COMPOUND MICRO-ASSEMBLY STRATEGIES AND DEVICES
The disclosed technology relates generally to designs and methods of assembling devices utilizing compound micro-assembly. Functional elements are micro-assembled to form an array of individual micro-systems on an intermediate substrate, then the microsystems are transferred (one or more at a time) to a destination or device substrate. For example, for a display device, each micro-system may be an individual pixel containing red, blue, and green micro LEDs and a silicon drive circuit. An array of pixels may be formed by micro-transfer printing functional elements onto the intermediate substrate and electrically connecting them via fine lithography, then the individual pixels may be micro-transfer printed onto the destination substrate.
1 . A compound micro-assembled macro-system comprising:
a destination substrate;
micro-systems printed on and non-native to the destination substrate, each of the micro-systems comprising (i) an intermediate substrate, (ii) micro-devices printed on and non-native to the intermediate substrate, and (iii) lithographically formed fine interconnections, wherein each of the fine interconnections has a width greater than or equal to 100 nm and less than 10 μm, each of the fine interconnections is electrically connected to at least one of the micro-devices, and the micro-devices disposed on the intermediate substrate are electrically connected using the fine interconnections; and
lithographically formed crude interconnections on the destination substrate, wherein the crude interconnections are electrically connected to the fine interconnections of the micro-systems and each of the crude interconnections has a width greater than or equal to 10 μm and less than or equal to 2 mm.
2 . The macro-system of claim 1 , wherein each of the crude interconnections extends over an edge of and onto the intermediate substrate of one of the micro-systems.
3 . The macro-system of claim 1 , wherein each of the crude interconnections is directly electrically connected to a fine interconnection of the fine interconnections for a micro-system of the micro-systems.
4 . The macro-system of claim 1 , wherein the micro-devices are electrically interconnected exclusively with ones of the fine interconnections.
5 . The macro-system of claim 1 , wherein, for each of the micro-systems, the micro-devices are electrically connected to the crude interconnections exclusively by the fine interconnections.
6 . The macro-system of claim 1 , wherein the micro-devices comprise a first micro-device comprising a first semiconductor material and a second micro-device comprising a second semiconductor material and the first semiconductor material is a different semiconductor from the second semiconductor material.
7 . The macro-system of claim 6 , wherein the first micro-device is a light emitting diode, the second micro-device is a control circuit, the first semiconductor material is a compound semiconductor, and the second semiconductor material is silicon.
8 . The macro-system of claim 1 , wherein the micro-systems are pixels.
9 . The macro-system of claim 1 , wherein the macro-system is a heterogeneously integrated system.
10 . The macro-system of claim 1 , wherein the micro-devices and the destination substrate are made of different materials.
11 . The macro-system of claim 1 , wherein each of the micro-systems comprises connection pads and the fine interconnections are electrically connected to the crude interconnections through the connection pads.
12 . The macro-system of claim 1 , wherein the crude interconnections have been lithographically formed after the micro-systems have been printed onto the destination substrate.
13 . The macro-system of claim 1 , wherein the fine interconnections have been lithographically formed after the micro-devices have been printed onto the intermediate substrate.
14 . The macro-system of claim 1 , wherein each of the micro-devices has at least one dimension from 2 to less than 20 μm.
15 . The macro-system of claim 1 , wherein the micro-devices comprise an integrated circuit.
16 . The macro-system of claim 1 , wherein the destination substrate has a contiguous substrate area, the micro devices each have a device area and are each disposed within the contiguous substrate area, and the device area of the micro devices of all of the micro-systems combined is less than or equal to one-quarter of the contiguous substrate area.
17 . The macro-system of claim 16 , where the plurality of micro devices are distributed over the contiguous substrate area in an array.
18 . The macro-system of claim 1 , wherein the macro-system is a multi-functional system.
19 . The macro-system of claim 1 , wherein the micro-systems are polyfunctional.
20 . The macro-system of claim 1 , wherein the macro-system is a display.