Semiconductor device and temperature characteristic test method thereof
Before a temperature characteristic of a band gap reference circuit is tested, temperature dependencies of a reference voltage and an absolute temperature proportional voltage for a plurality of samples are measured. When the temperature characteristic is tested, based on a difference ΔVref between the reference voltage of the band gap reference circuit at a predetermined temperature and a median value of the reference voltages of the plurality of samples, a difference ΔVptat between the absolute temperature proportional voltage of the band gap reference circuit at a predetermined temperature and a median value of the absolute temperature proportional voltages of the plurality of samples is calculated.
1 . A temperature characteristic test method for a semiconductor device comprising a band gap reference circuit for outputting a reference voltage and an absolute temperature proportional voltage, the method comprising:
before testing a temperature characteristic of the band gap reference circuit, measuring temperature dependencies of the reference voltage and the absolute temperature proportional voltage for a plurality of samples; and
calculating a first difference between the reference voltage of the band gap reference circuit at a predetermined temperature and a median value of the reference voltages of the plurality of samples;
calculating a second difference between the absolute temperature proportional voltage of the band gap reference circuit at the predetermined temperature and a median value of the absolute temperature proportional voltages of the plurality of samples; and
testing the temperature characteristic based on the first difference and the second difference.
2 . The temperature characteristic test method according to claim 1 ,
when testing the temperature characteristic, a ratio of the first difference and the second difference is constant regardless of temperature.
3 . The temperature characteristic test method according to claim 1 ,
when testing the temperature characteristics, a lower limit temperature and an upper limit of operation guarantee temperature are set to the semiconductor device, and
the second difference is calculated based on an average value of the first difference at the lower limit temperature and the first difference at the upper limit temperature.
4 . The temperature characteristic test method according to claim 1 ,
wherein an aging degradation is determined based on an amount of change in a difference between a plurality of reference divided voltages obtained by dividing the reference voltage outputted from the band gap reference circuit of which the temperature characteristic is measured.
5 . The temperature characteristic test method according to claim 4 ,
wherein the band gap reference circuit is a first band gap reference circuit, and outputs a first reference voltage as the reference voltage,
wherein the semiconductor device further comprising a second band gap reference circuit for outputting a second reference voltage formed in a different power supply region from the first band gap reference circuit, and
wherein the aging degradation is determined based on an amount of change in a difference between a plurality of reference divided voltages obtained by dividing the second reference voltage outputted from the second band gap reference circuit of which a temperature characteristic is measured.
6 . The temperature characteristic test method according to claim 1 ,
wherein the band gap reference circuit is a first band gap reference circuit, and outputs a first reference voltage as the reference voltage,
when testing a temperature characteristic of a second band gap reference circuit for outputting a second reference voltage,
dividing the first reference voltage outputted from the first band gap reference circuit of which the temperature characteristic is measured into a first reference divided voltage,
converting the first reference divided voltage to a first digital signal by the first reference voltage as a reference in a first A/D converter,
converting the first reference divided voltage to a second digital signal by the second reference voltage as a reference in a second A/D converter, and
testing the temperature characteristic of the second band gap reference circuit based on a difference between the first digital signal and the second digital signal.