Granted Patent B2

US 12,482,688 · App. 18/433,493 · Granted Nov 25, 2025

Inventors: Sol-Lee Hwang (Hwaseong-si, KR); Hee-Chul Lim (Hwaseong-si, KR); Dong-Won Jung (Hwaseong-si, KR); Min-Ho Lee (Hwaseong-si, KR); Hyun-Kyoo Shon (Hwaseong-si, KR)

Assignee: AUROS TECHNOLOGY, INC.

H01L21/681

Abstract

Claims (39)

1 . An overlay measurement device for measuring an error between a first overlay mark and a second overlay mark respectively formed on different layers of a wafer, the overlay measurement device comprising:

a light source;

an aperture that changes a beam from the light source to be suitable for photographing the first overlay mark or the second overlay mark;

a detector for obtaining an image of the first overlay mark or an image of the second overlay mark;

a transmission and receipt part; and

a processor connecting to the transmission and receipt part electrically,

wherein the processor is configured to:

obtain data transmitted from a user terminal through the transmission and receipt part,

analyze a recipe included in the data,

perform optimization of measurement options of a wafer, based on the recipe, after the recipe is analyzed,

calculate statistical values of a plurality of parameters in relation each aperture by measuring one or more apertures once,

apply a weight respectively to the calculated statistical values, and

perform an aperture optimization process of selecting an aperture where a total of the statistical values to which the weight is applied respectively is a minimum value.

2 . The overlay measurement device of claim 1 , wherein the data comprises information indicating whether to perform the optimization of measurement options of a wafer.

3 . The overlay measurement device of claim 1 , wherein the data comprises information on a recipe that is input to measure characteristic of a wafer through a manager program installed in the user terminal and identification information associated with the overlay measurement device.

4 . The overlay measurement device of claim 3 , wherein the identification information comprises an internet protocol (IP) address, an identifier, and a password of the overlay measurement device, and an IP of a server.

5 . The overlay measurement device of claim 1 , wherein the processor determines authenticity of a file of the recipe by using at least one of a name form and a file extension of the file of the recipe included in the data.

6 . The overlay measurement device of claim 1 , wherein the plurality of parameters comprises at least one of Final Residual 3 Sigma, Tis 3 Sigma, Registration 3 Sigma, total measurement uncertainty (TMU), and move and measure (MAM) time, or comprises total weight comprised of combinations thereof.

7 . The overlay measurement device of claim 1 , wherein the processor stores information on options that are chosen in an aperture optimization process, in a memory.

8 . An overlay measurement system, comprising:

a user terminal generating data that comprise information on a recipe which is input through a manager program, and identification information associated with an overlay measurement device, and transmitting the generated data to an overlay measurement device corresponding to the identification information, and

the overlay measurement device analyzing a recipe included in the data that are received from the user terminal, and performing optimization of measurement options of a wafer, based on the recipe, after the recipe is analyzed,

wherein the overlay measurement device measures an error between a first overlay mark and a second overlay mark respectively formed on different layers of a wafer,

wherein the overlay measurement device comprises a light source, an aperture that changes a beam from the light source to be suitable for photographing the first overlay mark or the second overlay mark, and a detector for obtaining an image of the first overlay mark or an image of the second overlay mark,

wherein the overlay measurement device is configured to:

calculate statistical values of a plurality of parameters in relation each aperture by measuring one or more apertures once,

apply a weight respectively to the calculated statistical values, and

perform an aperture optimization process of selecting an aperture where a total of the statistical values to which the weight is applied respectively is a minimum value.

9 . A method of an overlay measurement device for measuring an error between a first overlay mark and a second overlay mark respectively formed on different layers of a wafer, the method comprising:

receiving data from a user terminal, the data comprising information indicating whether to execute the optimization of measurement options of a wafer;

analyzing a recipe that is included in the data; and

when analyzing the recipe is completed and the data includes information indicating an execution of the optimization, performing optimization of measurement options of a wafer, based on the recipe,

wherein the overlay measurement device comprises a light source, an aperture that changes a beam from the light source to be suitable for photographing the first overlay mark or the second overlay mark, and a detector for obtaining an image of the first overlay mark or an image of the second overlay mark, and

wherein the optimization comprises:

calculating statistical values of a plurality of parameters in relation each aperture by measuring one or more apertures once,

applying a weight respectively to the calculated statistical values, and

performing an aperture optimization process of selecting an aperture where a total of the statistical values to which the weight is applied respectively is a minimum value.

10 . The method of claim 9 , wherein receiving data comprises determining authenticity of a file of the recipe by using at least one of a name form and a file extension of the file of the recipe included in the data.

11 . The method of claim 9 , wherein the plurality of parameters comprises at least one of Final Residual 3 Sigma, Tis 3 Sigma, Registration 3 Sigma, total measurement uncertainty (TMU), and move and measure (MAM) time, or comprises total weight comprised of combinations thereof.

Assignments (1)

Priority Claims (1)

Continuity (2)

References Cited (26)