Substrate holder, substrate holding method, and film formation apparatus
Falling of a substrate and deformation or breakage of the substrate are inhibited. A substrate holder includes a hole portion in which a disk-shaped substrate is placed upright, and at least four supporting members attached elastically-deformably on a periphery of the hole portion. Two of the four supporting members support disk-shaped substrate at first- and second-side circumferential end portions of disk-shaped substrate positioned at vertical-direction upper positions of disk-shaped substrate. Remaining two of the four supporting members support disk-shaped substrate at third- and fourth-side circumferential end portions of disk-shaped substrate positioned at vertical-direction lower positions of disk-shaped substrate. Central angle in disk-shaped substrate between either first- or second-side circumferential end portion and uppermost end portion of disk-shaped substrate is from 15° through 40°. Central angle in disk-shaped substrate between either third- or fourth-side circumferential end portion and lowermost end portion of disk-shaped substrate is from 10° through 15°.
1 . A substrate holder, comprising:
a hole portion in which a disk-shaped substrate is placed upright; and
at least four supporting members attached elastically-deformably on a periphery of the hole portion,
wherein two supporting members of the four supporting members are configured to support the disk-shaped substrate at a first-side circumferential end portion and a second-side circumferential end portion of the disk-shaped substrate that are positioned at vertical-direction upper positions of the disk-shaped substrate,
remaining two supporting members of the four supporting members are configured to support the disk-shaped substrate at a third-side circumferential end portion and a fourth-side circumferential end portion of the disk-shaped substrate that are positioned at vertical-direction lower positions of the disk-shaped substrate,
each of a first central angle and a second central angle is in a range of from 15° through 40°, the first central angle being a central angle in the disk-shaped substrate between the first-side circumferential end portion and an uppermost end portion of the disk-shaped substrate that is positioned at a vertical-direction uppermost position of the disk-shaped substrate, and the second central angle being a central angle in the disk-shaped substrate between the second-side circumferential end portion and the uppermost end portion, and
each of a third central angle and a fourth central angle is in a range of from 10° through 15°, the third central angle being a central angle in the disk-shaped substrate between the third-side circumferential end portion and a lowermost end portion of the disk-shaped substrate that is positioned at a vertical-direction lowermost position of the disk-shaped substrate, and the fourth central angle being a central angle in the disk-shaped substrate between the fourth-side circumferential end portion and the lowermost end portion.
2 . The substrate holder according to claim 1 ,
wherein the supporting members are excluded from supporting the disk-shaped substrate at any portions of the disk-shaped substrate that are outside the range of from 15° through 40° and from the range of from 10° through 15°, the range of from 15° through 40° being defined by the first central angle and the second central angle, and the range of from 10° through 15° being defined by the third central angle and the fourth central angle.
3 . A substrate holding method by a substrate holder including: a hole portion in which a disk-shaped substrate is placed upright; and at least four supporting members attached elastically-deformably on a periphery of the hole portion, the substrate holding method comprising the substrate holder performing:
supporting the disk-shaped substrate at a first-side circumferential end portion and a second-side circumferential end portion of the disk-shaped substrate by two supporting members of the four supporting members, the first-side circumferential end portion and the second-side circumferential end portion being positioned at vertical-direction upper positions of the disk-shaped substrate; and
supporting the disk-shaped substrate at a third-side circumferential end portion and a fourth-side circumferential end portion of the disk-shaped substrate by remaining two supporting members of the four supporting members, the third-side circumferential end portion and the fourth-side circumferential end portion being positioned at vertical-direction lower positions of the disk-shaped substrate,
wherein each of a first central angle and a second central angle is in a range of from 15° through 40°, the first central angle being a central angle in the disk-shaped substrate between the first-side circumferential end portion and an uppermost end portion of the disk-shaped substrate that is positioned at a vertical-direction uppermost position of the disk-shaped substrate, and the second central angle being a central angle in the disk-shaped substrate between the second-side circumferential end portion and the uppermost end portion, and
each of a third central angle and a fourth central angle is in a range of from 10° through 15°, the third central angle being a central angle in the disk-shaped substrate between the third-side circumferential end portion and a lowermost end portion of the disk-shaped substrate that is positioned at a vertical-direction lowermost position of the disk-shaped substrate, and the fourth central angle being a central angle in the disk-shaped substrate between the fourth-side circumferential end portion and the lowermost end portion.
4 . A film formation apparatus, comprising:
a chamber in which a film formation process is performed on a disk-shaped substrate;
a carrier on which the substrate holder of claim 1 is situated, the substrate holder being configured to hold the disk-shaped substrate at least in the chamber; and
a conveying mechanism configured to convey the carrier.