Granted Patent
B2
US 12,237,147 · App. 18/383,422 · Granted Feb 25, 2025
Methods and systems for event modulated electron microscopy
Assignees:
INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.; THE PROVOST, FELLOWS, FOUNDATION SCHOLARS, AND THE OTHER MEMBERS OF BOARD, OF THE COLLEGE OF THE HOLY AND UNDIVIDED TRINITY OF QUEEN ELIZABETH NEAR DUBLIN
View Patent ↗
Loading inventors, assignments & file history…
Abstract
A method for measuring an electron signal or an electron induced signal may be provided. The method may include providing a threshold number of events or a threshold event rate for a pixel on a detector. The method may include collecting from the detector the threshold number of events or determining that the threshold event rate is achieved, wherein a signal at the detector is an electron signal or an electron induced signal from a sample. The method may include modulating an intensity of an electron source directed to the sample in response.
Claims (24)
1. A method of forming an image based on an electron event signal, the method comprising:
(a) providing an information threshold for a sample;
(b) collecting from an electron detector a number of events equal to the information threshold or determining that an event rate equal to the information threshold is achieved, wherein the electron detector is configured to collect an electron signal or an electron induced signal from the sample; and
(c) forming an image according to the electron signal or the electron induced signal.
2. The method of claim 1 , wherein the electron signal or the electron induced signal is a single electron signal.
3. The method of claim 1 , wherein the information threshold is a number of events at a single pixel.
4. The method of claim 1 , wherein the information threshold is an average or sum of events over a plurality of pixels.
5. The method of claim 1 , wherein the information threshold is an average or sum of events across a plurality of detectors or detector segments.
6. The method of claim 3 , wherein an event of the average or sum of events is an electron impact.
7. The method of claim 3 , wherein an event of the average or sum is a single count on the electron detector.
8. The method of claim 7 , wherein the single count is a determined use of an event signal processor.
9. The method of claim 1 , wherein the information threshold is set by a user, and wherein the information threshold is configured to be varied by a user.
10. The method of claim 1 , wherein the information threshold is a damage threshold for the sample.
11. The method of claim 1 , wherein the information threshold is determined by an information gain for a pixel being less than a threshold.
12. The method of claim 1 , wherein the information threshold is determined by information about the sample.
13. The method of claim 1 , wherein the information threshold is determined by experiment.
14. The method of claim 1 , wherein the information threshold is set with input from a model of information efficiency.
15. The method of claim 1 , wherein the electron induced signal comprises a measurement from an energy dispersive X-ray spectrometer (EDS).
16. The method of claim 1 , wherein (c) comprises forming the image according to a time to achieve the threshold number of events.
17. The method of claim 1 , wherein (c) comprises forming the image according to a threshold event rate for a plurality of pixels.
18. The method of claim 1 , wherein (c) comprises forming the image in real time.
19. The method of claim 1 , wherein (c) comprises building up the image pixel-by-pixel.
20. The method of claim 1 , wherein the method further comprises displaying the image in arbitrary units.
21. The method of claim 1 , wherein the method is implemented by an electron imaging system.
Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded Jan 5, 2024
From: REED, BRYAN WALTER
To: INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
Reel/Frame 066039/0580 →
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded Jan 5, 2024
From: JONES, LEWYS
To: THE PROVOST, FELLOWS, FOUNDATION SCHOLARS, AND THE OTHER MEMBERS OF BOARD, OF THE COLLEGE OF THE HOLY AND UNDIVIDED TRINITY OF QUEEN ELIZABETH NEAR DUBLIN
Reel/Frame 066039/0701 →
Continuity (2)
Continuation
18104101
· Jan 31, 2023
References Cited (128)
US 4189641A
· Katagiri et al.
· 1980
[cited by applicant]
US 4420686A
· Onoguchi et al.
· 1983
[cited by applicant]
US 5191213A
· Ahmed
· 1993
[cited by examiner]
US 5825034A
· Tamura
· 1998
[cited by applicant]
US 5874735A
· Matsumoto et al.
· 1999
[cited by applicant]
US 6484306B1
· Bokor
· 2002
[cited by examiner]
US 6608305B1
· Kin
· 2003
[cited by examiner]
US 7253410B1
· Bertsche et al.
· 2007
[cited by applicant]
US 7925284B2
· Stubbs
· 2011
[cited by examiner]
US 8933401B1
· Reed
· 2015
[cited by applicant]
US 9069081B2
· Campbell
· 2015
[cited by examiner]
US 9165743B2
· Reed et al.
· 2015
[cited by applicant]
US 9841592B2
· Reed
· 2017
[cited by applicant]
US 20020066863A1
· Chao
· 2002
[cited by examiner]
US 20040000642A1
· Veneklasen
· 2004
[cited by examiner]
US 20120091339A1
· Ominami
· 2012
[cited by examiner]
US 20150377958A1
· Ukraintsev
· 2015
[cited by examiner]
US 20170323763A1
· Itai
· 2017
[cited by examiner]
US 20220336185A1
· Bloom et al.
· 2022
[cited by applicant]
WO WO2014100835A1
· 2014
[cited by applicant]
WO WO2017087045A1
· 2017
[cited by applicant]
WO WO2020178813A1
· 2020
[cited by applicant]
WO WO2021007360A1
· 2021
[cited by applicant]
WO WO2021224622A1
· 2021
[cited by applicant]
WO WO2022220918A1
· 2022
[cited by applicant]
WO WO2024163516A2
· 2024
[cited by applicant]
Auad et al. Event-based hyperspectral EELS: towards nanosecond temporal resolution. Microsc. Microanal. 28 (Suppl 1), pp. 2648-2649 (2022). Retrieved Feb. 10, 2023 at URL: https://scholar.archive.org/work/5ipzkkykuzffjn…
[cited by applicant]
Béché et al. Development of a fast electromagnetic beam blanker for compressed sensing in scanning transmission electron microscopy. Appl. Phys. Lett. 108, 093103 (2016). 5 pages.
[cited by applicant]
Bücker et al. Electron beam dynamics in an ultrafast transmission electron microscope with Wehnelt electrode. Ultramicroscopy, vol. 171, pp. 8-18 (2016). Available online Aug. 20, 2016.
[cited by applicant]
Béché et al. Development of a fast electromagnetic shutter for compressive sensing imaging in scanning transmission electron microscopy. arXiv:1509.06656 (2015). Retrieved Mar. 11, 2022 at URL: https://arxiv.org/pdf/150…
[cited by applicant]
Beck et al. Fast Gradient-Based Algorithms for Constrained Total Variation Image Denoising and Deblurring Problems. IEEE Transactions on Image Processing, vol. 18, No. 11, pp. 2419-2434, Nov. 2009.
[cited by applicant]
Berkels et al. Optimized imaging using non-rigid registration. Ultramicroscopy, vol. 138, pp. 46-56 (Mar. 2014). Retrieved Feb. 10, 2023 at URL: https://arxiv.org/pdf/1403.6774.
[cited by applicant]
Browning et al. Implementing Sub-sampling Methods for Low-Dose (Scanning) Transmission Electron Microscopy (S/TEM). Microsc. Microanal. 23 (Suppl 1), pp. 82-83 (2017).
[cited by applicant]
Candes et al. An Introduction To Compressive Sampling. IEEE Signal Processing Magazine, pp. 21-30 (Mar. 2008).
[cited by applicant]
Candes, et al. Robust uncertainty principles: Exact signal reconstruction from highly incomplete frequency information. IEEE Transactions on information theory. 2006; 52(2):489-509.
[cited by applicant]
Choe et al. Mitigation of radiation damage in biological macromolecules via tunable picosecond pulsed transmission electron microscopy. Preprint. bioRxiv. Version posted Aug. 4, 2020. Retrieved Mar. 11, 2022 at URL: htt…
[cited by applicant]
Crozier. Vibrational and valence aloof beam EELS: A potential tool for nondestructive characterization of nanoparticle surfaces. Ultramicroscopy, vol. 180, pp. 104-114 (Sep. 2017). Retrieved Feb. 10, 2023 at URL: https:…
[cited by applicant]
Dekkers et al. Differential Phase Contract in a STEM. OPTIK, vol. 41, No. 4, pp. 452-456 (1974).
[cited by applicant]
DigitalMicrograph Software. Web page. Gatan, Inc. 2022. Retrieved Mar. 14, 2022 at URL: https://www.gatan.com/products/tem-analysis/gatan-microscopy-suite-software . 5 pages.
[cited by applicant]
Duarte et al. Multiscale Random Projections for Compressive Classification. 2007 IEEE International Conference on Image Processing, 2007, pp. VI-161-VI-164.
[cited by applicant]
Duarte, et al. Single-pixel imaging via compressive sampling. IEEE Signal Processing Magazine. 2008; 25(2):83-91.
[cited by applicant]
E et al. Probe integrated scattering cross sections in the analysis of atomic resolution HAADF STEM images. Ultramicroscopy 133 (2013) 109-119. Available online Jul. 15, 2013.
[cited by applicant]
Electrostatic Dose Modulator. Brochure. JEOL / IDES. May 7, 2020. 2 pages.
[cited by applicant]
Harmany et al. This is SPIRAL-TAP: Sparse Poisson Intensity Reconstruction ALgorithms—Theory and Practice. IEEE Transactions on Image Processing, vol. 21, No. 3, pp. 1084-1096 (Mar. 2012). Downloaded Mar. 14, 2022 from:…
[cited by applicant]
Hedley et al. Fast Ptychographic Reconstruction for Sparse Binary Ptychography Data. Microsc. Microanal. 28 (Suppl 1), pp. 438-439 (2022). Retrieved Feb. 9, 2023 at URL: https://www.cambridge.org/core/services/aop-cambr…
[cited by applicant]
Helios 5 UX DualBeam. Data Sheet. Thermo Fisher Scientific. 2019. Retrieved Mar. 11, 2022 at URL: https://assets.thermofisher.com/TFS-Assets/MSD/Datasheets/Helios%205%20UX%20DualBeam%20Semiconductor%20Datasheet.pdf . 4 …
[cited by applicant]
JEOL IDES EDM: Electrostatics Dose Modulator ( 2nd ver), Published to youtube Dec. 2, 2020. First version of video distributed to sales teams May 22, 2020. Screen captures retrieved Mar. 17, 2022 from the Internet: http…
[cited by applicant]
JEOL-IDES Products. Web Page. Went live May 27, 2020. Retrieved Mar. 11, 2022 at URL: https://www.jeol.co.jp/en/products/detail/JEOL-IDES_Products.html . 4 pages.
[cited by applicant]
Ji et al. Influence of cathode geometry on electron dynamics in an ultrafast electron microscope. Struct. Dyn. 4, 054303 (2017). Published online Jul. 17, 2017. 18 pages.
[cited by applicant]
Jones et al. Identifying and Correcting Scan Noise and Drift in the Scanning Transmission Electron Microscope. Microscopy and Microanalysis 19(4), 1050-1060 (2013). Retrieved Feb. 9, 2023 at URL: https://academic.oup.co…
[cited by applicant]
Jones et al. Smart Align—a new tool for robust non-rigid registration of scanning microscope data. Advanced Structural and Chemical Imaging (2015) 1:8. 16 pages.
[cited by applicant]
Jones. Practical Aspects of Quantitative and High-Fidelity STEM Data Recording. In Bruma, ed. Scanning Transmission Electron Microscope, First Edition. First published 2020. CRC Press, Boca Raton, FL. 39 pages.
[cited by applicant]
Kim et al. Quantitative measurement of strain field in strained-channel-transistor arrays by scanning moiré fringe imaging. Appl. Phys. Lett. 103, 033523 (2013). Published online Jul. 19, 2013. 3 pages.
[cited by applicant]
Kovarik et al. Implementing an accurate and rapid sparse sampling approach for low-dose atomic resolution STEM imaging. Applied Physics Letters 109, 164102 (2016). Published online Oct. 21, 2016. 5 pages.
[cited by applicant]
Kudryashov et al. Grey scale structures formation in SU-8 with e-beam and UV. Microelectronic Engineering, vol. 67-68, pp. 306-311 (2003).
[cited by applicant]
Lagrange et al. Movie-mode dynamic electron microscopy. MRS Bulletin, vol. 40, pp. 22-28 (Jan. 2015).
[cited by applicant]
Lebeau. Experimental quantification of annular dark-field images in scanning transmission electron microscopy. Ultramicroscopy 108 (2008) 1653-1658.
[cited by applicant]
M & M 2017, Microscopy & Microanalysis, Onsite Program Guide & Exhibitor Information, Aug. 6-10, 2017, St. Louis, MO. Downloaded Mar. 14, 2022 at URL: https://www.microscopy.org/MandM/2017/program/OnsiteProgram2017_Web.…
[cited by applicant]
Midgley. Sparsity, Parsimony and Data Reduction—Applications across Multi-Dimensional Electron Microscopy. Microsc. Microanal. 23 (Suppl 1), pp. 112-113 (2017).
[cited by applicant]
Moerland et al. Time-resolved cathodoluminescence microscopy with sub-nanosecond beam blanking for direct evaluation of the local density of states. Opt. Express 24, 24760-24772 (2016).
[cited by applicant]
Mullarkey et al. Development of a Practicable Digital Pulse Read-Out for Dark-Field STEM. Microscopy and Microanalysis 27, 99-108 (2021).
[cited by applicant]
Mullarkey et al. Using Your Beam Efficiently: Reducing Electron Dose in the STEM via Flyback Compensation. Microscopy and Microanalysis (2022), 28, 1428-1436. Retrieved Feb. 8, 2023 at URL: https://www.cambridge.org/cor…
[cited by applicant]
Müller et al. Atomic electric fields revealed by a quantum mechanical approach to electron picodiffraction. Nature Communications 5:5653 (Dec. 15, 2014). 8 pages.
[cited by applicant]
Olshin et al. Atomic-Resolution Imaging of Fast Nanoscale Dynamics with Bright Microsecond Electron Pulses. Nano Lett. 2021, 21, 1, 612-618. Epub Dec. 10, 2020.
[cited by applicant]
Ophus et al. Computational Methods for Large Scale Scanning Transmission Electron Microscopy (STEM) Experiments and Simulations. Microsc. Microanal. 23 (Suppl 1), pp. 162-163 (2017).
[cited by applicant]
Ophus. Four-Dimensional Scanning Transmission Electron Microscopy (4D-STEM): From Scanning Nanodiffraction to Ptychography and Beyond. Microscopy and Microanalysis 25, 563-582 (2019). Retrieved Feb. 9, 2023 at URL: http…
[cited by applicant]
PCT/US2022/016479 International Search Report and Written Opinion dated May 31, 2022.
[cited by applicant]
Peters et al. Improving the Noise Floor and Speed of Your Detector: A Modular Hardware Approach for Under $1000. Microsc. Microanal. 28 (Suppl 1), pp. 2904-2906 (2022). Retrieved Feb. 8, 2023 at URL: https://www.cambrid…
[cited by applicant]
Piazza et al. Design and implementation of a fs-resolved transmission electron microscope based on thermionic gun technology. Chemical Physics 423 (2013) 79-84. Available online Jul. 9, 2013.
[cited by applicant]
Piazza et al. Simultaneous observation of the quantization and the interference pattern of a plasmonic near-field. Nature Communications, 6:6407 (Mar. 2, 2015). 7 pages.
[cited by applicant]
Price Schedule. IDES. Provided to Sales Team Apr. 21, 2020. One page.
[cited by applicant]
Qiu et al. GHz laser-free time-resolved transmission electron microscopy: A stroboscopic high-duty-cycle method. Ultramicroscopy, vol. 161, pp. 130-136 (Feb. 2016). Retrieved Mar. 14, 2022 at URL: https://www.sciencedir…
[cited by applicant]
Reed et al. Background Removal and Data Analysis for Low-Loss Transmission Electron Energy-Loss Spectroscopy. Microscopy and Microanalysis, 8(S02), 598-599 (2002).
[cited by applicant]
Reed et al. Compressively Sensed Video Acquisition in Transmission Electron Microscopy. Microsc. Microanal. 23 (Suppl 1), pp. 84-85 (2017).
[cited by applicant]
Reed et al. Electrostatic Switching for Spatiotemporal Dose Control in a Transmission Electron Microscope. Microsc. Microanal. 28 (Suppl 1), pp. 2230-2231 (2022). Retrieved Feb. 8, 2023 at URL: https://www.cambridge.org…
[cited by applicant]
Rez et al. Damage-free vibrational spectroscopy of biological materials in the electron microscope. Nature Communications 7:10945 (Mar. 10, 2016). 8 pages.
[cited by applicant]
Rosenauer et al. Measurement of composition profiles in III-nitrides by quantitative scanning transmission electron microscopy. J. Phys.: Conf. Ser. 209 012009 (2010). 4 pages.
[cited by applicant]
Sanders et al. Inpainting vs denoising for dose reduction in scanning-beam microscopies. Manuscript received and revised. Published in IEEE Transactions on Image Processing, vol. 29, pp. 351-359 (2020). Retrieved Feb. 1…
[cited by applicant]
Sang et al. Revolving scanning transmission electron microscopy: Correcting sample drift distortion without prior knowledge. Ultramicroscopy 138 (2014) 28-35. Available online Dec. 31, 2013.
[cited by applicant]
Specifications for Electrostatic Dose Modulator. Version 1.06. IDES, Inc. Apr. 20, 2020. Provided to Sales Team Apr. 21, 2020. 7 pages.
[cited by applicant]
Stevens, et al. Applying compressive sensing to TEM video: a substantial frame rate increase on any camera. Advanced Structural and Chemical Imaging. 2015; 1(10):1-20.
[cited by applicant]
Stroppa et al. High-Resolution Scanning Transmission Electron Microscopy (HRSTEM) Techniques: High-Resolution Imaging and Spectroscopy Side by Side. ChemPhysChem 2012, 13, 437-443.
[cited by applicant]
U.S. Appl. No. 17/688,339 Notice of Allowance dated Jul. 11, 2022.
[cited by applicant]
U.S. Appl. No. 17/688,339 Notice of Allowance dated May 4, 2022.
[cited by applicant]
U.S. Appl. No. 17/825,261 Notice of Allowance dated Mar. 17, 2023.
[cited by applicant]
U.S. Appl. No. 17/825,261 Office Action dated Jan. 24, 2023.
[cited by applicant]
Vandenbussche et al. Mitigating Damage to Hybrid Perovskites Using Pulsed-Beam TEM. ACS Omega 2020, 5, 31867-31871.
[cited by applicant]
Zhou et al. Non-Parametric Bayesian Dictionary Learning for Sparse Image Representations. In Advances in neural information processing systems, Bengio et al., eds., Neural Information Processing Systems Foundation, USA,…
[cited by applicant]
PCT/US2024/013606 International Search Report and Written Opinion dated Jul. 12, 2024.
[cited by applicant]
PCT/US2024/013606 Invitation to Pay Additional Fees dated Apr. 8, 2024.
[cited by applicant]
U.S. Appl. No. 18/104,101 Notice of Allowance dated Jul. 28, 2023.
[cited by applicant]
U.S. Appl. No. 18/104,101 Office Action dated Apr. 20, 2023.
[cited by applicant]
U.S. Appl. No. 18/201,536 Notice of Allowance dated May 1, 2024.
[cited by applicant]