; and
a second organic layer located between the second lower electrode and the second upper electrode, contacting with the second lower electrode through the second pixel aperture, and emitting light in accordance with a potential difference between the second lower electrode and the second upper electrode,
wherein
the partition is arranged between the first pixel aperture and the second pixel aperture,
the upper portion includes a first layer and a second layer covering the first layer,
the first layer is formed of titanium, titanium nitride, tungsten, or a tungsten alloy,
the second layer is formed of ITO, IZO or IGZO,
the lower portion includes a conductive bottom layer and a stem layer which is formed of aluminum or an aluminum alloy and is arranged on the bottom layer,
the bottom layer includes a first end on a side of the first pixel aperture and a second end on a side of the second pixel aperture,
the stem layer includes a first side surface on a side of the first pixel aperture and a second side surface on a side of the second pixel aperture, and
the first end protrudes from the first side surface, and the second end protrudes from the second side surface.
25. The display device of claim 24 , wherein
the first upper electrode is in contact with the first end, and
the second upper electrode is in contact with the second end.
26. The display device of claim 25 , wherein
a protrusion length of the first end from the first side surface is different from a protrusion length of the second end from the second side surface.
27. The display device of claim 25 , wherein
a protrusion length of the first end from the first side surface and a protrusion length of the second end from the second side surface are the same.
28. The display device of claim 25 , wherein:
the bottom layer is formed of titanium, titanium nitride, tungsten, or a tungsten alloy; and
the rib is formed of silicon oxide or silicon oxynitride.
29. The display device of claim 25 , wherein
the upper portion is formed to be thicker than the bottom layer.
30. The display device of claim 25 , wherein
the rib includes a first rib layer formed of silicon nitride, and a second rib layer which is formed of silicon oxide or silicon oxynitride and covers the first rib layer.