Display device and method of manufacturing display device
A display device includes electrodes spaced apart from each other, a first insulating layer disposed on the electrodes, a light emitting element disposed on the first insulating layer, and a connection electrode contacting the light emitting element on the light emitting element. The electrodes include a first electrode layer, a second electrode layer, and a third electrode layer. The first electrode layer, the second electrode layer, and the third electrode layer are sequentially stacked. A surface of the second electrode layer includes an Al—Ni—Cu precipitate. The connection electrode contacts the surface of the second electrode layer through a contact hole formed in the third electrode layer.
1 . A display device comprising:
electrodes spaced apart from each other;
a first insulating layer disposed on the electrodes;
a light emitting element disposed on the first insulating layer; and
a connection electrode contacting the light emitting element on the light emitting element, wherein
the electrodes include:
a first electrode layer;
a second electrode layer; and
a third electrode layer,
the first electrode layer, the second electrode layer, and the third electrode layer are sequentially stacked,
the second electrode layer includes an Al—Ni—Cu precipitate on a surface of the second electrode layer, and
the connection electrode contacts the surface of the second electrode layer through a contact hole formed in the third electrode layer.
2 . The display device according to claim 1 , wherein the first electrode layer and the third electrode layer include a same material.
3 . The display device according to claim 1 , wherein the first electrode layer and the third electrode layer include IZO.
4 . The display device according to claim 1 , wherein the second electrode layer includes about 0.5 at % to about 1.0 at % of Ni, about 0.3 at % to about 1.0 at % of La, about 0.5 at % to about 1.0 at % of Cu, and a balance of Al.
5 . The display device according to claim 1 , wherein the connection electrode includes ITO.
6 . The display device according to claim 1 , wherein the connection electrode contacts the surface of the second electrode layer through a contact hole formed in the first insulating layer.
7 . The display device according to claim 6 , further comprising:
a second insulating layer disposed on the light emitting element,
wherein the connection electrode contacts an end of the light emitting element exposed by the second insulating layer.
8 . The display device according to claim 1 , wherein the second electrode layer further includes an aluminum oxide film on the surface of the second electrode layer.
9 . The display device according to claim 1 , wherein a thickness of the first electrode layer and the third electrode layer is in a range of about 50 Å to about 150 Å.
10 . The display device according to claim 1 , wherein a thickness of the second electrode layer is in a range of about 1,000 Å to about 2,000 Å.
11 . A method of manufacturing a display device, the method comprising:
forming a first electrode layer and a second electrode layer and applying heat;
forming a third electrode layer on the second electrode layer;
forming a first insulating layer on the third electrode layer;
providing a light emitting element on the first insulating layer;
forming a contact hole in the third electrode layer and the first insulating layer; and
forming a connection electrode on the light emitting element,
wherein the connection electrode contacts a surface of the second electrode layer through the contact hole.
12 . The method according to claim 11 , wherein an Al—Ni—Cu precipitate is formed on the surface of the second electrode layer in the applying of the heat.
13 . The method according to claim 11 , further comprising:
forming a bank on the first insulating layer.
14 . The method according to claim 13 , wherein the second electrode layer is covered by the third electrode layer in the forming of the bank.
15 . The method according to claim 14 , wherein the light emitting element is provided in an opening of the bank.
16 . The method according to claim 15 , wherein the light emitting element is aligned between electrodes including the first electrode layer, the second electrode layer, and the third electrode layer.
17 . The method according to claim 11 , wherein the second electrode layer is covered by the third electrode layer in the forming of the first insulating layer.
18 . The method according to claim 11 , further comprising:
forming a second insulating layer on the light emitting element,
wherein the second electrode layer is covered by the third electrode layer in the forming of the second insulating layer.
19 . The method according to claim 18 , wherein the connection electrode contacts an end of the light emitting element exposed by the second insulating layer.
20 . The method according to claim 11 , wherein the second electrode layer is formed of an alloy including about 0.5 at % to about 1.0 at % of Ni, about 0.3 at % to about 1.0 at % of La, about 0.5 at % to about 1.0 at % of Cu, and a balance of Al.