Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium
There is provided a technique that includes: (a) forming an inhibitor layer on a surface of a first material of a concave portion provided on a surface of a substrate, by supplying a precursor to the substrate to adsorb at least a portion of a molecular structure of molecules constituting the precursor on the surface of the first material of the concave portion, the concave portion being composed of the first material containing a first element and a second material containing a second element different from the first element; (b) growing a film on a surface of the second material of the concave portion by supplying a film-forming material to the substrate having the inhibitor layer formed on the surface of the first material; and (c) forming a hydroxyl group termination on the surface of the first material before performing (a).
1. A processing method comprising:
(a) forming an inhibitor layer on a surface of a first material of a concave portion provided on a surface of a substrate, by supplying a precursor to the substrate to adsorb at least a portion of a molecular structure of molecules constituting the precursor on the surface of the first material of the concave portion, the concave portion being composed of the first material containing a first element and a second material containing a second element different from the first element;
(b) growing a film on a surface of the second material of the concave portion by supplying a film-forming material to the substrate having the inhibitor layer formed on the surface of the first material; and
(c) forming a hydroxyl group termination on the surface of the first material before performing (a).
2. The method of claim 1 , wherein an amount of hydroxyl group terminations on the surface of the first material before performing (a) is larger than an amount of hydroxyl group terminations on the surface of the second material before performing (a).
3. The method of claim 1 , wherein a density of hydroxyl group terminations on the surface of the first material before performing (a) is larger than a density of hydroxyl group terminations on the surface of the second material before performing (a).
4. The method of claim 1 , wherein a hydroxyl group termination is not formed on the surface of the second material before performing (a).
5. The method of claim 1 , wherein in (c), the hydroxyl group termination is formed on the surface of the first material by supplying a reaction material to the substrate to oxidize the surface of the first material.
6. The method of claim 1 , wherein in (c), a hydroxyl group termination is formed on the surface of the second material, and
wherein the method further comprises:
(d) removing the hydroxyl group termination formed on the surface of the second material after performing (c) and before performing (a).
7. The method of claim 6 , wherein in (c), the hydroxyl group termination is formed on the surface of the second material as the surface of the second material is oxidized,
wherein in (d), the hydroxyl group termination formed on the surface of the second material is removed by heating the substrate to sublimate an oxide formed on the surface of the second material.
8. The method of claim 6 , wherein in (d), the hydroxyl group termination formed on the surface of the second material is removed while retaining the hydroxyl group termination formed on the surface of the first material.
9. The method of claim 1 , further comprising:
(e) removing a native oxide film on the surfaces of the first material and the second material before performing (c).
10. The method of claim 1 , the concave portion has a bottom surface composed of the second material.
11. The method of claim 10 , the concave portion has at least one selected from the group of a top surface and a side surface composed of the first material.
12. The method of claim 10 , wherein in (b), by growing the film on the surface of the second material of the concave portion, the film is grown bottom-up in an inside of the concave portion to bury the inside of the concave portion with the film.
13. The method of claim 1 , wherein (b) includes:
performing a cycle a predetermined number of times, the cycle including:
(b1) supplying a raw material as the film-forming material to the substrate; and
(b2) supplying a reactant as the film-forming material to the substrate.
14. The method of claim 13 , wherein in at least one selected from the group of (b1) and (b2), a catalyst is further supplied as the film-forming material to the substrate.
15. The method of claim 1 , wherein the second material further contains the first element.
16. The method of claim 1 , wherein the first element is silicon, and the second element is germanium.
17. The method of claim 1 , wherein the first material is silicon, and the second material is silicon germanium.
18. The method of claim 1 , wherein in (b), a film containing silicon, oxygen, and carbon is grown as the film.
19. A method of manufacturing a semiconductor device, comprising:
(a) forming an inhibitor layer on a surface of a first material of a concave portion provided on a surface of a substrate, by supplying a precursor to the substrate to adsorb at least a portion of a molecular structure of molecules constituting the precursor on the surface of the first material of the concave portion, the concave portion being composed of the first material containing a first element and a second material containing a second element different from the first element; and
(b) growing a film on a surface of the second material of the concave portion by supplying a film-forming material to the substrate having the inhibitor layer formed on the surface of the first material,
(c) forming a hydroxyl group termination on the surface of the first material before performing (a).
20. A processing apparatus comprising:
a precursor supply system configured to supply a precursor to a substrate;
a film-forming material supply system configured to supply a film-forming material to the substrate; and
a controller configured to be capable of controlling an operation of the processing apparatus so as to perform a process including:
(a) forming an inhibitor layer on a surface of a first material of a concave portion provided on a surface of the substrate, by supplying the precursor to the substrate to adsorb at least a portion of a molecular structure of molecules constituting the precursor on the surface of the first material of the concave portion, the concave portion being composed of the first material containing a first element and a second material containing a second element different from the first element; and
(b) growing a film on a surface of the second material of the concave portion by supplying the film-forming material to the substrate having the inhibitor layer formed on the surface of the first material,
(c) forming a hydroxyl group termination on the surface of the first material before performing (a).
21. A non-transitory computer-readable recording medium storing a program that causes, by a computer, a processing apparatus to perform a process comprising the method of claim 1 .