Coating compositions for use with an overcoated photoresist
Organic coating compositions, particularly antireflective coating compositions for use with an overcoated photoresist, are provided that in a first aspect comprise a crosslinker component that comprises a structure of the following Formula (I):
1. A coated substrate comprising:
a substrate having thereon:
a) a coating composition comprising:
a resin that comprises one or more glycoluril groups that have a non-hydrogen substituent at the 1 and/or 5 glycoluril ring positions, wherein the resin comprises 1) polyester linkages and/or 2) polymerized isocyanurate groups, wherein the one or more glycoluril groups are pendant glycoluril groups covalently linked to the resin; and
b) a layer of a photoresist composition above the coating composition layer.
2. The coated substrate of claim 1 , wherein the resin comprises one or more glycoluril groups of Formula (I):
wherein in Formula (I):
at least one of R 1 and R 2 is other than hydrogen or a resin linker;
each R is the same or different and independently selected from a resin linker, hydrogen, optionally substituted alkyl, optionally substituted heteroalkyl, or optionally substituted carbocyclic aryl; and
wherein at least one R group is an optionally substituted carbon alicyclic group, or an optionally substituted carbocyclic aryl group,
provided that one R is the resin linker, and the one or more glycouril groups are pendant moieties of a backbone of the resin; and
b) a layer of a photoresist composition above the coating composition layer.
3. The coated substrate of claim 2 , wherein at least one of R 1 and R 2 is optionally substituted alkyl or optionally substituted heteroalkyl.
4. The coated substrate of claim 2 , wherein the resin comprises 1) polyester linkages and/or 2) polymerized isocyanurate groups.
5. The coated substrate of claim 2 , wherein in Formula (I) one or more R groups comprise an optionally substituted carbon alicyclic group.
6. The coated substrate of claim 2 , wherein in Formula (I) one or more R groups comprise an optionally substituted heteroalkyl moiety.
7. The coated substrate of claim 2 , wherein the resin comprises a chromophore group.
8. The coated substrate of claim 2 , wherein one or more R groups comprise a carbocyclic aryl moiety.
9. The coated substrate of claim 2 , wherein the resin comprises a structure derived from formulae 1, 2, 3, 4, 5, 6, 7 or 8:
wherein in formulae 1, 2, 3, 4, 5, 6, 7 and 8, R 1 , R 2 , R 3 , and R 4 are independently selected from a resin linker, hydrogen, optionally substituted alkyl, optionally substituted heteroalkyl, or optionally substituted carbocyclic aryl, and at least one of R 1 , R 2 , R 3 , and R 4 is an optionally substituted carbon alicyclic group, or an optionally substituted carbocyclic aryl group.
10. The coated substrate of claim 2 , wherein the resin comprises a structure derived from one or more of the following:
11. A resin that comprises one or more glycoluril groups that have a non-hydrogen substituent at the 1 and/or 5 glycoluril ring positions, wherein the resin comprises 1) polyester linkages and/or 2) polymerized isocyanurate groups, wherein the one or more glycoluril groups are pendant glycoluril groups covalently linked to the resin.
12. The resin of claim 11 , wherein the resin comprises one or more glycoluril of the following Formula (I):
wherein in Formula (I):
at least one of R 1 and R 2 is other than hydrogen or a resin linker;
each R is the same or different and independently selected from a resin linker, hydrogen, optionally substituted alkyl, optionally substituted heteroalkyl, or optionally substituted carbocyclic aryl; and
wherein at least one R group is an optionally substituted carbon alicyclic group, or an optionally substituted carbocyclic aryl group;
provided that one R is the resin linker, and the one or more glycouril groups are pendant moieties of a backbone of the resin.
13. The resin of claim 12 , wherein at least one of R 1 and R 2 is optionally substituted alkyl or optionally substituted heteroalkyl.
14. The resin of claim 12 , wherein the resin comprises 1) polyester linkages and/or 2) polymerized isocyanurate groups.
15. The resin of claim 12 , wherein in Formula (I) one or more R groups comprise an optionally substituted carbon alicyclic group.
16. The resin of claim 12 , wherein in Formula (I) one or more R groups comprise an optionally substituted heteroalkyl moiety.
17. The resin of claim 12 , wherein the resin comprises a chromophore group.
18. The resin of claim 12 , wherein one or more R groups comprise a carbocyclic aryl moiety.
19. The resin of claim 12 , wherein the resin comprises a structure derived from formulae 1, 2, 3, 4, 5, 6, 7 or 8:
wherein in formulae 1, 2, 3, 4, 5, 6, 7 and 8, R 1 , R 2 , R 3 , and R 4 are independently selected from a resin linker, hydrogen, optionally substituted alkyl, optionally substituted heteroalkyl, or optionally substituted carbocyclic aryl, and at least one of R 1 , R 2 , R 3 , and R 4 is an optionally substituted carbon alicyclic group, or an optionally substituted carbocyclic aryl group.
20. The resin of claim 12 , wherein the resin comprises a structure derived from one or more of the following: