IP Library Granted Patent US 8,376,312
Granted Patent B2
US 8,376,312 · App. 11/932,429 · Granted Feb 19, 2013

Flow restrictor

Inventors: Daniel T Mudd (Sparks, NV); William W White (Sparks, NV); Virginia Miller (Sparks, NV); Christopher Davis (Richardson, TX); Kimura Miyoshi (Koyoto, JP); Tadahiro Yasuda (Koyoto, JP)
Assignee: Horiba, Ltd.
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Quick Facts
Patent No.
US 8,376,312
App. No.
11/932,429
Granted
Feb 19, 2013
Kind
B2
Abstract

A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.

Claims (19)

1. A flow restrictor comprising:

a first disk having a at least one inlet and at least one outlet and a flow path connecting the inlet and the outlet

a second disk having no flow path,

a plurality of first disks and a plurality of second disks being piled up alternatively to have a laminate structure,

the first disk and the second disk being non-sintered metals,

a through hole formed in the first disk providing the inlet, the outlet and the flow path, and

a cross-sectional area of the flow path being adjustable based on a thickness of the first disk.

2. The flow restrictor of claim 1 , further comprising a number of flow paths, the number being determinative of a desired flow rate.

3. The flow restrictor of claim 1 , wherein the flow path is formed by etching.

4. The flow restrictor of claim 3 , wherein the flow path is etched through.

5. The flow restrictor of claim 1 , wherein a cross-sectional area of the flow path is determined based on a desired flow rate.

6. The flow restrictor of claim 1 , wherein a number of first disks and a number of second disks is determined based on a flow rate.

7. The flow restrictor of claim 1 , wherein a cross-sectional area of the flow path is constant.

8. The flow restrictor of claim 1 , wherein the flow path is in a straight line.

9. The flow restrictor of claim 1 , wherein the flow path is curved.

10. The flow restrictor of claim 9 , wherein a centerline of the flow path is an Archimedean spiral.

11. The flow restrictor of claim 1 , wherein the first disk and the second disk are circular in shape.

12. The flow restrictor of claim 1 , wherein a fluid flow through the flow restrictor is compressible.

13. The flow restrictor of claim 1 , wherein a fluid flow through the flow restrictor is non-linear.

Continuity (4)
Continuation 11063745 · Feb 24, 2005
Continuation In Part 11652506 · Aug 28, 2003
Provisional Application 60548109 · Feb 27, 2004
Related Publication 20080041481A1 · Feb 21, 2008