Ultrasonic cleaning unit with improved cleaning performance, and substrate cleaning apparatus including the same
The present invention relates to an ultrasonic cleaning unit with improved cleaning performance, which can improve overall substrate cleaning performance through improvement in the structure of a cleaning head of the ultrasonic cleaning unit, and the ultrasonic cleaning unit includes: a driving unit for receiving external power and vibrating an internal vibrator; and a cleaning head formed to protrude downward from a bottom of the driving unit to be acoustically coupled to the vibrator to transfer high-frequency acoustic energy to a cleaning liquid on a substrate, and an arc section formed to have a curvature corresponding to an outer circle of the substrate is included in an edge of a bottom surface of the cleaning head.
1 . An ultrasonic cleaning unit comprising:
a driving unit for receiving external power and vibrating a vibrator; and
a cleaning head formed to protrude downward from a bottom of the driving unit and acoustically coupled to the vibrator to transfer acoustic energy to a cleaning liquid on a substrate,
wherein two arc sections, each having a curvature corresponding to an outer circle of the substrate, are included in an edge of a bottom surface of the cleaning head,
wherein the driving unit includes:
a wiring terminal protruding from one side thereof and configured to receive an external power cable;
the vibrator connected to the external power cable and configured to vibrate in response to applied power;
a gas guide partitioned around an area where the vibrator is arranged; and
a gas inlet and a gas outlet disposed at respective ends of the gas guide to inject and discharge gas for controlling generation of heat.
2 . The unit according to claim 1 , wherein the edge of the bottom surface of the cleaning head includes two straight sections in a form of a straight line spaced apart to face each other in a horizontal direction, the two arc sections in a form of an arc spaced apart to face each other in a vertical direction between the two straight sections, and four curved sections in a form of a curved line connecting respective ends of the respective two straight sections and the respective two arc sections.
3 . The unit according to claim 2 , wherein the two straight sections are elements that determine an area of the bottom surface of the cleaning head, and the longer the length, the larger the area of the bottom surface of the cleaning head.
4 . The unit according to claim 2 , wherein the two arc sections are disposed along circumferential portions of an edge of the substrate, and are formed in a shape of part of a circle having a curvature corresponding to the outer circle of the substrate.
5 . The unit according to claim 1 , wherein the bottom surface of the cleaning head includes a step recessed inwardly along at least one of the two arc sections.
6 . A substrate cleaning apparatus comprising:
the ultrasonic cleaning unit according to claim 1 ;
a substrate support device for rotating the substrate by a rotation driving mechanism while supporting the substrate; and
a fluid supply unit for supplying the cleaning liquid for processing the substrate onto the substrate of the substrate support device.