IP Library Granted Patent US 12,710,773
Granted Patent B2
US 12,710,773 · App. 18/408,832 · Granted Aug 18, 2026

Fluid delivery system

Inventors: Philip Ryan Barros (Pleasanton, CA); Greg Patrick Mulligan (Milpitas, CA); Dustin Tomhave (Sartell, MN); Christopher Bryant Davis (Georgetown, TX)
G05D7/0635F16K11/22F16K27/003
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Quick Facts
Patent No.
US 12,710,773
App. No.
18/408,832
Granted
Aug 18, 2026
Kind
B2
Abstract

Systems for processing articles are essential for semiconductor fabrication. In one embodiment, a system is disclosed comprising a plurality of fluid supplies configured to supply process fluids, a plurality of apparatuses for controlling flow, a plurality of mounting substrates, a vacuum manifold fluidly coupled to the plurality of mounting substrates, an outlet manifold fluidly coupled to the plurality of mounting substrates, a vacuum source fluidly coupled to the vacuum manifold, and a processing chamber fluidly coupled to the outlet manifold. The plurality of apparatuses for controlling flow have a bleed port and an outlet. The outlets of the plurality of apparatuses are fluidly coupled to corresponding outlet ports of the plurality of mounting substrates. The bleed ports of the plurality of apparatuses are fluidly coupled to the corresponding vacuum ports of the plurality of mounting substrates.

Claims (32)

1 . An apparatus for controlling flow of a process fluid, the apparatus comprising:

an inlet;

an outlet;

a bleed port;

a flow path extending from the inlet to the outlet;

a bleed path extending from the flow path, the bleed path comprising the bleed port;

a first valve operably coupled to the flow path and located between the inlet and the outlet, the first valve configured to control flow of the process fluid in the flow path;

a flow restrictor having a flow impedance, the flow restrictor operably coupled to the flow path and located between the inlet and the outlet;

a second valve operably coupled to the flow path and located between the inlet and the outlet, the second valve configured to control flow of the process fluid from the flow path to the bleed port, wherein the second valve comprises:

a valve seat; and

a closure element configured to sealingly engage the valve seat, wherein the valve seat is positioned in the bleed path and not the flow path; and

a mounting portion, the mounting portion comprising the outlet and the bleed port.

2 . The apparatus of claim 1 , wherein the mounting portion comprises a sealing surface and a plurality of mounting holes.

3 . The apparatus of claim 1 , wherein the mounting portion comprises a planar surface.

4 . The apparatus of claim 1 , wherein the mounting portion comprises:

a first portion, wherein the inlet is defined in the first portion; and

a second portion, wherein the outlet and the bleed port are defined in the second portion, and wherein the first portion and the second portion are separated by a gap.

5 . The apparatus of claim 1 , wherein the flow path comprises:

a first angled segment extending intermediate the inlet and the first valve; and

a second angled segment extending intermediate the first valve and the second valve.

6 . The apparatus of claim 5 , wherein the flow path comprises a third angled segment extending intermediate the second valve and the outlet.

7 . An apparatus for controlling flow of a process fluid, the apparatus comprising:

an inlet;

an outlet;

a flow path extending from the inlet to the outlet;

a bleed path extending from the flow path to a bleed port;

a first valve configured to control flow of the process fluid in the flow path;

a flow restrictor having a flow impedance, the flow restrictor being positioned in the flow path between the inlet and the outlet;

a second valve configured to control flow of the process fluid from the flow path to the bleed port, wherein the second valve comprises:

a valve seat; and

a closure element configured to sealingly engage the valve seat, wherein the valve seat is positioned in the bleed path and is offset from the flow path; and

a mounting portion comprising the outlet and the bleed port.

Assignments (2)
SECURITY INTEREST Recorded Sep 29, 2025
From: ICHOR SYSTEMS, INC.; IMG ALTAIR, LLC
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 072979/0862 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 11, 2024
From: BARROS, PHILIP RYAN; MULLIGAN, GREG PATRICK; TOMHAVE, DUSTIN; DAVIS, CHRISTOPHER BRYANT
To: ICHOR SYSTEMS, INC.
Reel/Frame 069198/0856 →
Continuity (6)
Continuation In Part 17865553 · Jul 15, 2022
Continuation In Part 17670723 · Feb 14, 2022
Provisional Application 63320326 · Mar 16, 2022
Provisional Application 63225148 · Jul 23, 2021
Provisional Application 63155861 · Mar 3, 2021
Related Publication 20240183463A1 · Jun 6, 2024
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